Yuji Tange

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Mito, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle radiation device and image capturing condition det...
- Patent number 8,258,472
- Issue date Sep 4, 2012
- Hitachi High-Technologies Corporation
- Tamotsu Shindo
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam drawing process and electron beam drawing apparatus
- Patent number 6,337,486
- Issue date Jan 8, 2002
- Hitachi, Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing apparatus
- Patent number 6,246,064
- Issue date Jun 12, 2001
- Hitachi, Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing apparatus
- Patent number 6,127,683
- Issue date Oct 3, 2000
- Hitachi, Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing process
- Patent number 5,972,772
- Issue date Oct 26, 1999
- Hitachi Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE RADIATION DEVICE AND IMAGE CAPTURING CONDITION DET...
- Publication number 20110260058
- Publication date Oct 27, 2011
- Tamotsu Shindo
- G01 - MEASURING TESTING
Information Patent Application
Electron beam drawing process and electron beam drawing apparatus
- Publication number 20010015413
- Publication date Aug 23, 2001
- Hitachi, Ltd
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY