Yukio Sano

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,065,732
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masayuki Harashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device and method for cleaning same
- Patent number 11,390,944
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Masayuki Harashima
- B08 - CLEANING
Information Patent Grant
Wafer holder for manufacturing semiconductor
- Patent number D766850
- Issue date Sep 20, 2016
- TOKYO ELECTRON LIMITED
- Eisuke Morisaki
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20220098726
- Publication date Mar 31, 2022
- Tokyo Electron Limited
- Masayuki HARASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210108331
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Masayuki HARASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING DEVICE AND METHOD FOR CLEANING SAME
- Publication number 20200157677
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Masayuki HARASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...