Patent Application
20210407835
This application is based on and claims priority from Japanese Patent Application No. 2020-113510 filed on Jun. 30, 2020 with the Japan Patent Office, the disclosure of which is incorporated herein in its entirety by reference.
The present disclosure relates to an abnormality detecting apparatus, a semiconductor manufacturing apparatus, and an abnormality detecting method.
In a semiconductor manufacturing apparatus, a technique of detecting an abnormality of the apparatus is known (see, e.g., Japanese Laid-Open Patent Publication No. 2006-186280). In Japanese Laid-Open Patent Publication No. 2006-186280, the boundary data that defines a boundary between a normal region and an abnormal region are generated in a biaxial coordinate system based on correlation data between a first monitored object and a second monitored object that influences the first monitored object, and when the position of the correlation data determined by the values of both of the objects falls within the abnormal region, it is determined that an abnormality occurs.
According to an aspect of the present disclosure, an abnormality detecting apparatus detects an abnormality of a semiconductor manufacturing apparatus, and includes: a data generator configured to generate correlation data based on a value of a first monitoring target and a value of a second monitoring target that are correlated with each other; a calculator configured to calculate a slop of a regression line of the correlation data based on the correlation data; and an abnormality determiner configured to determine an abnormality of the semiconductor manufacturing apparatus based on the slope of the regression line.
The foregoing summary is illustrative only and is not intended to be in any way limiting. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features will become apparent by reference to the drawings and the following detailed description.
In the following detailed description, reference is made to the accompanying drawings which form a part hereof. The illustrative embodiments described in the detailed description, drawing, and claims are not meant to be limiting. Other embodiments may be utilized, and other changes may be made without departing from the spirit or scope of the subject matter presented here.
Hereinafter, a non-limiting embodiment of the present disclosure will be described with reference to the accompanying drawings. In all of the drawings, the same or corresponding members or components will be denoted by the same or corresponding reference numerals, and overlapping descriptions thereof will be omitted.
[System]
Referring to
A system 1 includes three semiconductor manufacturing apparatuses 10, a group management controller 40, and a terminal 60. Each semiconductor manufacturing apparatus 10 is communicably connected to the group management controller 40 via a network 70. The group management controller 40 is communicably connected to the terminal 60 via a network 90. While
[Semiconductor Manufacturing Apparatus]
Each semiconductor manufacturing apparatus 10 executes various semiconductor manufacturing processes. The semiconductor manufacturing processes include various processes for manufacturing a semiconductor device, such as, for example, a film forming process, an etching process, and a heating process. The semiconductor manufacturing apparatus 10 includes a sensor group 11 and an apparatus controller 12.
The sensor group 11 includes various sensors for detecting the state of the semiconductor manufacturing apparatus 10, such as, for example, a sensor for detecting an output of a pipe heater (hereinafter, also referred to as an “output detecting sensor”), and a sensor for detecting an opening degree of a pressure adjusting valve (hereinafter, also referred to as an “opening degree detecting sensor”). The output detecting sensor detects an output of a pipe heater attached to a supply pipe that supplies a gas into a processing container or an exhaust pipe that exhausts the inside of the processing container. The opening degree detecting sensor detects an opening degree of a pressure control valve provided in an exhaust pipe that exhausts the inside of the processing container.
The apparatus controller 12 controls the operation of each unit of the semiconductor manufacturing apparatus 10, so as to execute the various semiconductor manufacturing processes in the semiconductor manufacturing apparatus 10. The apparatus controller 12 may be, for example, a computer.
The semiconductor manufacturing apparatus 10 may be, for example, a cluster type apparatus in which a plurality of processing chambers is arranged around a transfer chamber, or an in-line type apparatus in which one processing chamber is disposed in one transfer chamber. Further, the semiconductor manufacturing apparatus 10 may be, for example, any of a single-wafer type apparatus, a semi-batch type apparatus, and a batch type apparatus. The single-wafer type apparatus is, for example, an apparatus that processes wafers one by one in a processing chamber. The semi-batch type apparatus is, for example, an apparatus in which a plurality of wafers placed on a rotary table in a processing chamber is revolved by the rotary table, so that each wafer passes through a region where a raw material gas is supplied and a region where a reaction gas that reacts with the raw material gas is supplied, in an order, thereby forming a film on the surface of the wafer. The batch type apparatus is, for example, an apparatus in which a processing chamber accommodates a wafer boat that holds a plurality of wafers horizontally at predetermined intervals in the height direction, thereby processing the plurality of wafers at once.
