Yukitomo HIROCHI

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,967,490
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,749,510
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,553,565
- Issue date Jan 10, 2023
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,551,914
- Issue date Jan 10, 2023
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,469,083
- Issue date Oct 11, 2022
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,469,081
- Issue date Oct 11, 2022
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating element, substrate processing apparatus and method of manuf...
- Patent number 11,309,195
- Issue date Apr 19, 2022
- Kokusai Electric Corporation
- Yoshihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,265,977
- Issue date Mar 1, 2022
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,264,253
- Issue date Mar 1, 2022
- Kokusai Electric Corporation
- Shinya Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,239,098
- Issue date Feb 1, 2022
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,177,143
- Issue date Nov 16, 2021
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,018,033
- Issue date May 25, 2021
- Kokusai Electric Corporation
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,633,739
- Issue date Apr 28, 2020
- Kokusai Electric Corporation
- Yukitomo Hirochi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,475,652
- Issue date Nov 12, 2019
- Kokusai Electric Corporation
- Hideto Yamaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,131,990
- Issue date Nov 20, 2018
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,587,314
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Taketoshi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
- Patent number 9,502,236
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including shielding unit for suppres...
- Patent number 9,084,298
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,070,554
- Issue date Jun 30, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
- Patent number 9,064,695
- Issue date Jun 23, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,028,191
- Issue date May 12, 2015
- Hitachi Kokusai Electric Inc.
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,018,689
- Issue date Apr 28, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20240249923
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20230238222
- Publication date Jul 27, 2023
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20230020318
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20210202215
- Publication date Jul 1, 2021
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20210202216
- Publication date Jul 1, 2021
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210166945
- Publication date Jun 3, 2021
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200388515
- Publication date Dec 10, 2020
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200194287
- Publication date Jun 18, 2020
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200087785
- Publication date Mar 19, 2020
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200013646
- Publication date Jan 9, 2020
- Kokusai Electric Corporation
- Shinya SASAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200008275
- Publication date Jan 2, 2020
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190393056
- Publication date Dec 26, 2019
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING ELEMENT, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUF...
- Publication number 20190378731
- Publication date Dec 12, 2019
- Kokusai Electric Corporation
- Yoshihiko YANAGISAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190295873
- Publication date Sep 26, 2019
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190182915
- Publication date Jun 13, 2019
- Kokusai Electric Corporation
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20190157049
- Publication date May 23, 2019
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180211840
- Publication date Jul 26, 2018
- Hitachi Kokusai Electric Inc.
- Hideto YAMAGUCHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20170114457
- Publication date Apr 27, 2017
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20170062254
- Publication date Mar 2, 2017
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROGRAM AND METHOD OF MANUFACTURING...
- Publication number 20160284543
- Publication date Sep 29, 2016
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RE...
- Publication number 20150194304
- Publication date Jul 9, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Non-Transitory Computer-Readable Re...
- Publication number 20150194306
- Publication date Jul 9, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150155201
- Publication date Jun 4, 2015
- Hitachi Kokusai Electric Inc.
- Taketoshi SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150093913
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, WAFER HOLDER, AND FILM FORMING METHOD
- Publication number 20120067274
- Publication date Mar 22, 2012
- Hitachi Kokusai Electric Inc.
- Daisuke HARA
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110311339
- Publication date Dec 22, 2011
- Hitachi Kokusai Electric Inc.
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110210118
- Publication date Sep 1, 2011
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20090176381
- Publication date Jul 9, 2009
- Hitachi Kokusai Electric Inc.
- Shin HIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yukitomo HIROCHI

Person

Patents Grantslast 30 patents

Plasma generating device, substrate processing apparatus, and metho...

Plasma generating device, substrate processing apparatus, and metho...

Method of manufacturing semiconductor device, substrate processing...

Plasma generating device, substrate processing apparatus, and metho...

Plasma generating device, substrate processing apparatus, and metho...

Plasma generating device, substrate processing apparatus, and metho...

Heating element, substrate processing apparatus and method of manuf...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, non-transitory computer-readable re...

Substrate processing apparatus including shielding unit for suppres...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, non-transitory computer-readable re...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

Method of Manufacturing Semiconductor Device, Substrate Processing...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

HEATING ELEMENT, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUF...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, PROGRAM AND METHOD OF MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RE...

Substrate Processing Apparatus, Non-Transitory Computer-Readable Re...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

FILM FORMING APPARATUS, WAFER HOLDER, AND FILM FORMING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...