Activation or excitation of reactive gases outside the coating chamber

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CPC
C23C14/0047

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0047Activation or excitation of reactive gases outside the coating chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 12,057,297
- Issue date Aug 6, 2024
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings of non-planar substrates and methods for the production th...
- Patent number 11,630,244
- Issue date Apr 18, 2023
- Corning Incorporated
- Robert Alan Bellman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Selective atomic layer deposition of ruthenium
- Patent number 11,066,743
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Yihong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coatings of non-planar substrates
- Patent number 10,802,179
- Issue date Oct 13, 2020
- Corning Incorporated
- Robert Alan Bellman
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 10,262,838
- Issue date Apr 16, 2019
- Vaeco Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming fluoride thin film
- Patent number 7,582,194
- Issue date Sep 1, 2009
- Canon Kabushiki Kaisha
- Satoshi Takaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 7,338,581
- Issue date Mar 4, 2008
- Matsushita Electric Industrial Co., Ltd.
- Toshinari Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion-beam deposition process for manufacture of binary photomask blanks
- Patent number 6,756,161
- Issue date Jun 29, 2004
- E. I. Du Pont de Nemours and Company
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate coated with transparent conductive film and manufacturing...
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- Issue date Mar 9, 2004
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Information Patent Grant
Method for fabricating ZnO thin film for ultraviolet detection and...
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- Issue date Mar 19, 2002
- Korea Institute of Science and Technology
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- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for forming a thin film of a metal compound by vacuum deposi...
- Patent number 6,274,014
- Issue date Aug 14, 2001
- Shincron Co., Ltd.
- Shigeharu Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus and method of forming thin film of comp...
- Patent number 6,238,527
- Issue date May 29, 2001
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- Kazuho Sone
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Information Patent Grant
Method for forming a thin film of a metal compound by vacuum deposi...
- Patent number 6,103,320
- Issue date Aug 15, 2000
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- Shigeharu Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter device
- Patent number 6,083,361
- Issue date Jul 4, 2000
- Anelva Corporation
- Masahiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Geometries and configurations for magnetron sputtering apparatus
- Patent number 5,879,519
- Issue date Mar 9, 1999
- Optical Coating Laboratory, Inc.
- James W. Seeser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing system utilizing combined anode/ ion source
- Patent number 5,855,745
- Issue date Jan 5, 1999
- Sierra Applied Sciences, Inc.
- Barry W. Manley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure reactive magnetron sputtering apparatus and method
- Patent number 5,851,365
- Issue date Dec 22, 1998
- Corning OCA Corporation
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for depositing optical thin films on both planar and non-pl...
- Patent number 5,798,027
- Issue date Aug 25, 1998
- Optical Coating Laboratory, Inc.
- Paul M. Lefebvre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Very high vacuum magnetron sputtering method and apparatus for prec...
- Patent number 5,656,138
- Issue date Aug 12, 1997
- The Optical Corporation of America
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Geometries and configurations for magnetron sputtering apparatus
- Patent number 5,618,388
- Issue date Apr 8, 1997
- Optical Coating Laboratory, Inc.
- James W. Seeser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure reactive magnetron sputtering apparatus and method
- Patent number 5,525,199
- Issue date Jun 11, 1996
- Optical Corporation of America
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing an oxide film
- Patent number 5,332,482
- Issue date Jul 26, 1994
- Rohm Co., Ltd.
- Katsumi Sameshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for depositing optical films on both planar and non-planar...
- Patent number 5,225,057
- Issue date Jul 6, 1993
- Optical Coating Laboratory, Inc.
- Paul M. LeFebvre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High ratio planetary drive system and method for vacuum chamber
- Patent number 5,124,013
- Issue date Jun 23, 1992
- Optical Coating Laboratory, Inc.
- Richard I. Seddon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for the application of thin layers to a substrate
- Patent number 4,946,576
- Issue date Aug 7, 1990
- Leybold Aktiengesellschaft
- Anton Dietrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering apparatus and process
- Patent number 4,851,095
- Issue date Jul 25, 1989
- Optical Coating Laboratory, Inc.
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a compound semiconductor film
- Patent number 4,534,840
- Issue date Aug 13, 1985
- Konishiroku Photo Industry Co., Ltd.
- Masanari Shindo
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of reactive sputtering
- Patent number 4,384,933
- Issue date May 24, 1983
- Fujitsu Limited
- Kanetake Takasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20230221467
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- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR MANUFACTURING TWO-DIMENSIONAL MATERIAL
- Publication number 20210332469
- Publication date Oct 28, 2021
- National Cheng Kung University
- Jung-Chun HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20210003744
- Publication date Jan 7, 2021
- Corning Incorporated
- Robert Alan Bellman
- C03 - GLASS MINERAL OR SLAG WOOL
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DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM
- Publication number 20200219704
- Publication date Jul 9, 2020
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FO...
- Publication number 20190284685
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- Shincron Co., LTD
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM
- Publication number 20190214234
- Publication date Jul 11, 2019
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Atomic Layer Deposition Of Ruthenium
- Publication number 20190185993
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20180011225
- Publication date Jan 11, 2018
- Corning Incorporated
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposition System With Integrated Cooling On A Rotating Drum
- Publication number 20170117119
- Publication date Apr 27, 2017
- Richard DeVito
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DEPOSITION APPARATUS WITH GAS SUPPLY AND METHOD FOR DEPOSITING MATE...
- Publication number 20150368783
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- Applied Materials, Inc.
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METHOD AND SYSTEM FOR FORMING CHALCOGENIDE SEMICONDUCTOR MATERIALS...
- Publication number 20130075247
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- Taiwan Semiconductor Manufacturing Co., LTD
- Wen-Chin Lee
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CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM
- Publication number 20130015057
- Publication date Jan 17, 2013
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering And Ion Beam Deposition
- Publication number 20100264022
- Publication date Oct 21, 2010
- Mun-Sik Chim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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APPARATUS FOR REACTIVE SPUTTERING DEPOSITION
- Publication number 20100258437
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- Woo Seok Cheong
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Sputtering system providing large area sputtering and plasma-assist...
- Publication number 20070181421
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- Industrial Technology Research Institute
- Hung-Wen Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus and method for reactive sputtering deposition
- Publication number 20050029091
- Publication date Feb 10, 2005
- Chan Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming fluoride thin film
- Publication number 20050023131
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- Canon Kabushiki Kaisha
- Satoshi Takaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
- Publication number 20050011757
- Publication date Jan 20, 2005
- Toshinari Noda
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Thin film forming apparatus and thin film forming method
- Publication number 20040074769
- Publication date Apr 22, 2004
- ULVAC, Inc.
- Taizo Morinaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Ion-beam deposition process for manufacture of binary photomask blanks
- Publication number 20030194616
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- Peter Francis Carcia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate coated with transparent conductive film and manufacturing...
- Publication number 20030059625
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- Sanyo Electric Co., Ltd.
- Morio Ogura
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Method for fabricating ZnO thin film for ultraviolet detection and...
- Publication number 20010017257
- Publication date Aug 30, 2001
- KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Won Kook Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Activation or excitation of reactive gases outside the coating chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition system with integrated cooling on a rotating drum