The semiconductor manufacturing apparatus 10 may be communicably connected to a host computer (not illustrated) via a network. The host computer may be connected to a device other than the semiconductor manufacturing apparatus 10 in a semiconductor factory, such as, for example, an inspection device for inspecting a semiconductor device manufactured by the semiconductor manufacturing apparatus 10 via a network. The inspection device includes, for example, a film thickness measuring device, an electrical characteristic measuring device, an optical characteristic measuring device, and a particle measuring device.
[Group Management Controller]
The group management controller 40 acquires a plurality of sensor values detected by the sensor group 11 while the semiconductor manufacturing apparatus 10 is executing a semiconductor manufacturing process, and executes an abnormality detecting method to be described later, based on the plurality of sensor values.
Referring to
The group management controller 40 includes a central processing unit (CPU) 401, a read only memory (ROM) 402, and a random access memory (RAM) 403. The CPU 401, the ROM 402, and the RAM 403 make up a so-called computer. The group management controller 40 further includes an auxiliary storage device 404, an operation device 405, a display device 406, an interface (I/F) device 407, and a drive device 408. The hardware components of the group management controller 40 are connected to each other via a bus 409.
The CPU 401 executes various programs installed in the auxiliary storage device 404.
The ROM 402 is a non-volatile memory, and functions as a main storage device. The ROM 402 stores various programs, information and others that are necessary when the CPU 401 executes the various programs installed in the auxiliary storage device 404.
The RAM 403 is a volatile memory such as a dynamic random access memory (DRAM) or a static random access memory (SRAM), and functions as a main storage device. The RAM 403 provides a work area where programs are to be developed when the CPU 401 executes the various programs installed in the auxiliary storage device 404.
The auxiliary storage device 404 stores various programs, or sensor values detected by the sensor group 11 when the CPU 401 executes the various programs.
The operation device 405 is an input device used when an operator inputs various instructions to the group management controller 40.
The display device 406 displays internal information of the group management controller 40.
The I/F device 407 is a connection device that is connected to the network 70 to communicate with the semiconductor manufacturing apparatus 10.
The drive device 408 is a device that performs a writing and a reading with respect to a recording medium. The recording medium includes, for example, a CD-ROM, a flexible disk, a magneto-optical disk, a ROM, and a flash memory.
For example, the various programs installed in the auxiliary storage device 404 are installed in the manner that a distributed recording medium is inserted into the drive device 408, and various programs recorded in the recording medium are read by the drive device 408.
Referring to
The group management controller 40 includes an acquisition unit 41, a data generation unit 42, a maintenance determination unit 43, a data processing unit 44, a number-of-data determination unit 45, a calculation unit 46, a determination-coefficient determination unit 47, an abnormality determination unit 48, an output unit 49, and a storage unit 50.
The acquisition unit 41 acquires a plurality of sensor values detected by the sensor group 11 while the semiconductor manufacturing apparatus 10 is executing a semiconductor manufacturing process. The plurality of sensor values include sensor values correlated with each other. The sensor values correlated with each other may be, for example, sensor values of two output detecting sensors that detect outputs of two pipe heaters attached to the same pipe to be adjacent to each other. The pipe includes, for example, a supply pipe that supplies a gas into the processing container, and an exhaust pipe that exhausts the inside of the processing container. Further, the sensor values correlated with each other may be, for example, sensor values of two opening degree detecting sensors that detect opening degrees of two pressure control valves provided in two different exhaust pipes, respectively, connected to the inside of the same processing container. Further, the acquisition unit 41 acquires information on time periods corresponding to the sensor values.
Based on at least two sensor values correlated with each other among the plurality of sensor values acquired by the acquisition unit 41, and the information on time periods, the data generation unit 42 generates point data in which the two sensor values and information on the time periods correspond to each other. Further, the data generation unit 42 adds the generated point data to a point data list stored in the storage unit 50.
The maintenance determination unit 43 determines whether the point data list includes point data for a plurality of time periods. For example, when the scatter plot includes the point data of “Time Period 1” and the point data of “Time Period 2” as represented in
When the point data list includes point data for a plurality of time periods, the data processing unit 44 performs a process of deleting point data other than point data that belong to the latest time period, from the point data list (hereinafter, referred to as a “reset of the point data list”). For example, when the scatter plot includes the point data that belong to “Time Period 1” and the point data that belong to “Time Period 2” as represented in
The number-of-data determination unit 45 determines whether the point data list includes a predetermined number of or more point data. The predetermined number is a value determined by a device manager or the like, and may be, for example, any of 5 to 10. For example, when the point data list is the scatter plot represented in
Based on the plurality of point data included in the point data list, the calculation unit 46 calculates the slope of the regression line and the determination coefficient of the regression line.
The determination-coefficient determination unit 47 determines whether the determination coefficient of the regression line calculated by the calculation unit 46 is equal to or more than a control value. The control value is, for example, a value in a range of 0.01 to 0.99, and is designated by a device manager or the like using, for example, the terminal 60.
The abnormality determination unit 48 determines whether the slope of the regression line calculated by the calculation unit 46 falls outside the control value. The abnormality determination unit 48 determines that the semiconductor manufacturing apparatus 10 is abnormal when the slope of the regression line falls outside the control value, and determines that the semiconductor manufacturing apparatus 10 is not abnormal when the slope of the regression line does not fall outside the control value.
The output unit 49 notifies the semiconductor manufacturing apparatus 10 of an alarm. For example, the output unit 49 outputs an alarm signal to the semiconductor manufacturing apparatus 10. When the alarm signal is received, the semiconductor manufacturing apparatus 10 displays the occurrence of the alarm on a display unit (not illustrated) of the semiconductor manufacturing apparatus 10. Further, when the alarm signal is received, the semiconductor manufacturing apparatus 10 stops the semiconductor manufacturing process that is being executed, or completes the semiconductor manufacturing process that is being executed, and then, stops the semiconductor manufacturing process.
The storage unit 50 stores the plurality of sensor values acquired by the acquisition unit 41, the point data list generated by the data generation unit 42, and the slope and the determination coefficient of the regression line that are calculated by the calculation unit 46. Further, the storage unit 50 stores the determination results by the maintenance determination unit 43, the number-of-data determination unit 45, the determination-coefficient determination unit 47, and the abnormality determination unit 48.
[Abnormality Detecting Method]
Referring to
In step S11, the group management controller 40 causes the semiconductor manufacturing apparatus 10 to execute a semiconductor manufacturing process under predetermined process conditions. The predetermined process conditions are predetermined by, for example, a process recipe. At this time, the sensor group 11 detects the state of the semiconductor manufacturing apparatus 10. The sensor values detected by the sensor group 11 include sensor values correlated with each other.
In step S12, the group management controller 40 acquires two sensor values correlated with each other among the plurality of sensor values detected by the sensor group 11 in step S11. Further, the group management controller 40 acquires information on time periods corresponding to the sensor values.
In step S13, the group management controller 40 generates point data in which the two mutually correlated sensor values and the information on time periods that are acquired in step S12. Further, the group management controller 40 adds the generated point data to the point data list stored in the storage unit 50.
In step S14, the group management controller 40 determines whether the point data list to which the point data are added in step S13 includes point data for a plurality of time periods. When it is determined in step S14 that the point data list includes point data for a plurality of time periods, the group management controller 40 causes the process to proceed to step S15. Meanwhile, when it is determined in step S14 that the point data list does not include point data for a plurality of time periods, the group management controller 40 causes the process to proceed to step S16.
In step S15, the group management controller 40 resets the point data list, and then, returns the process to step S11.
In step S16, the group management controller 40 determines whether the point data list includes the predetermined number of or more point data. When it is determined in step S16 that the point data list includes the predetermined number of or more point data, the group management controller 40 causes the process to proceed to step S17. Meanwhile, when it is determined in step S16 that the point data list does not include the predetermined number of or more point data, the group management controller 40 returns the process to step S11. In step S16, it is determined whether the point data list includes the predetermined number of or more point data, so that the accuracy of the determination of an abnormality in the semiconductor manufacturing apparatus 10 may be improved.
In step S17, the group management controller 40 calculates the slope of the regression line and the determination coefficient of the regression line based on the plurality of point data included in the point data list.
