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Yutaka Ichiki
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Miyazaki, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of manufacturing low dielectric film by a vacuum ultraviolet...
Patent number
7,026,257
Issue date
Apr 11, 2006
Oki Electric Industry Co., Ltd.
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing an interlayer dielectric film using vacuum...
Patent number
6,624,094
Issue date
Sep 23, 2003
Oki Electric Industry, Co., Ltd.
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Method of manufacturing interlayer dielectric film using vacuum ult...
Publication number
20020028587
Publication date
Mar 7, 2002
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing low dielectric film by a vacuum ultraviolet...
Publication number
20020025693
Publication date
Feb 28, 2002
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...