Yukio Matsuyama

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
- Patent number 7,122,796
- Issue date Oct 17, 2006
- Hitachi Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
- Patent number 6,828,554
- Issue date Dec 7, 2004
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
- Patent number 6,717,142
- Issue date Apr 6, 2004
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Visual inspection method and apparatus therefor
- Patent number 6,587,581
- Issue date Jul 1, 2003
- Hitachi, Ltd.
- Yukio Matsuyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
- Patent number 6,373,054
- Issue date Apr 16, 2002
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect judgement processing method and apparatus
- Patent number 6,333,992
- Issue date Dec 25, 2001
- Hitachi, Ltd.
- Hisae Yamamura
- G01 - MEASURING TESTING
Information Patent Grant
Solder testing apparatus
- Patent number 6,249,598
- Issue date Jun 19, 2001
- Hitachi, Ltd.
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
- Patent number 6,172,365
- Issue date Jan 9, 2001
- Hitachi Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection method and apparatus and semiconductor man...
- Patent number 5,986,263
- Issue date Nov 16, 1999
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for automatic focusing and a method and appara...
- Patent number 5,780,866
- Issue date Jul 14, 1998
- Hitachi, Ltd.
- Hisae Yamamura
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing thin-film substrate
- Patent number 5,763,123
- Issue date Jun 9, 1998
- Hitachi, Ltd.
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the inspection of defects
- Patent number 5,293,538
- Issue date Mar 8, 1994
- Hitachi, Ltd.
- Hisafumi Iwata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting pattern defects
- Patent number 4,860,371
- Issue date Aug 22, 1989
- Hitachi, Ltd.
- Yukio Matsuyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern checking apparatus
- Patent number 4,628,531
- Issue date Dec 9, 1986
- Hitachi, Ltd.
- Keiichi Okamoto
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Electron beam inspection method and apparatus and semiconductor man...
- Publication number 20050082476
- Publication date Apr 21, 2005
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam inspection method and apparatus and semiconductor man...
- Publication number 20040164244
- Publication date Aug 26, 2004
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam inspection method and apparatus and semiconductor man...
- Publication number 20020100872
- Publication date Aug 1, 2002
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam inspection method and apparatus and semiconductor man...
- Publication number 20010002697
- Publication date Jun 7, 2001
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS

Yukio Matsuyama

Person

Patents Grantslast 30 patents

Electron beam inspection method and apparatus and semiconductor man...

Electron beam inspection method and apparatus and semiconductor man...

Electron beam inspection method and apparatus and semiconductor man...

Visual inspection method and apparatus therefor

Electron beam inspection method and apparatus and semiconductor man...

Defect judgement processing method and apparatus

Solder testing apparatus

Electron beam inspection method and apparatus and semiconductor man...

Electron beam inspection method and apparatus and semiconductor man...

Method and apparatus for automatic focusing and a method and appara...

Method for producing thin-film substrate

Method and apparatus for the inspection of defects

Method and apparatus for detecting pattern defects

Pattern checking apparatus

Patents Applicationslast 30 patents

Electron beam inspection method and apparatus and semiconductor man...

Electron beam inspection method and apparatus and semiconductor man...

Electron beam inspection method and apparatus and semiconductor man...

Electron beam inspection method and apparatus and semiconductor man...