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H01J37/32036

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32036AC powered

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle emission device, system, method, and program
- Patent number 12,154,762
- Issue date Nov 26, 2024
- Shishido Electrostatic, Ltd.
- Katsuyuki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High frequency power source allowing arbitrary setting of temporal...
- Patent number 11,875,968
- Issue date Jan 16, 2024
- Adtec Plasma Technology Co., Ltd.
- Toshihiro Takahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing coated substrates
- Patent number 11,814,718
- Issue date Nov 14, 2023
- Bühler Alzenau GmbH
- Jürgen Pistner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma device having exchangeable handpiece
- Patent number 11,664,204
- Issue date May 30, 2023
- FEMTO SCIENCE INC
- Moo Hwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage filter assembly
- Patent number 11,508,554
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Anurag Kumar Mishra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric discharge generator and power supply device of electric di...
- Patent number 11,466,366
- Issue date Oct 11, 2022
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Yoichiro Tabata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for continuously supplying negative ions using...
- Patent number 11,337,296
- Issue date May 17, 2022
- Korea Atomic Energy Research Institute
- Sungryul Huh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ionizing an analyte, and apparatus and met...
- Patent number 11,201,045
- Issue date Dec 14, 2021
- PLASMION GMBH
- Jan-Christoph Wolf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling multiple plasma processes
- Patent number 10,971,342
- Issue date Apr 6, 2021
- TRUMPF Huettinger Sp. z o. o.
- Jan Peter Engelstaedter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polarization dielectric discharge source for IMS instrument
- Patent number 10,883,964
- Issue date Jan 5, 2021
- TEKNOSCAN SYSTEMS INC.
- Sabatino Nacson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling exposure region in bevel etching process for...
- Patent number 10,879,051
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hsing Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable structure and film forming apparatus
- Patent number 10,847,399
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ethylene disposal apparatus and ethylene disposal method using same
- Patent number 10,716,312
- Issue date Jul 21, 2020
- Korea Basic Science Institute
- Young Sun Mok
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Grant
System and method for plasma head thermal control
- Patent number 10,672,594
- Issue date Jun 2, 2020
- Ontos Equipment Systems, Inc.
- Robert Emmett Hughlett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,625
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,624
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming thin protective and optical layers on substrates
- Patent number 10,526,708
- Issue date Jan 7, 2020
- Aixtron SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,529,544
- Issue date Jan 7, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Atomic layer etching with pulsed plasmas
- Patent number 10,515,782
- Issue date Dec 24, 2019
- University of Houston System
- Vincent M. Donnelly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,483,093
- Issue date Nov 19, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,438,778
- Issue date Oct 8, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,438,777
- Issue date Oct 8, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Activated gas generation apparatus
- Patent number 10,418,226
- Issue date Sep 17, 2019
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Kensuke Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,340,126
- Issue date Jul 2, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,290,474
- Issue date May 14, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,290,473
- Issue date May 14, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,163,608
- Issue date Dec 25, 2018
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,115,570
- Issue date Oct 30, 2018
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,083,821
- Issue date Sep 25, 2018
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Plasma generating units for processing a substrate
- Patent number 10,049,859
- Issue date Aug 14, 2018
- Aixtron SE
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for Edge Control During Plasma Processing
- Publication number 20230360889
- Publication date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- Barton Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Apparatus for Plasma Processing
- Publication number 20230330619
- Publication date Oct 19, 2023
- Haydale Graphene Industries PLC
- John-Mark Seymour
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM
- Publication number 20220384147
- Publication date Dec 1, 2022
- SEMES CO., LTD.
- Sang Hwan LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM
- Publication number 20220301819
- Publication date Sep 22, 2022
- Shishido Electrostatic, Ltd.
- Katsuyuki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH FREQUENCY POWER SOURCE ALLOWING ARBITRARY SETTING OF TEMPORAL...
- Publication number 20220293393
- Publication date Sep 15, 2022
- ADTEC PLASMA TECHNOLOGY CO., LTD.
- Toshihiro Takahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT ARRANGEMENT AND METHOD FOR ADAPTING THE SIZE OF A...
- Publication number 20220172929
- Publication date Jun 2, 2022
- CINOGY GMBH
- Dirk WANDKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR IONIZING AN ANALYTE, AND APPARATUS AND MET...
- Publication number 20220102129
- Publication date Mar 31, 2022
- PLASMION GMBH
- Jan-Christoph WOLF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DEVICE HAVING EXCHANGEABLE HANDPIECE
- Publication number 20210225620
- Publication date Jul 22, 2021
- FEMTO SCIENCE INC
- Moo Hwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD
- Publication number 20210172060
- Publication date Jun 10, 2021
- DIAROTECH
- Horacio TELLEZ OLIVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR CONTINUOUSLY SUPPLYING NEGATIVE IONS USING...
- Publication number 20200288561
- Publication date Sep 10, 2020
- Korea Atomic Energy Research Institute
- Sungryul HUH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH VOLTAGE FILTER ASSEMBLY
- Publication number 20200243303
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Anurag Kumar MISHRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR DEFINING A PLASMA
- Publication number 20200243309
- Publication date Jul 30, 2020
- CAMVAC LIMITED
- David Anthony
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING MULTIPLE PLASMA PROCESSES
- Publication number 20200066498
- Publication date Feb 27, 2020
- TRUMPF Huettinger Sp. z o. o.
- Jan Peter Engelstaedter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVATED GAS GENERATION APPARATUS
- Publication number 20190157046
- Publication date May 23, 2019
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Kensuke WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLARIZATION DIELECTRIC DISCHARGE SOURCE FOR IMS INSTRUMENT
- Publication number 20190011400
- Publication date Jan 10, 2019
- TEKNOSCAN SYSTEMS INC.
- Sabatino NACSON
- G01 - MEASURING TESTING
Information Patent Application
MOVABLE STRUCTURE AND FILM FORMING APPARATUS
- Publication number 20180294176
- Publication date Oct 11, 2018
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Etching with Pulsed Plasmas
- Publication number 20180226227
- Publication date Aug 9, 2018
- UNIVERSITY OF HOUSTON SYSTEM
- Vincent M. Donnelly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS ON SUBSTRATES
- Publication number 20180202046
- Publication date Jul 19, 2018
- AIXTRON SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING EXPOSURE REGION IN BEVEL ETCHING PROCESS FOR...
- Publication number 20180151335
- Publication date May 31, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsing WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PLASMA HEAD THERMAL CONTROL
- Publication number 20180122624
- Publication date May 3, 2018
- Ontos Equipment Systems, Inc.
- Robert Emmett HUGHLETT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING COATED SUBSTRATES
- Publication number 20180087142
- Publication date Mar 29, 2018
- BÜHLER ALZENAU GMBH
- Jürgen Pistner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETHYLENE DISPOSAL APPARATUS AND ETHYLENE DISPOSAL METHOD USING SAME
- Publication number 20170325471
- Publication date Nov 16, 2017
- KOREA BASIC SCIENCE INSTITUTE
- Young Sun MOK
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Application
Film Forming Apparatus and Film Forming Method
- Publication number 20170004995
- Publication date Jan 5, 2017
- Ulvac, Inc.
- Keiichiro Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR TREATMENT OF ORGANIC HUMAN TISSUE WITH A L...
- Publication number 20160193475
- Publication date Jul 7, 2016
- NORTHCO VENTURES GMBH & CO. KG
- Josef Srb
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Apparatus and Methods for Defining a Plasma
- Publication number 20150371834
- Publication date Dec 24, 2015
- CAMVAC LIMITED
- David Anthony
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control System of Full-Automatic Cold Plasma Seed Processor
- Publication number 20150298086
- Publication date Oct 22, 2015
- INSTITUTE OF SOIL SCIENCE, CHINESE ACADEMY OF SCIENCES
- Yuanhua DONG
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method of Treating a Porous Substrate and Manufacture of a Membrane
- Publication number 20150231575
- Publication date Aug 20, 2015
- FUJIFILM Manufacturing Europe B.V.
- Serguei Starostine
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLASMA TREATMENT APPARATUS AND METHOD
- Publication number 20150228461
- Publication date Aug 13, 2015
- JCU CORPORATION
- Shinji FUKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR GENERATING REACTIVE GAS WITH GLOW DISCHARGES AND METH...
- Publication number 20150179411
- Publication date Jun 25, 2015
- ECOLE CENTRALE DES ARTS ET MANUFACTURES
- Christophe LAUX
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD AND DEVICE FOR PERMANENT BONDING OF WAFERS
- Publication number 20150165752
- Publication date Jun 18, 2015
- EV GROUP E. THALLNER GMBH
- Thomas Plach
- B32 - LAYERED PRODUCTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle emission device, system, method, and program

