Yulin PENG

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck mechanism and semiconductor processing device h...
- Patent number 10,985,045
- Issue date Apr 20, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yulin Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating semiconductor manufacturing apparatus and semic...
- Patent number 10,170,285
- Issue date Jan 1, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jinrong Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for plasma treatment and method of operating the apparatus
- Patent number 9,899,194
- Issue date Feb 20, 2018
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jinrong Zhao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES
- Publication number 20240321560
- Publication date Sep 26, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yulin PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER
- Publication number 20240271310
- Publication date Aug 15, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yicheng LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER
- Publication number 20200406222
- Publication date Dec 31, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yicheng LI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ELECTROSTATIC CHUCK MECHANISM AND SEMICONDUCTOR PROCESSING DEVICE H...
- Publication number 20180294177
- Publication date Oct 11, 2018
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yulin PENG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD OF OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMIC...
- Publication number 20180158656
- Publication date Jun 7, 2018
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinrong ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PLASMA TREATMENT AND METHOD OF OPERATING THE APPARATUS
- Publication number 20170301523
- Publication date Oct 19, 2017
- BEIJING NMC CO., LTD
- Jinrong ZHAO
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Electrostatic chuck mechanism and semiconductor processing device h...

Method of operating semiconductor manufacturing apparatus and semic...

Apparatus for plasma treatment and method of operating the apparatus

Patents Applicationslast 30 patents

SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES

REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER

REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER

ELECTROSTATIC CHUCK MECHANISM AND SEMICONDUCTOR PROCESSING DEVICE H...

METHOD OF OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMIC...

APPARATUS FOR PLASMA TREATMENT AND METHOD OF OPERATING THE APPARATUS