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Patents Grants
last 30 patents
Information
Patent Grant
Polishing pad, semiconductor fabricating device and fabricating met...
Patent number
11,883,926
Issue date
Jan 30, 2024
Kioxia Corporation
Takahiko Kawasaki
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing device, polishing head, polishing method, and method of m...
Patent number
11,534,886
Issue date
Dec 27, 2022
Kioxia Corporation
Mikiya Sakashita
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor device production method
Patent number
10,998,283
Issue date
May 4, 2021
TOSHIBA MEMORY CORPORATION
Takahiko Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device and semiconductor devi...
Patent number
10,991,588
Issue date
Apr 27, 2021
TOSHIBA MEMORY CORPORATION
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
10,985,027
Issue date
Apr 20, 2021
Kioxia Corporation
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
Patent number
10,850,363
Issue date
Dec 1, 2020
TOSHIBA MEMORY CORPORATION
Yukiteru Matsui
G01 - MEASURING TESTING
Information
Patent Grant
Planarization method and planarization apparatus
Patent number
10,283,383
Issue date
May 7, 2019
TOSHIBA MEMORY CORPORATION
Akifumi Gawase
B24 - GRINDING POLISHING
Information
Patent Grant
Dresser, method of manufacturing dresser, and method of manufacturi...
Patent number
10,195,716
Issue date
Feb 5, 2019
TOSHIBA MEMORY CORPORATION
Takahiko Kawasaki
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
10,121,677
Issue date
Nov 6, 2018
TOSHIBA MEMORY CORPORATION
Yukiteru Matsui
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor storage device
Patent number
10,079,153
Issue date
Sep 18, 2018
TOSHIBA MEMORY CORPORATION
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Abrasive cloth and polishing method
Patent number
10,010,997
Issue date
Jul 3, 2018
TOSHIBA MEMORY CORPORATION
Akifumi Gawase
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
Patent number
10,008,390
Issue date
Jun 26, 2018
TOSHIBA MEMORY CORPORATION
Yukiteru Matsui
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate processing method
Patent number
9,937,602
Issue date
Apr 10, 2018
TOSHIBA MEMORY CORPORATION
Yosuke Otsuka
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing method of semiconductor device and semiconductor devi...
Patent number
9,837,279
Issue date
Dec 5, 2017
TOSHIBA MEMORY CORPORATION
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
9,558,961
Issue date
Jan 31, 2017
Kabushiki Kaisha Toshiba
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for chemical planarization and chemical planarization apparatus
Patent number
9,196,501
Issue date
Nov 24, 2015
Kabushiki Kaisha Toshiba
Masako Kodera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
9,174,322
Issue date
Nov 3, 2015
Kabushiki Kaisha Toshiba
Yukiteru Matsui
B24 - GRINDING POLISHING
Information
Patent Grant
Planarization method and planarization apparatus
Patent number
9,144,879
Issue date
Sep 29, 2015
Kabushiki Kaisha Toshiba
Akifumi Gawase
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing method of semiconductor device and polishing apparatus
Patent number
9,012,246
Issue date
Apr 21, 2015
Kabushiki Kaisha Toshiba
Hajime Eda
B24 - GRINDING POLISHING
Information
Patent Grant
Planarizing method
Patent number
8,936,729
Issue date
Jan 20, 2015
Kabushiki Kaisha Toshiba
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
8,871,644
Issue date
Oct 28, 2014
Kabushiki Kaisha Toshiba
Yukiteru Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
8,754,433
Issue date
Jun 17, 2014
Kabushiki Kaisha Toshiba
Yukiteru Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
8,740,667
Issue date
Jun 3, 2014
Kabushiki Kaisha Toshiba
Masako Kodera
B24 - GRINDING POLISHING
Information
Patent Grant
Method for chemical planarization and chemical planarization apparatus
Patent number
8,703,004
Issue date
Apr 22, 2014
Kabushiki Kaisha Toshiba
Yukiteru Matsui
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing method of organic film and method of...
Patent number
8,685,857
Issue date
Apr 1, 2014
Kabushiki Kaisha Toshiba
Yukiteru Matsui
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
8,575,030
Issue date
Nov 5, 2013
Kabushiki Kaisha Toshiba
Gaku Minamihaba
B24 - GRINDING POLISHING
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
8,480,915
Issue date
Jul 9, 2013
Kabushiki Kaisha Toshiba
Gaku Minamihaba
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing method and method of manufacturing se...
Patent number
8,119,517
Issue date
Feb 21, 2012
JSR Corporation
Hirotaka Shida
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
8,114,776
Issue date
Feb 14, 2012
Kabushiki Kaisha Toshiba
Hajime Eda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
7,985,685
Issue date
Jul 26, 2011
Kabushiki Kaisha Toshiba
Yukiteru Matsui
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Patents Applications
last 30 patents
Information
Patent Application
POLISHING SOLUTION, POLISHING APPARATUS, AND POLISHING METHOD
Publication number
20220290009
Publication date
Sep 15, 2022
KIOXIA Corporation
Mikiya SAKASHITA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20220048155
Publication date
Feb 17, 2022
KIOXIA Corporation
Mikiya SAKASHITA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD, POLISHING AGENT AND CLEANING AGENT FOR POLISHING
Publication number
20210299814
Publication date
Sep 30, 2021
Mikiya SAKASHITA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING MET...
