Yuki Chiba

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Magnetic field generator for magnetron plasma, and plasma etching a...
- Patent number 7,922,865
- Issue date Apr 12, 2011
- Shin-Etsu Chemical Co., Ltd.
- Koji Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preventing striation at a sidewall of an opening of a re...
- Patent number 7,723,238
- Issue date May 25, 2010
- Tokyo Electron Limited
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCH...
- Publication number 20240162047
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Takahiro YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20080045025
- Publication date Feb 21, 2008
- TOKYO ELECTRON LIMITED
- Ryuichi ASAKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND COMPUTER-READAB...
- Publication number 20070218691
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20050282394
- Publication date Dec 22, 2005
- TOKYO ELECTRON LIMITED
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetic field generator for magnetron plasma, and plasma etching a...
- Publication number 20040094509
- Publication date May 20, 2004
- Koji Miyata
- H01 - BASIC ELECTRIC ELEMENTS