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Cleaning method and film forming method
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Patent number 10,676,820
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Issue date Jun 9, 2020
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Tokyo Electron Limited
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Mitsuhiro Okada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dummy wafer
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Patent number D786810
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Issue date May 16, 2017
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Tokyo Electron Limited
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Yutaka Motoyama
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D13 - Equipment for production, distribution, or transformation of energy
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Dummy wafer
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Patent number D785576
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Issue date May 2, 2017
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Tokyo Electron Limited
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Yutaka Motoyama
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D13 - Equipment for production, distribution, or transformation of energy
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Dummy wafer
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Patent number D784937
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Issue date Apr 25, 2017
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Tokyo Electron Limited
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Yutaka Motoyama
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D13 - Equipment for production, distribution, or transformation of energy
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Plasma processing apparatus
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Patent number 8,608,902
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Issue date Dec 17, 2013
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Tokyo Electron Limited
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Kohei Fukushima
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...