Publication number
20210260719
Publication date
Aug 26, 2021
Toshiba Memory Corporation
Takahiko KAWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING DEVICE, POLISHING HEAD, POLISHING METHOD, AND METHOD OF M...
Publication number
20210170542
Publication date
Jun 10, 2021
KIOXIA Corporation
Mikiya SAKASHITA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20210082711
Publication date
Mar 18, 2021
Kioxia Corporation
Akifumi GAWASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD
Publication number
20200035636
Publication date
Jan 30, 2020
Toshiba Memory Corporation
Takahiro KAWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING MET...
Publication number
20190283206
Publication date
Sep 19, 2019
Toshiba Memory Corporation
Takahiko KAWASAKI
B24 - GRINDING POLISHING
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
Publication number
20180277388
Publication date
Sep 27, 2018
Toshiba Memory Corporation
Yukiteru MATSUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DRESSER, METHOD OF MANUFACTURING DRESSER, AND METHOD OF MANUFACTURI...
Publication number
20180056482
Publication date
Mar 1, 2018
Toshiba Memory Corporation
Takahiko KAWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVI...
Publication number
20180061654
Publication date
Mar 1, 2018
Toshiba Memory Corporation
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STORAGE DEVICE
Publication number
20170250081
Publication date
Aug 31, 2017
Kabushiki Kaisha Toshiba
Akifumi GAWASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SLURRY FOR CHEMICA...
Publication number
20170133238
Publication date
May 11, 2017
Kabushiki Kaisha Toshiba
Takahiko KAWASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Manufacturing Method of Semiconductor Device and Semiconductor Devi...
Publication number
20170076953
Publication date
Mar 16, 2017
Kabushiki Kaisha Toshiba
Akifumi GAWASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20160375547
Publication date
Dec 29, 2016
Kabushiki Kaisha Toshiba
Yosuke OTSUKA
B24 - GRINDING POLISHING
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20160358787
Publication date
Dec 8, 2016
Kabushiki Kaisha Toshiba
Akifumi Gawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20160322231
Publication date
Nov 3, 2016
Kabushiki Kaisha Toshiba
Yukiteru Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETAINER RING, POLISHING APPARATUS, AND MANUFACTURING METHOD OF SEM...
Publication number
20160229026
Publication date
Aug 11, 2016
Kabushiki Kaisha Toshiba
Takahiko KAWASAKI
B24 - GRINDING POLISHING
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
Publication number
20160207163
Publication date
Jul 21, 2016
Kabushiki Kaisha Toshiba
Yukiteru MATSUI
G01 - MEASURING TESTING
Information
Patent Application
Abrasive cloth and polishing method
Publication number
20160129548
Publication date
May 12, 2016
Kabushiki Kaisha Toshiba
Akifumi GAWASE
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL PLANARIZATION METHOD AND APPARATUS
Publication number
20160064243
Publication date
Mar 3, 2016
Kabushiki Kaisha Toshiba
Akifumi GAWASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CHEMICAL PLANARIZATION AND CHEMICAL PLANARIZATION APPARATUS
Publication number
20160035598
Publication date
Feb 4, 2016
Kabushiki Kaisha Toshiba
Masako Kodera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
Publication number
20160027660
Publication date
Jan 28, 2016
Kabushiki Kaisha Toshiba
YUKITERU MATSUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION METHOD AND PLANARIZATION APPARATUS
Publication number
20150357212
Publication date
Dec 10, 2015
KABUSHIKI KAISHA TOSHIBA
Akifumi GAWASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20150290765
Publication date
Oct 15, 2015
Kabushiki Kaisha Toshiba
Yosuke OTSUKA
B24 - GRINDING POLISHING
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20150004878
Publication date
Jan 1, 2015
Kabushiki Kaisha Toshiba
Yukiteru Matsui
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20140287586
Publication date
Sep 25, 2014
Kabushiki Kaisha Toshiba
Yukiteru MATSUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION METHOD AND PLANARIZATION APPARATUS
Publication number
20140220778
Publication date
Aug 7, 2014
KABUSHIKI KAISHA TOSHIBA
Akifumi GAWASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CHEMICAL PLANARIZATION AND CHEMICAL PLANARIZATION APPARATUS
Publication number
20140187042
Publication date
Jul 3, 2014
Kabushiki Kaisha Toshiba
Yukiteru Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20140073136
Publication date
Mar 13, 2014
Gaku MINAMIHABA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...