Yukinobu Shibata

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Ibaraki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure method and pattern data preparation system therefor, patte...
- Patent number 5,757,409
- Issue date May 26, 1998
- Hitachi, Ltd.
- Yoshihiko Okamoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure method and pattern data preparation system therefor, patte...
- Patent number 5,557,314
- Issue date Sep 17, 1996
- Hitachi, Ltd.
- Yoshihiko Okamoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 5,424,550
- Issue date Jun 13, 1995
- Hitachi, Ltd.
- Masamichi Kawano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithography method and apparatus separating repetitiv...
- Patent number 5,371,373
- Issue date Dec 6, 1994
- Hitachi, Ltd.
- Yukinobu Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 5,281,827
- Issue date Jan 25, 1994
- Hitachi, Ltd.
- Masamichi Kawano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithography using an aperture having an array of repe...
- Patent number 5,250,812
- Issue date Oct 5, 1993
- Hitachi, Ltd.
- Fumio Murai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithographic method
- Patent number 5,206,517
- Issue date Apr 27, 1993
- Hitachi, Ltd.
- Yukinobu Shibata
- B82 - NANO-TECHNOLOGY