Zhenqiu Liu

Person

Northboro, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Seed layer deposition in microscale features
- Patent number 9,714,474
- Issue date Jul 25, 2017
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus for fluid processing a workpiece
- Patent number 9,453,290
- Issue date Sep 27, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for fluid processing a workpiece
- Patent number 8,512,543
- Issue date Aug 20, 2013
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 8,277,624
- Issue date Oct 2, 2012
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Balancing pressure to improve a fluid seal
- Patent number 8,168,057
- Issue date May 1, 2012
- NEXX Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 8,038,856
- Issue date Oct 18, 2011
- NEXX Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Balancing pressure to improve a fluid seal
- Patent number 7,727,366
- Issue date Jun 1, 2010
- NEXX Systems, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 7,722,747
- Issue date May 25, 2010
- NEXX Systems, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fluid processing a workpiece
- Patent number 7,445,697
- Issue date Nov 4, 2008
- NEXX Systems, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR FLUID PROCESSING A WORKPIECE
- Publication number 20130334036
- Publication date Dec 19, 2013
- TEL NEXX, Inc.
- Arthur KEIGLER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATED LEAD-FREE BUMP DEPOSITION
- Publication number 20120325671
- Publication date Dec 27, 2012
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEED LAYER DEPOSITION IN MICROSCALE FEATURES
- Publication number 20120152752
- Publication date Jun 21, 2012
- Nexx Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
- Publication number 20120103799
- Publication date May 3, 2012
- NEXX SYSTEMS INC.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEED LAYER DEPOSITION IN MICROSCALE FEATURES
- Publication number 20110240481
- Publication date Oct 6, 2011
- Nexx Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
- Publication number 20110139627
- Publication date Jun 16, 2011
- Nexx Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
BALANCING PRESSURE TO IMPROVE A FLUID SEAL
- Publication number 20100301564
- Publication date Dec 2, 2010
- Nexx Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
- Publication number 20100295225
- Publication date Nov 25, 2010
- NEXX SYSTEMS INC.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Balancing pressure to improve a fluid seal
- Publication number 20060110536
- Publication date May 25, 2006
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for fluid processing and drying a workpiece
- Publication number 20050283993
- Publication date Dec 29, 2005
- Qunwei Wu
- B08 - CLEANING
Information Patent Application
Method and apparatus for fluid processing a workpiece
- Publication number 20050167275
- Publication date Aug 4, 2005
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for fluid processing a workpiece
- Publication number 20050160977
- Publication date Jul 28, 2005
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for fluid processing a workpiece
- Publication number 20050089645
- Publication date Apr 28, 2005
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Zhenqiu Liu

Person

Patents Grantslast 30 patents

Seed layer deposition in microscale features

Apparatus for fluid processing a workpiece

Method for fluid processing a workpiece

Method and apparatus for fluid processing a workpiece

Balancing pressure to improve a fluid seal

Method and apparatus for fluid processing a workpiece

Balancing pressure to improve a fluid seal

Method and apparatus for fluid processing a workpiece

Method and apparatus for fluid processing a workpiece

Patents Applicationslast 30 patents

APPARATUS FOR FLUID PROCESSING A WORKPIECE

ELECTROPLATED LEAD-FREE BUMP DEPOSITION

SEED LAYER DEPOSITION IN MICROSCALE FEATURES

METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE

SEED LAYER DEPOSITION IN MICROSCALE FEATURES

METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE

BALANCING PRESSURE TO IMPROVE A FLUID SEAL

METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE

Balancing pressure to improve a fluid seal

Method and apparatus for fluid processing and drying a workpiece

Method and apparatus for fluid processing a workpiece

Method and apparatus for fluid processing a workpiece

Method and apparatus for fluid processing a workpiece