Coatings of non-planar substrates and methods for the production th...

Selective atomic layer deposition of ruthenium

Coatings of non-planar substrates

Deposition system with integrated cooling on a rotating drum

Method and apparatus for forming fluoride thin film

Sputtering apparatus

Ion-beam deposition process for manufacture of binary photomask blanks

Substrate coated with transparent conductive film and manufacturing...

Method for fabricating ZnO thin film for ultraviolet detection and...

Method for forming a thin film of a metal compound by vacuum deposi...

Thin film forming apparatus and method of forming thin film of comp...

Method for forming a thin film of a metal compound by vacuum deposi...

Sputter device

Geometries and configurations for magnetron sputtering apparatus

Plasma processing system utilizing combined anode/ ion source

Low pressure reactive magnetron sputtering apparatus and method

Process for depositing optical thin films on both planar and non-pl...

Very high vacuum magnetron sputtering method and apparatus for prec...

Geometries and configurations for magnetron sputtering apparatus

Low pressure reactive magnetron sputtering apparatus and method

Method and apparatus for depositing an oxide film

Process for depositing optical films on both planar and non-planar...

High ratio planetary drive system and method for vacuum chamber

Apparatus for the application of thin layers to a substrate

Magnetron sputtering apparatus and process

Method for forming a compound semiconductor film

Method of reactive sputtering

Patents Applicationslast 30 patents

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

METHOD FOR MANUFACTURING TWO-DIMENSIONAL MATERIAL

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FO...

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

Selective Atomic Layer Deposition Of Ruthenium

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

Deposition System With Integrated Cooling On A Rotating Drum

DEPOSITION APPARATUS WITH GAS SUPPLY AND METHOD FOR DEPOSITING MATE...

METHOD AND SYSTEM FOR FORMING CHALCOGENIDE SEMICONDUCTOR MATERIALS...

CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM

Sputtering And Ion Beam Deposition

APPARATUS FOR REACTIVE SPUTTERING DEPOSITION

Sputtering system providing large area sputtering and plasma-assist...

Apparatus and method for reactive sputtering deposition

Method and apparatus for forming fluoride thin film

Sputtering apparatus

Thin film forming apparatus and thin film forming method

Ion-beam deposition process for manufacture of binary photomask blanks

Substrate coated with transparent conductive film and manufacturing...

Method for fabricating ZnO thin film for ultraviolet detection and...