Yukinobu Nishibe

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Organic film forming apparatus
- Patent number 11,906,246
- Issue date Feb 20, 2024
- Shibaura Mechatronics Corporation
- Yukinobu Nishibe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and method
- Patent number 8,517,035
- Issue date Aug 27, 2013
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Grant
Apparatus and method for photoresist removal processing
- Patent number 8,141,567
- Issue date Mar 27, 2012
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Grant
Apparatus for processing substrate using process solutions having d...
- Patent number 6,363,950
- Issue date Apr 2, 2002
- Shibaura Mechatronics Corporation
- Yukinobu Nishibe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for processing substrate
- Patent number 6,299,697
- Issue date Oct 9, 2001
- Shibaura Mechatronics Corporation
- Yukinobu Nishibe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20240347364
- Publication date Oct 17, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Rie ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRYING APPARATUS, DRY CONDITION CONFIRMATION METHOD, AND WAFER STOR...
- Publication number 20240328713
- Publication date Oct 3, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu NISHIBE
- F26 - DRYING
Information Patent Application
WAFER STORAGE CONTAINER DRYING APPARATUS AND CLEANING SYSTEM
- Publication number 20240302099
- Publication date Sep 12, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20240091828
- Publication date Mar 21, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
ORGANIC FILM FORMING APPARATUS
- Publication number 20200310183
- Publication date Oct 1, 2020
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu Nishibe
- F26 - DRYING
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20140251386
- Publication date Sep 11, 2014
- KABUSHIKI KAISHA TOSHIBA
- Shinichi Sasaki
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING
- Publication number 20070277853
- Publication date Dec 6, 2007
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING
- Publication number 20070246085
- Publication date Oct 25, 2007
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Application
PROCESSING APPARATUS AND METHOD
- Publication number 20070246097
- Publication date Oct 25, 2007
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Application
Apparatus for processing substrate using process solutions having d...
- Publication number 20010052354
- Publication date Dec 20, 2001
- Shibaura Mechatronics Corporation
- Yukinobu Nishibe
- H01 - BASIC ELECTRIC ELEMENTS

Yukinobu Nishibe

Person

Patents Grantslast 30 patents

Organic film forming apparatus

Processing apparatus and method

Apparatus and method for photoresist removal processing

Apparatus for processing substrate using process solutions having d...

Method and apparatus for processing substrate

Patents Applicationslast 30 patents

SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD

DRYING APPARATUS, DRY CONDITION CONFIRMATION METHOD, AND WAFER STOR...

WAFER STORAGE CONTAINER DRYING APPARATUS AND CLEANING SYSTEM

CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

ORGANIC FILM FORMING APPARATUS

PROCESSING APPARATUS AND PROCESSING METHOD

APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING

APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING

PROCESSING APPARATUS AND METHOD

Apparatus for processing substrate using process solutions having d...