Zhe Gui

Person

Tigard, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated showerhead with improved hole pattern for delivering rad...
- Patent number 12,116,669
- Issue date Oct 15, 2024
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,894,227
- Issue date Feb 6, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer level uniformity control in remote plasma film deposition
- Patent number 11,702,748
- Issue date Jul 18, 2023
- Lam Research Corporation
- Geoffrey Hohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,264,234
- Issue date Mar 1, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,101,164
- Issue date Aug 24, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with improved hole pattern for delivering rad...
- Patent number 11,015,247
- Issue date May 25, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 10,604,841
- Issue date Mar 31, 2020
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 10,325,773
- Issue date Jun 18, 2019
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for depositing silicon oxide on metal layers
- Patent number 10,319,582
- Issue date Jun 11, 2019
- Lam Research Corporation
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma based deposition of graded or multi-layered silicon c...
- Patent number 10,297,442
- Issue date May 21, 2019
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Densification of silicon carbide film using remote plasma treatment
- Patent number 9,837,270
- Issue date Dec 5, 2017
- Lam Research Corporation
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20250003074
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
- Publication number 20230304156
- Publication date Sep 28, 2023
- LAM RESEARCH CORPORATION
- Geoffrey HOHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INCREASING PLASMA UNIFORMITY IN A RECEPTACLE
- Publication number 20230223238
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Tongtong Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...
- Publication number 20230203646
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20220148875
- Publication date May 12, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20210269918
- Publication date Sep 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20190259604
- Publication date Aug 22, 2019
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20190177846
- Publication date Jun 13, 2019
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...
- Publication number 20180347035
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILIC...
- Publication number 20180330945
- Publication date Nov 15, 2018
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR DEPOSITING SILICON OXIDE ON METAL LAYERS
- Publication number 20180315597
- Publication date Nov 1, 2018
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
- Publication number 20180251893
- Publication date Sep 6, 2018
- LAM RESEARCH CORPORATION
- Geoffrey Hohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA BASED DEPOSITION OF GRADED OR MULTI-LAYERED SILICON C...
- Publication number 20180240664
- Publication date Aug 23, 2018
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20180163305
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA BASED DEPOSITION OF GRADED OR MULTI-LAYERED SILICON C...
- Publication number 20180096842
- Publication date Apr 5, 2018
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20150303056
- Publication date Oct 22, 2015
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Integrated showerhead with improved hole pattern for delivering rad...

Integrated showerhead with thermal control for delivering radical a...

Conformal deposition of silicon carbide films

Wafer level uniformity control in remote plasma film deposition

Integrated showerhead with thermal control for delivering radical a...

Conformal deposition of silicon carbide films

Integrated showerhead with thermal control for delivering radical a...

Integrated showerhead with improved hole pattern for delivering rad...

Integrated showerhead with thermal control for delivering radical a...

Conformal deposition of silicon carbide films

Methods and apparatus for depositing silicon oxide on metal layers

Remote plasma based deposition of graded or multi-layered silicon c...

Densification of silicon carbide film using remote plasma treatment

Patents Applicationslast 30 patents

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION

INCREASING PLASMA UNIFORMITY IN A RECEPTACLE

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...

REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILIC...

METHODS AND APPARATUS FOR DEPOSITING SILICON OXIDE ON METAL LAYERS

WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION

REMOTE PLASMA BASED DEPOSITION OF GRADED OR MULTI-LAYERED SILICON C...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

REMOTE PLASMA BASED DEPOSITION OF GRADED OR MULTI-LAYERED SILICON C...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS