Yuka NAKASATO

Person

  • Oshu City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Failure detection system and failure detection method

    • Patent number 11,526,160
    • Issue date Dec 13, 2022
    • Tokyo Electron Limited
    • Yuka Nakasato
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Film-forming apparatus and film-forming method

    • Patent number 11,492,702
    • Issue date Nov 8, 2022
    • Tokyo Electron Limited
    • Manabu Honma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming method

    • Patent number 10,731,255
    • Issue date Aug 4, 2020
    • Tokyo Electron Limited
    • Manabu Honma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents