Zhiwei Xu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Large-particle monitoring with laser power control for defect inspe...
- Patent number 12,345,658
- Issue date Jul 1, 2025
- KLA Corporation
- Anatoly Romanovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for rotating an optical objective
- Patent number 11,733,172
- Issue date Aug 22, 2023
- KLA Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for optical surface defect material characteriz...
- Patent number 11,703,460
- Issue date Jul 18, 2023
- KLA Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for advanced defect ablation protection
- Patent number 11,181,484
- Issue date Nov 23, 2021
- KLA Corporation
- Zhiwei Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air scattering standard for light scattering based optical instrume...
- Patent number 11,016,024
- Issue date May 25, 2021
- KLA Corporation
- Frank Li
- G01 - MEASURING TESTING
Information Patent Grant
Minimizing filed size to reduce unwanted stray light
- Patent number 10,739,276
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Inspection-beam shaping on a sample surface at an oblique angle of...
- Patent number 10,732,424
- Issue date Aug 4, 2020
- KLA Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
System and method for compensation of illumination beam misalignment
- Patent number 10,495,579
- Issue date Dec 3, 2019
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING
Information Patent Grant
Inspection beam shaping for improved detection sensitivity
- Patent number 9,255,891
- Issue date Feb 9, 2016
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Multi-spot defect inspection system
- Patent number 9,182,358
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Systems configured to perform a non-contact method for determining...
- Patent number 7,719,294
- Issue date May 18, 2010
- KLA-Tencor Technologies Corp.
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Contactless charge measurement of product wafers and control of cor...
- Patent number 7,538,333
- Issue date May 26, 2009
- KLA-Tencor Technologies Corporation
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Methods for imperfect insulating film electrical thickness/capacita...
- Patent number 7,397,254
- Issue date Jul 8, 2008
- KLA-Tencor Technologies Corp.
- Xiafang (Michelle) Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a property of an insulating film
- Patent number 7,358,748
- Issue date Apr 15, 2008
- KLA-Tencor Technologies Corp.
- Thomas G. Miller
- G01 - MEASURING TESTING
Information Patent Grant
Contactless charge measurement of product wafers and control of cor...
- Patent number 7,248,062
- Issue date Jul 24, 2007
- KLA-Tencor Technologies Corp.
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining one or more properties of a spe...
- Patent number 7,187,186
- Issue date Mar 6, 2007
- KLA-Tencor Technologies Corp.
- Jianou Shi
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for using non-contact voltage sensors and coron...
- Patent number 7,110,238
- Issue date Sep 19, 2006
- KLA-Tencor Technologies Corp.
- Zhiwei (Steve) Xu
- G01 - MEASURING TESTING
Information Patent Grant
Non-contact methods for measuring electrical thickness and determin...
- Patent number 7,103,484
- Issue date Sep 5, 2006
- KLA-Tencor Technologies Corp.
- Jianou Shi
- G01 - MEASURING TESTING
Information Patent Grant
Methods for imperfect insulating film electrical thickness/capacita...
- Patent number 7,075,318
- Issue date Jul 11, 2006
- KLA-Tencor Technologies Corp.
- Xiafang (Michelle) Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining an electrical property of an in...
- Patent number 7,064,565
- Issue date Jun 20, 2006
- KLA-Tencor Technologies Corp.
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a property of an insulating film
- Patent number 7,012,438
- Issue date Mar 14, 2006
- KLA-Tencor Technologies Corp.
- Thomas G. Miller
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for using non-contact voltage sensors and coron...
- Patent number 6,909,291
- Issue date Jun 21, 2005
- KLA-Tencor Technologies Corp.
- Zhiwei (Steve) Xu
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for detecting metal contamination on a semiconduc...
- Patent number 6,759,255
- Issue date Jul 6, 2004
- KLA-Tencor Technologies Corp.
- Zhiwei Xu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Large-Particle Monitoring with Laser Power Control for Defect Inspe...
- Publication number 20220091047
- Publication date Mar 24, 2022
- KLA Corporation
- Anatoly Romanovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Systems For Optical Surface Defect Material Characteriz...
- Publication number 20210010949
- Publication date Jan 14, 2021
- KLA Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Air Scattering Standard for Light Scattering Based Optical Instrume...
- Publication number 20200264099
- Publication date Aug 20, 2020
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING
Information Patent Application
Inspection-Beam Shaping on a Sample Surface at an Oblique Angle of...
- Publication number 20190250414
- Publication date Aug 15, 2019
- KLA-Tencor Corporation
- Zhiwei Xu
- G02 - OPTICS
Information Patent Application
Minimizing Field Size to Reduce Unwanted Stray Light
- Publication number 20190137411
- Publication date May 9, 2019
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Compensation of Illumination Beam Misalignment
- Publication number 20170336329
- Publication date Nov 23, 2017
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Defect Inspection System
- Publication number 20140268118
- Publication date Sep 18, 2014
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Inspection Beam Shaping For Improved Detection Sensitivity
- Publication number 20140139829
- Publication date May 22, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING ONE OR MORE PROPERTIES OF A SPE...
- Publication number 20070126458
- Publication date Jun 7, 2007
- Jianou Shi
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining one or more properties of a spe...
- Publication number 20050206402
- Publication date Sep 22, 2005
- Jianou Shi
- G01 - MEASURING TESTING
Information Patent Application
Method and system for detecting metal contamination on a semiconduc...
- Publication number 20020090746
- Publication date Jul 11, 2002
- Zhiwei Xu
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Large-particle monitoring with laser power control for defect inspe...

Apparatus and method for rotating an optical objective

Methods and systems for optical surface defect material characteriz...

Systems and methods for advanced defect ablation protection

Air scattering standard for light scattering based optical instrume...

Minimizing filed size to reduce unwanted stray light

Inspection-beam shaping on a sample surface at an oblique angle of...

System and method for compensation of illumination beam misalignment

Inspection beam shaping for improved detection sensitivity

Illumination energy management in surface inspection

Multi-spot defect inspection system

Illumination energy management in surface inspection

Systems configured to perform a non-contact method for determining...

Contactless charge measurement of product wafers and control of cor...

Methods for imperfect insulating film electrical thickness/capacita...

Methods and systems for determining a property of an insulating film

Contactless charge measurement of product wafers and control of cor...

Methods and systems for determining one or more properties of a spe...

Systems and methods for using non-contact voltage sensors and coron...

Non-contact methods for measuring electrical thickness and determin...

Methods for imperfect insulating film electrical thickness/capacita...

Methods and systems for determining an electrical property of an in...

Methods and systems for determining a property of an insulating film

Systems and methods for using non-contact voltage sensors and coron...

Method and system for detecting metal contamination on a semiconduc...

Patents Applicationslast 30 patents

Large-Particle Monitoring with Laser Power Control for Defect Inspe...

Methods And Systems For Optical Surface Defect Material Characteriz...

Air Scattering Standard for Light Scattering Based Optical Instrume...

Inspection-Beam Shaping on a Sample Surface at an Oblique Angle of...

Minimizing Field Size to Reduce Unwanted Stray Light

System and Method for Compensation of Illumination Beam Misalignment

Illumination Energy Management in Surface Inspection

Multi-Spot Defect Inspection System

Inspection Beam Shaping For Improved Detection Sensitivity

Illumination Energy Management in Surface Inspection

METHODS AND SYSTEMS FOR DETERMINING ONE OR MORE PROPERTIES OF A SPE...

Methods and systems for determining one or more properties of a spe...

Method and system for detecting metal contamination on a semiconduc...