Yuji Maehara

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Saitama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 9,291,912
- Issue date Mar 22, 2016
- Canon Kabushiki Kaisha
- Shinya Mochizuki
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 8,810,770
- Issue date Aug 19, 2014
- Canon Kabushiki Kaisha
- Yuji Maehara
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...
- Publication number 20140118709
- Publication date May 1, 2014
- Canon Kabushiki Kaisha
- Akira Morohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140055766
- Publication date Feb 27, 2014
- Canon Kabushiki Kaisha
- Shinya Mochizuki
- G02 - OPTICS
Information Patent Application
HOLDING APPARATUS, PROCESSING APPARATUS, LITHOGRAPHY APPARATUS, AND...
- Publication number 20140017613
- Publication date Jan 16, 2014
- Yuji Maehara
- B82 - NANO-TECHNOLOGY
Information Patent Application
HOLDING APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING A...
- Publication number 20130149647
- Publication date Jun 13, 2013
- Canon Kabushiki Kaisha
- Yuji Maehara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20110310366
- Publication date Dec 22, 2011
- Canon Kabushiki Kaisha
- Yuji Maehara
- B82 - NANO-TECHNOLOGY