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Yuki KAWADA
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Kurokawa-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Antenna device, radiation method of electromagnetic waves, plasma p...
Patent number
10,896,811
Issue date
Jan 19, 2021
Tokyo Electron Limited
Ayako Ito
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Antenna, plasma processing device and plasma processing method
Patent number
10,832,892
Issue date
Nov 10, 2020
Tokyo Electron Limited
Kazuki Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Antenna and plasma processing apparatus
Patent number
10,825,658
Issue date
Nov 3, 2020
Tokyo Electron Limited
Yuki Kawada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Antenna device and plasma processing apparatus
Patent number
10,553,402
Issue date
Feb 4, 2020
Tokyo Electron Limited
Yuki Kawada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING SYSTEM, AND PLASMA ETCHING METHOD
Publication number
20220270862
Publication date
Aug 25, 2022
TOKYO ELECTRON LIMITED
Naoto HAYASAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTENNA DEVICE, RADIATION METHOD OF ELECTROMAGNETIC WAVES, PLASMA P...
Publication number
20200075292
Publication date
Mar 5, 2020
TOKYO ELECTRON LIMITED
Ayako ITO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ANTENNA, PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20200058468
Publication date
Feb 20, 2020
TOKYO ELECTRON LIMITED
Kazuki TAKAHASHI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20190333736
Publication date
Oct 31, 2019
TOKYO ELECTRON LIMITED
Yuki KAWADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20190279845
Publication date
Sep 12, 2019
TOKYO ELECTRON LIMITED
Naoki MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20190267216
Publication date
Aug 29, 2019
TOKYO ELECTRON LIMITED
Kazushi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20190244789
Publication date
Aug 8, 2019
TOKYO ELECTRON LIMITED
Kazushi KANEKO
G01 - MEASURING TESTING
Information
Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
Publication number
20180374678
Publication date
Dec 27, 2018
TOKYO ELECTRON LIMITED
Yuki KAWADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...