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CPC
B24B37/34

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BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B37/00Lapping machines or devices Accessories

Current Industry

B24B37/34Accessories

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Patents Grantslast 30 patents

Information Patent Grant
Pedestal polishing apparatus
- Patent number 12,162,117
- Issue date Dec 10, 2024
- Lam Research Corporation
- Robert McKinney
- B24 - GRINDING POLISHING
Information Patent Grant
Channel cut polishing machine
- Patent number 12,134,164
- Issue date Nov 5, 2024
- UChicago Argonne, LLC
- Elina Kasman
- B24 - GRINDING POLISHING
Information Patent Grant
Replacing tool for sponge brush, method for installing sponge brush...
- Patent number 12,122,014
- Issue date Oct 22, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Jinwei Dang
- B24 - GRINDING POLISHING
Information Patent Grant
Pad removal method and device
- Patent number 12,115,767
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- ChunHung Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Automated dry-in dry-out dual side polishing of silicon substrates...
- Patent number 12,094,740
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Manoj A. Gajendra
- B08 - CLEANING
Information Patent Grant
Placing member
- Patent number 12,070,835
- Issue date Aug 27, 2024
- Seikoh Giken Co., Ltd.
- Yuji Shibutani
- B24 - GRINDING POLISHING
Information Patent Grant
Processing method of workpiece
- Patent number 12,064,847
- Issue date Aug 20, 2024
- Disco Corporation
- Yoshikazu Suzuki
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning liquid supply device, cleaning unit, and storage medium st...
- Patent number 12,042,901
- Issue date Jul 23, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING
Information Patent Grant
Steam treatment stations for chemical mechanical polishing system
- Patent number 12,030,093
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Grant
Post-chemical mechanical polishing brush cleaning box
- Patent number 12,023,779
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Gary Ka Ho Lam
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,002,688
- Issue date Jun 4, 2024
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar grinder
- Patent number 12,000,764
- Issue date Jun 4, 2024
- Illinois Tool Works Inc.
- Kurt G. Adair
- G01 - MEASURING TESTING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,996,303
- Issue date May 28, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Maintenance methods for polishing systems and articles related thereto
- Patent number 11,986,925
- Issue date May 21, 2024
- Applied Materials, Inc.
- Shantanu Rajiv Gadgil
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Polishing device, polishing method, and recording medium for record...
- Patent number 11,980,998
- Issue date May 14, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Method of cleaning an optical film-thickness measuring system
- Patent number 11,919,048
- Issue date Mar 5, 2024
- Ebara Corporation
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system with platen temperature control
- Patent number 11,911,869
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
- Patent number 11,908,720
- Issue date Feb 20, 2024
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Linghan Shen
- B08 - CLEANING
Information Patent Grant
Method of polishing silicon wafer
- Patent number 11,890,719
- Issue date Feb 6, 2024
- Sumco Corporation
- Shuhei Matsuda
- B24 - GRINDING POLISHING
Information Patent Grant
Cover to vacuum debris while grinding
- Patent number 11,872,669
- Issue date Jan 16, 2024
- Disco Corporation
- Toshiyuki Moriya
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing device
- Patent number 11,869,788
- Issue date Jan 9, 2024
- Ebara Corporation
- Koji Maeda
- B08 - CLEANING
Information Patent Grant
Temperature-based in-situ edge assymetry correction during CMP
- Patent number 11,865,671
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Haosheng Wu
- B24 - GRINDING POLISHING
Information Patent Grant
Sensor target cover used in combination with liquid level detection...
- Patent number 11,846,536
- Issue date Dec 19, 2023
- Ebara Corporation
- Naoki Toyomura
- B24 - GRINDING POLISHING
Information Patent Grant
Pad-temperature regulating apparatus, and polishing apparatus
- Patent number 11,839,947
- Issue date Dec 12, 2023
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,839,948
- Issue date Dec 12, 2023
- Ebara Corporation
- Takashi Yamazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece processing apparatus including a resin coater and a resin...
- Patent number 11,819,975
- Issue date Nov 21, 2023
- Disco Corporation
- Shinya Watanabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus having chamber cover
- Patent number 11,813,716
- Issue date Nov 14, 2023
- Samsung Electronics Co., Ltd.
- Jwahyeon Kim
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing device
- Patent number 11,794,304
- Issue date Oct 24, 2023
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Yaomin Deng
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning equipment, substrate treatment system including...
- Patent number 11,791,173
- Issue date Oct 17, 2023
- Samsung Electronics Co., Ltd.
- Seung Hoon Choi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICA...
