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Yuta Sorita

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Patents Applicationslast 30 patents

  • Information Patent Application

    SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS
    • Publication number 20240191357
    • Publication date Jun 13, 2024
    • TOKYO ELECTRON LIMITED
    • Yuta SORITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20210388493
    • Publication date Dec 16, 2021
    • TOKYO ELECTRON LIMITED
    • Yuta SORITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor Process Chamber
    • Publication number 20190177845
    • Publication date Jun 13, 2019
    • Samsung Electronics Co., Ltd.
    • Seung Jae Baek
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20160138162
    • Publication date May 19, 2016
    • TOKYO ELECTRON LIMITED
    • Masahide Iwasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...