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Yumiko Kawano

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING DEVICE
    • Publication number 20240263306
    • Publication date Aug 8, 2024
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD
    • Publication number 20240030025
    • Publication date Jan 25, 2024
    • Tokyo Electron Limited
    • Shinichi IKE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION DEVICE
    • Publication number 20230369041
    • Publication date Nov 16, 2023
    • Tokyo Electron Limited
    • Zeyuan NI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION METHOD
    • Publication number 20230361163
    • Publication date Nov 9, 2023
    • Tokyo Electron Limited
    • Koji AKIYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD
    • Publication number 20230148162
    • Publication date May 11, 2023
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20230037372
    • Publication date Feb 9, 2023
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20230009551
    • Publication date Jan 12, 2023
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD
    • Publication number 20220341033
    • Publication date Oct 27, 2022
    • TOKYO ELECTRON LIMITED
    • Shinichi IKE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD
    • Publication number 20220336205
    • Publication date Oct 20, 2022
    • Tokyo Electron Limited
    • Kenji OUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING FILM
    • Publication number 20220189778
    • Publication date Jun 16, 2022
    • Tokyo Electron Limited
    • Shinichi IKE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION DEVICE
    • Publication number 20220186362
    • Publication date Jun 16, 2022
    • Tokyo Electron Limited
    • Shuji AZUMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    • Publication number 20220189777
    • Publication date Jun 16, 2022
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION DEVICE
    • Publication number 20220181144
    • Publication date Jun 9, 2022
    • TOKYO ELECTRON LIMITED
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20210399085
    • Publication date Dec 23, 2021
    • Tokyo Electron Limited
    • Yumiko KAWANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR AREA SELECTIVE DEPOSITION USING A SURFACE CLEANING PROCESS
    • Publication number 20210398846
    • Publication date Dec 23, 2021
    • TOKYO ELECTRON LIMITED
    • Kandabara N. Tapily
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20210246547
    • Publication date Aug 12, 2021
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20210087691
    • Publication date Mar 25, 2021
    • TOKYO ELECTRON LIMITED
    • Shuji AZUMO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR FORMING TUNGSTEN FILM
    • Publication number 20190161853
    • Publication date May 30, 2019
    • TOKYO ELECTRON LIMITED
    • Shintaro Aoyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Selective Film Forming Method and Method of Manufacturing Semicondu...
    • Publication number 20190096750
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Yumiko KAWANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heat Treatment Apparatus
    • Publication number 20150201468
    • Publication date Jul 16, 2015
    • TOKYO ELECTRON LIMITED
    • Tomihiro YONENAGA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
    • Publication number 20150093518
    • Publication date Apr 2, 2015
    • TOKYO ELECTRON LIMITED
    • Tomihiro YONENAGA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COBALT BASE FILM-FORMING METHOD, COBALT BASE FILM-FORMING MATERIAL,...
    • Publication number 20140248427
    • Publication date Sep 4, 2014
    • TOKYO ELECTRON LIMITED
    • Hideaki Machida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Ge-Sb-Te FILM FORMING METHOD, Ge-Te FILM FORMING METHOD, AND Sb-Te...
    • Publication number 20140162401
    • Publication date Jun 12, 2014
    • TOKYO ELECTRON LIMITED
    • Yumiko Kawano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RUTHENIUM FILM FORMATION METHOD AND COMPUTER READABLE STORAGE MEDIUM
    • Publication number 20130230652
    • Publication date Sep 5, 2013
    • TOKYO ELECTRON LIMITED
    • Yumiko KAWANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM
    • Publication number 20130183446
    • Publication date Jul 18, 2013
    • TOKYO ELECTRON LIMITED
    • Yumiko Kawano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM
    • Publication number 20120107505
    • Publication date May 3, 2012
    • TOKYO ELECTRON LIMITED
    • Yumiko Kawano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM
    • Publication number 20120108005
    • Publication date May 3, 2012
    • TOKYO ELECTRON LIMITED
    • Yumiko Kawano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEAT TREATMENT APPARATUS
    • Publication number 20110248024
    • Publication date Oct 13, 2011
    • TOKYO ELECTRON LIMITED
    • Tomihiro YONENAGA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT APPARATUS
    • Publication number 20110210117
    • Publication date Sep 1, 2011
    • TOKYO ELECTRON LIMITED
    • Tomihiro Yonenaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    POLYMERIZED FILM FORMING METHOD AND POLYMERIZED FILM FORMING APPARATUS
    • Publication number 20110171384
    • Publication date Jul 14, 2011
    • TOKYO ELECTRON LIMITED
    • Yumiko Kawano
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...