- Publication number 20240412977
- Publication date Dec 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Te-Chien HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240391054
- Publication date Nov 28, 2024
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
WAFER POLISHING SYSTEM
- Publication number 20240367283
- Publication date Nov 7, 2024
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Xiaoyu XU
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20240367282
- Publication date Nov 7, 2024
- EBARA CORPORATION
- Hisashi SARUWATARI
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINING THE ORIENTATION OF A SUBSTRATE IN-SITU
- Publication number 20240359291
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Wei LU
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE...
- Publication number 20240351078
- Publication date Oct 24, 2024
- EBARA CORPORATION
- Naoyuki HANDA
- B08 - CLEANING
Information Patent Application
VEHICLE WAXING SYSTEM AND VEHICLE WAXING METHOD
- Publication number 20240308024
- Publication date Sep 19, 2024
- National Taiwan University of Science and Technology
- Chyi-Yeu Lin
- B60 - VEHICLES IN GENERAL
Information Patent Application
STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20240307928
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Haosheng Wu
- B08 - CLEANING
Information Patent Application
COVER ASSEMBLY, CLEANING METHOD, AND METHOD FOR MANUFACTURING COVER...
- Publication number 20240308023
- Publication date Sep 19, 2024
- EBARA CORPORATION
- YUSUKE MOCHIDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20240286245
- Publication date Aug 29, 2024
- EBARA CORPORATION
- Shinji KAJITA
- B08 - CLEANING
Information Patent Application
INDEX POLISHING FOR PROCESS CONTROL SIGNAL AND WAFER UNIFORMITY
- Publication number 20240269796
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Jimin Zhang
- B24 - GRINDING POLISHING
Information Patent Application
Chemical Mechanical Polishing Process Method and Device
- Publication number 20240217055
- Publication date Jul 4, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Yu Bao
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM
- Publication number 20240208006
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Roy C. Nangoy
- B24 - GRINDING POLISHING
Information Patent Application
METHODS FOR POLISHING BULK SILICON DEVICES
- Publication number 20240096636
- Publication date Mar 21, 2024
- Qorvo US, Inc.
- Krishna Chetry
- B24 - GRINDING POLISHING
Information Patent Application
SMART MANUFACTURING SOLUTIONS FOR WASTEWATER TREATMENT
- Publication number 20240077890
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Maxime CAYER
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20240033876
- Publication date Feb 1, 2024
- EBARA CORPORATION
- Shumpei MIURA
- B24 - GRINDING POLISHING
Information Patent Application
TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...
- Publication number 20240001407
- Publication date Jan 4, 2024
- EBARA CORPORATION
- Asagi MATSUGU
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR SUBSTRATE GRINDING APPARATUS AND SEMICONDUCTOR SUBSTR...
- Publication number 20230373058
- Publication date Nov 23, 2023
- Samsung Electronics Co., Ltd.
- Donghoon KWON
- B08 - CLEANING
Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20230356267
- Publication date Nov 9, 2023
- EBARA CORPORATION
- Shuji UOZUMI
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TE...
- Publication number 20230356351
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Hari Soundararajan
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230352326
- Publication date Nov 2, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230326770
- Publication date Oct 12, 2023
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230307259
- Publication date Sep 28, 2023
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS FOR SUBSTRATE AND POLISHING METHOD FOR SUBSTRAT...
- Publication number 20230286108
- Publication date Sep 14, 2023
- SAMSUNG ELECTRONICS CO., LTD.
- Donghoon Kwon
- B24 - GRINDING POLISHING
Information Patent Application
LARGE AREA QUARTZ CRYSTAL WAFER LAPPING DEVICE AND A LAPPING METHOD...
- Publication number 20230249312
- Publication date Aug 10, 2023
- TANGSHAN GUOXIN JINGYUAN ELECTRONICS CO., LTD.
- Jianmin XU
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR SELECTIVE MATERIAL REMOVAL DURING POLISHING
- Publication number 20230219189
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Ashwin CHOCKALINGAM
- B24 - GRINDING POLISHING
Information Patent Application
AUTOMATIC ABRASION COMPENSATION SYSTEM OF LOWER PLATE AND WAFER LAP...
- Publication number 20230211457
- Publication date Jul 6, 2023
- SK SILTRON CO., LTD.
- Jae Pyo LEE
- B24 - GRINDING POLISHING
Information Patent Application
WAFER CONVEYING DEVICE, CHEMICAL MECHANICAL PLANARIZATION APPARATUS...
- Publication number 20230201995
- Publication date Jun 29, 2023
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Yuansi YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION METHOD FOR ACOUSTIC SENSOR
- Publication number 20230194477
- Publication date Jun 22, 2023
- EBARA CORPORATION
- Yuta SUZUKI
- B24 - GRINDING POLISHING
Information Patent Application
GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN...
- Publication number 20230182259
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Surajit Kumar
- B24 - GRINDING POLISHING

