TREA

Zi-Yuang Wang

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  • New Taipei City, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of forming process film
    • Patent number 11,666,950
    • Issue date Jun 6, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Tsung-Lin Lee
    • B08 - CLEANING
  • Information Patent Grant

    Method of cleaning process chamber
    • Patent number 10,668,511
    • Issue date Jun 2, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Tsung-Lin Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF FORMING PROCESS FILM
    • Publication number 20200290095
    • Publication date Sep 17, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tsung-Lin Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF CLEANING PROCESS CHAMBER
    • Publication number 20190291145
    • Publication date Sep 26, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tsung-Lin Lee
    • B08 - CLEANING