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Yuka NAKASATO
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Oshu City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Failure detection system and failure detection method
Patent number
11,526,160
Issue date
Dec 13, 2022
Tokyo Electron Limited
Yuka Nakasato
G05 - CONTROLLING REGULATING
Information
Patent Grant
Film-forming apparatus and film-forming method
Patent number
11,492,702
Issue date
Nov 8, 2022
Tokyo Electron Limited
Manabu Honma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method
Patent number
10,731,255
Issue date
Aug 4, 2020
Tokyo Electron Limited
Manabu Honma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ABNORMALITY DETECTING METHOD AND ABNORMALITY DETECTING APPARATUS
Publication number
20220018790
Publication date
Jan 20, 2022
TOKYO ELECTRON LIMITED
Yuka NAKASATO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ABNORMALITY DETECTING APPARATUS, SEMICONDUCTOR MANUFACTURING APPARA...
Publication number
20210407835
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Yuka NAKASATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAILURE DETECTION SYSTEM AND FAILURE DETECTION METHOD
Publication number
20210124341
Publication date
Apr 29, 2021
TOKYO ELECTRON LIMITED
Yuka NAKASATO
G05 - CONTROLLING REGULATING
Information
Patent Application
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
Publication number
20190136377
Publication date
May 9, 2019
TOKYO ELECTRON LIMITED
Manabu HONMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RELIEF VALVE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190136994
Publication date
May 9, 2019
TOKYO ELECTRON LIMITED
Yuka NAKASATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND COMPUTER READABLE...
Publication number
20180363134
Publication date
Dec 20, 2018
TOKYO ELECTRON LIMITED
Manabu HONMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...