Accessories

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pedestal polishing apparatus

Channel cut polishing machine

Replacing tool for sponge brush, method for installing sponge brush...

Pad removal method and device

Automated dry-in dry-out dual side polishing of silicon substrates...

Placing member

Processing method of workpiece

Cleaning liquid supply device, cleaning unit, and storage medium st...

Cleaning module, substrate processing apparatus including cleaning...

Steam treatment stations for chemical mechanical polishing system

Post-chemical mechanical polishing brush cleaning box

Substrate cleaning device and substrate cleaning method

Planar grinder

Substrate cleaning device and substrate cleaning method

Maintenance methods for polishing systems and articles related thereto

Polishing device, polishing method, and recording medium for record...

Method of cleaning an optical film-thickness measuring system

Chemical mechanical polishing system with platen temperature control

CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...

Method of polishing silicon wafer

Cover to vacuum debris while grinding

Substrate processing device

Temperature-based in-situ edge assymetry correction during CMP

Sensor target cover used in combination with liquid level detection...

Pad-temperature regulating apparatus, and polishing apparatus

Polishing apparatus

Workpiece processing apparatus including a resin coater and a resin...

Substrate processing apparatus having chamber cover

Wafer polishing device

Substrate cleaning equipment, substrate treatment system including...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICA...

POLISHING APPARATUS AND POLISHING METHOD

WAFER POLISHING SYSTEM

POLISHING METHOD AND POLISHING APPARATUS

DETERMINING THE ORIENTATION OF A SUBSTRATE IN-SITU

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE...

VEHICLE WAXING SYSTEM AND VEHICLE WAXING METHOD

STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM

COVER ASSEMBLY, CLEANING METHOD, AND METHOD FOR MANUFACTURING COVER...

SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE

INDEX POLISHING FOR PROCESS CONTROL SIGNAL AND WAFER UNIFORMITY

Chemical Mechanical Polishing Process Method and Device

CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM

METHODS FOR POLISHING BULK SILICON DEVICES

SMART MANUFACTURING SOLUTIONS FOR WASTEWATER TREATMENT

POLISHING APPARATUS

TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...

SEMICONDUCTOR SUBSTRATE GRINDING APPARATUS AND SEMICONDUCTOR SUBSTR...

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TE...

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

POLISHING APPARATUS FOR SUBSTRATE AND POLISHING METHOD FOR SUBSTRAT...

LARGE AREA QUARTZ CRYSTAL WAFER LAPPING DEVICE AND A LAPPING METHOD...

APPARATUS AND METHOD FOR SELECTIVE MATERIAL REMOVAL DURING POLISHING

AUTOMATIC ABRASION COMPENSATION SYSTEM OF LOWER PLATE AND WAFER LAP...

WAFER CONVEYING DEVICE, CHEMICAL MECHANICAL PLANARIZATION APPARATUS...

CALIBRATION METHOD FOR ACOUSTIC SENSOR

GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN...