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Patents Grants
last 30 patents
Information
Patent Grant
Chemical vapor deposition apparatus and its cleaning method
Patent number
10,240,231
Issue date
Mar 26, 2019
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Zhiyou Du
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas shower device, chemical vapor deposition device and method
Patent number
9,945,031
Issue date
Apr 17, 2018
ADVANCED MICRO-FABRICATION EQUIPMENT INC, CHINA
Yong Jiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas showerhead, method for making the same and thin film growth rea...
Patent number
9,534,724
Issue date
Jan 3, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Yong Jiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning apparatus and method, and film growth reaction apparatus a...
Patent number
9,382,619
Issue date
Jul 5, 2016
Advanced Micro-Fabrication Equipment, Inc.
Yinxin Jiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MOCVD GAS SHOWERHEAD PRETREATMENT
Publication number
20170130331
Publication date
May 11, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Yingbin LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS AND ITS CLEANING METHOD
Publication number
20160319425
Publication date
Nov 3, 2016
Advanced Micro-Fabrication Equipment Inc. Shanghai
Zhiyou DU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SHOWER DEVICE, CHEMICAL VAPOR DEPOSITION DEVICE AND METHOD
Publication number
20150368799
Publication date
Dec 24, 2015
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Yong JIANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR IN SITU CLEANING OF MOCVD REACTION CHAMBER
Publication number
20140083452
Publication date
Mar 27, 2014
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Gerald Zheyao Yin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR IN SITU CLEANING OF MOCVD REACTION CHAMBER
Publication number
20140083451
Publication date
Mar 27, 2014
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Gerald Zheyao Yin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR IN SITU CLEANING OF MOCVD REACTION CHAMBER
Publication number
20140083453
Publication date
Mar 27, 2014
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Gerald Zheyao Yin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR CLEANING GAS CONVEYING DEVICE, AND METHOD AND REACTION D...
Publication number
20130344244
Publication date
Dec 26, 2013
Advanced Micro-Fabrication Equipment Inc.,Shanghai
Zhiyou Du
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SHOWERHEAD, METHOD FOR MAKING THE SAME AND THIN FILM GROWTH REA...
Publication number
20130299009
Publication date
Nov 14, 2013
Yong Jiang
C30 - CRYSTAL GROWTH
Information
Patent Application
CLEANING APPARATUS AND METHOD, AND FILM GROWTH REACTION APPARATUS A...
Publication number
20120255486
Publication date
Oct 11, 2012
Advanced Micro-Fabrication Equipment Inc., Shanghai
Yinxin Jiang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAF...
Publication number
20100271745
Publication date
Oct 28, 2010
Advanced Micro-Fabrication Equipment, Inc. Asia
Jinyuan CHEN
H01 - BASIC ELECTRIC ELEMENTS