In step S18, the group management controller 40 determines whether the determination coefficient of the regression line is equal to or more than the control value. When it is determined in step S18 that the determination coefficient of the regression line is equal to or more than the control value, the group management controller 40 causes the process to proceed to step S19. Meanwhile, when it is determined in step S18 that the determination coefficient of the regression line is less than the control value, the group management controller 40 returns the process to step S19. In step S18, it is determined whether the determination coefficient of the regression line is equal to or more than the control value, so that the accuracy of the determination of an abnormality in the semiconductor manufacturing apparatus 10 may be improved.
In step S19, the group management controller 40 determines whether the slope of the regression line falls outside the control value. When it is determined in step S19 that the slope of the regression line falls outside the control value, the group management controller 40 causes the process to proceed to step S20. Meanwhile, when it is determined in step S19 that the slope of the regression line does not fall outside the control value, the group management controller 40 returns the process to step S11.
In step S20, the group management controller 40 determines that the semiconductor manufacturing apparatus 10 is abnormal, notifies the semiconductor manufacturing apparatus 10 of an alarm, and then, ends the process.
As described above, according to the embodiment, the group management controller 40 generates the point data list based on two sensor values correlated with each other. Then, the group management controller 40 calculates the slope of the regression line based on the generated point data list, and determines an abnormality of the semiconductor manufacturing apparatus 10 based on the slope of the regression line. In this way, by grasping the change in correlation between the sensors, an abnormality sign of the semiconductor manufacturing apparatus 10 may be detected in advance.
Further, according to the embodiment, when the point data list does not include the point data for a plurality of time periods, the group management controller 40 determines whether the semiconductor manufacturing apparatus 10 is abnormal. That is, the group management controller 40 determines an abnormality of the semiconductor manufacturing apparatus 10 within a time period defined by the maintenance. As a result, even when a detection value of a sensor shifts before and after a maintenance, an abnormality of the semiconductor manufacturing apparatus 10 may be accurately detected.
In the embodiment above, descriptions are made on a case where the group management controller 40 determines whether the point data list includes the predetermined number of or more point data, in step S16. However, step S16 may be omitted. In the embodiment above, descriptions are made on a case where the group management controller 40 determines whether the determination coefficient of the regression line is equal to or more than the control value, in step S18. However, step S18 may be omitted. However, from the viewpoint of improving the accuracy of the determination of an abnormality in the semiconductor manufacturing apparatus 10, at least one of steps S16 and S18 may be performed.
In the embodiment above, descriptions are made on a case where the point data list is generated based on two sensor values correlated with each other, the slope of the regression line is calculated based on the point data list, and an abnormality of the semiconductor manufacturing apparatus 10 is determined based on the slope of the regression line. However, the present disclosure is not limited thereto. For example, a plurality of point data lists may be generated based on three or more sensor values correlated with each other, the slope of the regression line may be calculated for each of the plurality of point data lists, and an abnormality of the semiconductor manufacturing apparatus 10 may be determined based on the plurality of slopes of regression lines.
For example, when there are the output of the first pipe heater, the output of the second pipe heater, and an output of a third pipe heater which are positively correlated with each other, the group management controller 40 generates a plurality of scatter plots based on the outputs of the first pipe heater, the second pipe heater, and the third pipe heater.
As illustrated in
As illustrated in
In this way, by determining an abnormality of sensors based on three sensor values correlated with each other, an abnormal sensor may be identified.
In the embodiment above, the apparatus controller 12 is an example of a controller, and the group management controller 40 is an example of an abnormality detecting apparatus. The point data list is an example of correlation data. Further, the first pipe heater and the first pressure control valve are an example of a first monitoring target, the second pipe heater and the second pressure control valve are an example of a second monitoring target, and the third pipe heater is an example of a third monitoring target.
In the embodiment above, the pipe heaters and the pressure control valves are described as an example of monitoring targets. However, the present disclosure is not limited thereto. For example, the monitoring target may be a mass flow controller.
In the embodiment above, descriptions are made on a case where the group management controller 40 executes the abnormality detecting method. However, the present disclosure is not limited thereto. For example, the apparatus controller 12, the terminal 60, and the host computer may execute the abnormality detecting method.
According to the present disclosure, an abnormality sign of a semiconductor manufacturing apparatus may be detected in advance.
From the foregoing, it will be appreciated that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the following claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2020-113510 | Jun 2020 | JP | national |
