Number | Date | Country | Kind |
---|---|---|---|
59-94061 | May 1984 | JPX | |
59-224953 | Oct 1984 | JPX | |
59-230634 | Nov 1984 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3722996 | Fox | Mar 1973 | |
3930684 | Lasch et al. | Jan 1976 | |
4345836 | Phillips | Aug 1982 | |
4385083 | Shelley | May 1983 | |
4407627 | Sato et al. | Oct 1983 | |
4483434 | Miwa et al. | Nov 1984 | |
4556362 | Bahnck et al. | Dec 1985 |
Entry |
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IBM Technical Disclosure Bulletin, vol. 14, No. Sep. 1972, "Wafer Centering Fixture". |