Yukio Kakizaki

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Movable body apparatus, exposure apparatus and optical system unit,...
- Patent number 8,749,753
- Issue date Jun 10, 2014
- Nikon Corporation
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus including non-containing gas bearings and microlith...
- Patent number 6,583,597
- Issue date Jun 24, 2003
- Nikon Corporation
- Keiichi Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Projection exposure apparatus
- Patent number 6,570,641
- Issue date May 27, 2003
- Nikon Corporation
- Tomohide Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 6,317,196
- Issue date Nov 13, 2001
- Nikon Corporation
- Tomohide Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical apparatus
- Patent number RE37352
- Issue date Sep 4, 2001
- Nikon Corporation
- Kazuaki Suzuki
- 353 - Optics: image projectors
Information Patent Grant
Exposure apparatus
- Patent number 6,049,372
- Issue date Apr 11, 2000
- Nikon Corporation
- Kinya Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask substrate, projection exposure apparatus equipped with the mas...
- Patent number 6,040,096
- Issue date Mar 21, 2000
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for simultaneously transferring a mask pattern...
- Patent number 5,929,973
- Issue date Jul 27, 1999
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask substrate, projection exposure apparatus equipped with the mas...
- Patent number 5,894,056
- Issue date Apr 13, 1999
- Nikon Corporation
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,617,211
- Issue date Apr 1, 1997
- Nikon Corporation
- Kei Nara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical apparatus
- Patent number 5,337,097
- Issue date Aug 9, 1994
- Nippon Kogaku K.K.
- Kazuaki Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Conveyor arm apparatus with gap detection
- Patent number 4,803,373
- Issue date Feb 7, 1989
- Nikon Corporation
- Kazunori Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foreign substance inspecting system including a calibration standard
- Patent number 4,776,693
- Issue date Oct 11, 1988
- Nippon Kogaku K.K.
- Kazunori Imamura
- G01 - MEASURING TESTING
Information Patent Grant
Stage device with levelling mechanism
- Patent number 4,770,531
- Issue date Sep 13, 1988
- Nippon Kogaku K.K.
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical path length compensating optical system in an alignment app...
- Patent number 4,723,846
- Issue date Feb 9, 1988
- Nippon Kogaku K.K.
- Makoto Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for conveying and inspecting a substrate
- Patent number 4,716,299
- Issue date Dec 29, 1987
- Nippon Kogaku K.K.
- Hiroshi Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate positioning apparatus
- Patent number 4,655,584
- Issue date Apr 7, 1987
- Nippon Kogaku K.K.
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for the attitude control of plate-form body
- Patent number 4,537,501
- Issue date Aug 27, 1985
- Nippon Kogaku K.K.
- Yukio Kakizaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Container for holding substrate
- Patent number 4,422,547
- Issue date Dec 27, 1983
- Nippon Kogaku K.K.
- Nobutoshi Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cross-movable carriage
- Patent number 4,113,223
- Issue date Sep 12, 1978
- Nippon Kogaku K.K.
- Yukio Kakizaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND OPTICAL SYSTEM UNIT,...
- Publication number 20090059190
- Publication date Mar 5, 2009
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus including non-containing gas bearings and microlith...
- Publication number 20020070699
- Publication date Jun 13, 2002
- NIKON CORPORATION
- Keiichi Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Projection exposure apparatus
- Publication number 20020021431
- Publication date Feb 21, 2002
- NIKON CORPORATION
- Tomohide Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yukio Kakizaki

Person

Patents Grantslast 30 patents

Movable body apparatus, exposure apparatus and optical system unit,...

Stage apparatus including non-containing gas bearings and microlith...

Projection exposure apparatus

Projection exposure apparatus

Projection optical apparatus

Exposure apparatus

Mask substrate, projection exposure apparatus equipped with the mas...

Apparatus and method for simultaneously transferring a mask pattern...

Mask substrate, projection exposure apparatus equipped with the mas...

Exposure apparatus

Projection optical apparatus

Conveyor arm apparatus with gap detection

Foreign substance inspecting system including a calibration standard

Stage device with levelling mechanism

Optical path length compensating optical system in an alignment app...

Apparatus for conveying and inspecting a substrate

Substrate positioning apparatus

Apparatus for the attitude control of plate-form body

Container for holding substrate

Cross-movable carriage

Patents Applicationslast 30 patents

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND OPTICAL SYSTEM UNIT,...

Stage apparatus including non-containing gas bearings and microlith...

Projection exposure apparatus