Zubin HUANG

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 11,981,998
- Issue date May 14, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron concentration tunability in boron-silicon films
- Patent number 11,961,739
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery for tungsten-containing layer
- Patent number 11,939,668
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving thermal chemical vapor depositi...
- Patent number 11,939,675
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow ring lift pin
- Patent number D1009817
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Zubin Huang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow ring lift assembly
- Patent number D997894
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Zubin Huang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Shadow ring lift plate
- Patent number D997893
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Zubin Huang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Lid assembly apparatus and methods for substrate processing chambers
- Patent number 11,598,004
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen management in plasma deposited films
- Patent number 11,562,902
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling concentration profiles for deposited films using machin...
- Patent number 11,532,525
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Anton V Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple spacer patterning schemes
- Patent number 11,527,408
- Issue date Dec 13, 2022
- Applied Materials, Inc.
- Tzu-shun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for modifying photoresist profiles and tuning critical dime...
- Patent number 11,456,173
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Meenakshi Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple spacer patterning schemes
- Patent number 11,315,787
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Tzu-shun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor delivery system and methods related thereto
- Patent number 11,009,455
- Issue date May 18, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface acoustic wave sensors in semiconductor processing equipment
- Patent number 10,656,100
- Issue date May 19, 2020
- Applied Materials, Inc.
- Ramesh Gopalan
- G01 - MEASURING TESTING
Information Patent Grant
Chemical mechanical polishing smart ring
- Patent number 10,513,008
- Issue date Dec 24, 2019
- Applied Materials, Inc.
- Zubin Huang
- B24 - GRINDING POLISHING
Information Patent Grant
Surface acoustic wave sensors in semiconductor processing equipment
- Patent number 10,094,788
- Issue date Oct 9, 2018
- Applied Materials, Inc.
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT
- Publication number 20240304437
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Chuanxi YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20240266171
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER
- Publication number 20240229230
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20240229240
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...
- Publication number 20230374660
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Harpreet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY
- Publication number 20230357929
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER
- Publication number 20230340662
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE
- Publication number 20230265561
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS
- Publication number 20230146981
- Publication date May 11, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM COVER PLATE TO REDUCE WAFER PLANAR NONUNIFORMITY
- Publication number 20230130756
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20230118964
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SPACER PATTERNING SCHEMES
- Publication number 20230093450
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Tzu-shun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20230023764
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- David W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHADOW RING LIFT TO IMPROVE WAFER EDGE PERFORMANCE
- Publication number 20230002894
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20220285232
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE
- Publication number 20220199373
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20220108892
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER
- Publication number 20220108891
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BEVEL BACKSIDE DEPOSITION ELIMINATION
- Publication number 20220108872
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD FOR REMOVING BACKSIDE DEPOSITION AT LIFT PIN LOCAT...
- Publication number 20220093371
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS
- Publication number 20220020583
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210320027
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20210183657
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- DAVID W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR IMPROVING THERMAL CHEMICAL VAPOR DEPOSITI...
- Publication number 20210147981
- Publication date May 20, 2021
- Applied Materials, Inc.
- Rui CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS
- Publication number 20210143029
- Publication date May 13, 2021
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210130960
- Publication date May 6, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE CAPACITIVELY COUPLED PLASMA DEPOSITION OF AMORPHOUS SILICON
- Publication number 20210040617
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE SPACER PATTERNING SCHEMES
- Publication number 20200335338
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Tzu-Shun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SPACER PATTERNING SCHEMES
- Publication number 20200335339
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Tzu-shun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR MODIFYING PHOTORESIST PROFILES AND TUNING CRITICAL DIIM...
- Publication number 20200321210
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- Meenakshi GUPTA
- H01 - BASIC ELECTRIC ELEMENTS

Zubin HUANG

Person

Patents Grantslast 30 patents

Systems and methods for substrate support temperature control

Systems and methods for substrate support temperature control

Boron concentration tunability in boron-silicon films

Gas delivery for tungsten-containing layer

Apparatus and methods for improving thermal chemical vapor depositi...

Shadow ring lift pin

Heated pedestal design for improved heat transfer and temperature u...

Gas delivery systems and methods

Shadow ring lift assembly

Shadow ring lift plate

Lid assembly apparatus and methods for substrate processing chambers

Hydrogen management in plasma deposited films

Controlling concentration profiles for deposited films using machin...

Multiple spacer patterning schemes

Methods for modifying photoresist profiles and tuning critical dime...

Multiple spacer patterning schemes

Precursor delivery system and methods related thereto

Surface acoustic wave sensors in semiconductor processing equipment

Chemical mechanical polishing smart ring

Surface acoustic wave sensors in semiconductor processing equipment

Patents Applicationslast 30 patents

PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS

GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...

APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY

GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER

POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE

HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS

BOTTOM COVER PLATE TO REDUCE WAFER PLANAR NONUNIFORMITY

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

MULTIPLE SPACER PATTERNING SCHEMES

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

SHADOW RING LIFT TO IMPROVE WAFER EDGE PERFORMANCE

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS

MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER

BEVEL BACKSIDE DEPOSITION ELIMINATION

RADIATION SHIELD FOR REMOVING BACKSIDE DEPOSITION AT LIFT PIN LOCAT...

HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

APPARATUS AND METHODS FOR IMPROVING THERMAL CHEMICAL VAPOR DEPOSITI...

GAS DELIVERY SYSTEMS AND METHODS

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

REMOTE CAPACITIVELY COUPLED PLASMA DEPOSITION OF AMORPHOUS SILICON

MULTIPLE SPACER PATTERNING SCHEMES

MULTIPLE SPACER PATTERNING SCHEMES

METHODS FOR MODIFYING PHOTORESIST PROFILES AND TUNING CRITICAL DIIM...