High frequency power source allowing arbitrary setting of temporal...

Method for producing coated substrates

Plasma device having exchangeable handpiece

High voltage filter assembly

Electric discharge generator and power supply device of electric di...

Systems and methods for continuously supplying negative ions using...

Apparatus and method for ionizing an analyte, and apparatus and met...

Controlling multiple plasma processes

Polarization dielectric discharge source for IMS instrument

Method for controlling exposure region in bevel etching process for...

Movable structure and film forming apparatus

Ethylene disposal apparatus and ethylene disposal method using same

System and method for plasma head thermal control

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Methods for forming thin protective and optical layers on substrates

Plasma source and methods for depositing thin film coatings using p...

Atomic layer etching with pulsed plasmas

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Activated gas generation apparatus

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma generating units for processing a substrate

Patents Applicationslast 30 patents

Apparatus for Edge Control During Plasma Processing

Methods and Apparatus for Plasma Processing

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM

CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM

HIGH FREQUENCY POWER SOURCE ALLOWING ARBITRARY SETTING OF TEMPORAL...

PLASMA TREATMENT ARRANGEMENT AND METHOD FOR ADAPTING THE SIZE OF A...

APPARATUS AND METHOD FOR IONIZING AN ANALYTE, AND APPARATUS AND MET...

PLASMA DEVICE HAVING EXCHANGEABLE HANDPIECE

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

SYSTEMS AND METHODS FOR CONTINUOUSLY SUPPLYING NEGATIVE IONS USING...

HIGH VOLTAGE FILTER ASSEMBLY

APPARATUS AND METHODS FOR DEFINING A PLASMA

CONTROLLING MULTIPLE PLASMA PROCESSES

ACTIVATED GAS GENERATION APPARATUS

POLARIZATION DIELECTRIC DISCHARGE SOURCE FOR IMS INSTRUMENT

MOVABLE STRUCTURE AND FILM FORMING APPARATUS

Atomic Layer Etching with Pulsed Plasmas

METHODS FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS ON SUBSTRATES

METHOD FOR CONTROLLING EXPOSURE REGION IN BEVEL ETCHING PROCESS FOR...

SYSTEM AND METHOD FOR PLASMA HEAD THERMAL CONTROL

METHOD FOR PRODUCING COATED SUBSTRATES

ETHYLENE DISPOSAL APPARATUS AND ETHYLENE DISPOSAL METHOD USING SAME

Film Forming Apparatus and Film Forming Method

APPARATUS AND METHOD FOR TREATMENT OF ORGANIC HUMAN TISSUE WITH A L...

Apparatus and Methods for Defining a Plasma

Control System of Full-Automatic Cold Plasma Seed Processor

Method of Treating a Porous Substrate and Manufacture of a Membrane

PLASMA TREATMENT APPARATUS AND METHOD

APPARATUS FOR GENERATING REACTIVE GAS WITH GLOW DISCHARGES AND METH...

METHOD AND DEVICE FOR PERMANENT BONDING OF WAFERS