Yukio Kenbo

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method
- Patent number 7,604,925
- Issue date Oct 20, 2009
- Renesas Technology Corporation
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method
- Patent number 7,598,020
- Issue date Oct 6, 2009
- Renesas Technology Corporation
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method
- Patent number 7,277,155
- Issue date Oct 2, 2007
- Renesas Technology Corp.
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method
- Patent number 7,012,671
- Issue date Mar 14, 2006
- Renesas Technology Corp.
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Thin film thickness measuring method and apparatus, and method and...
- Patent number 6,806,970
- Issue date Oct 19, 2004
- Hitachi, Ltd.
- Takenori Hirose
- G01 - MEASURING TESTING
Information Patent Grant
Thin film thickness measuring method and apparatus, and method and...
- Patent number 6,753,972
- Issue date Jun 22, 2004
- Hitachi, Ltd.
- Takenori Hirose
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method
- Patent number 6,485,891
- Issue date Nov 26, 2002
- Hitachi, Ltd.
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor integrated circuit device manufacturing method includ...
- Patent number 6,468,817
- Issue date Oct 22, 2002
- Hitachi, Ltd.
- Shinichi Nakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and method
- Patent number 6,335,146
- Issue date Jan 1, 2002
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,016,187
- Issue date Jan 18, 2000
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 5,767,949
- Issue date Jun 16, 1998
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 5,526,094
- Issue date Jun 11, 1996
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 5,329,333
- Issue date Jul 12, 1994
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer transforming device
- Patent number 4,504,045
- Issue date Mar 12, 1985
- Hitachi, Ltd.
- Yukio Kenbo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and method
- Publication number 20050196713
- Publication date Sep 8, 2005
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050196705
- Publication date Sep 8, 2005
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050191583
- Publication date Sep 1, 2005
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thin film thickness measuring method and apparatus, and mehtod and...
- Publication number 20040070773
- Publication date Apr 15, 2004
- Takenori Hirose
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and method
- Publication number 20030073045
- Publication date Apr 17, 2003
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing semiconductor integrated circuit device
- Publication number 20020042154
- Publication date Apr 11, 2002
- Shinichi Nakabayashi
- H01 - BASIC ELECTRIC ELEMENTS

Yukio Kenbo

Person

Patents Grantslast 30 patents

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Thin film thickness measuring method and apparatus, and method and...

Thin film thickness measuring method and apparatus, and method and...

Exposure apparatus and method

Semiconductor integrated circuit device manufacturing method includ...

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Wafer transforming device

Patents Applicationslast 30 patents

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Thin film thickness measuring method and apparatus, and mehtod and...

Exposure apparatus and method

Method of manufacturing semiconductor integrated circuit device