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CPC
G01B9/02062

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GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means

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G01B9/02062Active error reduction

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for measuring thickness and surface profile of multilayer...
- Patent number 10,466,031
- Issue date Nov 5, 2019
- Korea Research Institute of Standards and Science
- Young-Sik Ghim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Precision surface measurement in a vacuum
- Patent number 10,151,574
- Issue date Dec 11, 2018
- UChicago Argonne, LLC
- Raymond P. Conley
- G01 - MEASURING TESTING
Information Patent Grant
Method of air refractive index correction for absolute long distanc...
- Patent number 10,024,647
- Issue date Jul 17, 2018
- Zhejiang Sci-Tech University
- Benyong Chen
- G01 - MEASURING TESTING
Information Patent Grant
Ophthalmologic apparatus for measuring position of measuring portio...
- Patent number 9,999,349
- Issue date Jun 19, 2018
- Tomey Corporation
- Chihiro Kato
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometer system, lithography apparatus, and article manufactu...
- Patent number 9,804,510
- Issue date Oct 31, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position monitoring system with reduced noise
- Patent number 9,115,975
- Issue date Aug 25, 2015
- Zygo Corporation
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Grant
Data age adjustments
- Patent number 6,597,459
- Issue date Jul 22, 2003
- Zygo Corporation
- Frank C. Demarest
- G01 - MEASURING TESTING
Information Patent Grant
Architecture for air-turbulence-compensated dual-wavelength heterod...
- Patent number 6,014,216
- Issue date Jan 11, 2000
- Hewlett-Packard Company
- Paul Zorabedian
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric apparatus for measuring a physical value
- Patent number 5,757,489
- Issue date May 26, 1998
- Nikon Corporation
- Jun Kawakami
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods employing harmonic analysis for measuring the...
- Patent number 5,543,914
- Issue date Aug 6, 1996
- Sparta, Inc.
- Philip D. Henshaw
- G01 - MEASURING TESTING
Information Patent Grant
An interferometric measuring system having temperature compensation...
- Patent number 5,537,209
- Issue date Jul 16, 1996
- Sparta, Inc.
- Steven A. Lis
- G01 - MEASURING TESTING
Information Patent Grant
Interferametric measuring system with air turbulence compensation
- Patent number 5,404,222
- Issue date Apr 4, 1995
- Sparta, Inc.
- Steven A. Lis
- G01 - MEASURING TESTING
Information Patent Grant
Optical interferometric sensor detected intensity noise reduction m...
- Patent number 5,104,223
- Issue date Apr 14, 1992
- The United States of America as represented by the Secretary of the Navy
- Jeffrey C. Gremillion
- G01 - MEASURING TESTING
Information Patent Grant
Light wave interference length-measuring apparatus
- Patent number 4,948,254
- Issue date Aug 14, 1990
- Research Development Corporation of Japan
- Akira Ishida
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer system for making length or angle measurements
- Patent number 4,813,783
- Issue date Mar 21, 1989
- Carl-Zeiss-Stiftung
- Reimund Torge
- G01 - MEASURING TESTING
Information Patent Grant
System for obtaining displacement-amplitude information from a quad...
- Patent number 4,165,182
- Issue date Aug 21, 1979
- The United States of America as represented by the Department of Health, Educ...
- David H. R. Vilkomerson
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ASYMMETRY EXTENDED GRID MODEL FOR WAFER ALIGNMENT
- Publication number 20240168397
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Joshua ADAMS
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR MEASURING THICKNESS AND SURFACE PROFILE OF MULTILAYER...
- Publication number 20190101373
- Publication date Apr 4, 2019
- Young-Sik GHIM
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPHTHALMOLOGIC APPARATUS
- Publication number 20180279873
- Publication date Oct 4, 2018
- TOMEY CORPORATION
- Chihiro Kato
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD OF AIR REFRACTIVE INDEX CORRECTION FOR ABSOLUTE LONG DISTANC...
- Publication number 20180045500
- Publication date Feb 15, 2018
- ZHEJIANG SCI-TECH UNIVERSITY
- Benyong CHEN
- G01 - MEASURING TESTING
Information Patent Application
PRECISION SURFACE MEASUREMENT IN A VACUUM
- Publication number 20180017372
- Publication date Jan 18, 2018
- UChicago Argonne, LLC
- Raymond P. CONLEY
- G01 - MEASURING TESTING
Information Patent Application
Shape Measuring Device
- Publication number 20160153771
- Publication date Jun 2, 2016
- TOKYO SEIMITSU CO., LTD.
- Tomohiro Aoto
- G01 - MEASURING TESTING
Information Patent Application
ACCURATE CHIRPED SYNTHETIC WAVELENGTH INTERFEROMETER
- Publication number 20160123718
- Publication date May 5, 2016
- BRIDGER PHOTONICS, INC
- Peter ROOS
- G01 - MEASURING TESTING
Information Patent Application
OPHTHALMOLOGIC APPARATUS
- Publication number 20150320309
- Publication date Nov 12, 2015
- TOMEY CORPORATION
- Chihiro Kato
- G01 - MEASURING TESTING
Information Patent Application
Spectral filtering of k-clock signal in OCT system and method
- Publication number 20150184995
- Publication date Jul 2, 2015
- VOLCANO CORPORATION
- Brian Goldberg
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20140198307
- Publication date Jul 17, 2014
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
POSITION MONITORING SYSTEM WITH REDUCED NOISE
- Publication number 20140098375
- Publication date Apr 10, 2014
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Application
OPHTHALMOLOGIC APPARATUS
- Publication number 20120200827
- Publication date Aug 9, 2012
- Chihiro Kato
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
TWO-WAVELENGTH LASER INTERFEROMETER AND METHOD OF ADJUSTING OPTICAL...
- Publication number 20090310141
- Publication date Dec 17, 2009
- MITUTOYO CORPORATION
- Kaoru Miyata
- G01 - MEASURING TESTING
Information Patent Application
Data age adjustments
- Publication number 20020021449
- Publication date Feb 21, 2002
- Frank C. Demarest
- G01 - MEASURING TESTING

Active error reduction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for measuring thickness and surface profile of multilayer...

Precision surface measurement in a vacuum

Method of air refractive index correction for absolute long distanc...

Ophthalmologic apparatus for measuring position of measuring portio...

Interferometer system, lithography apparatus, and article manufactu...

Position monitoring system with reduced noise

Data age adjustments

Architecture for air-turbulence-compensated dual-wavelength heterod...

Interferometric apparatus for measuring a physical value

Apparatus and methods employing harmonic analysis for measuring the...

An interferometric measuring system having temperature compensation...

Interferametric measuring system with air turbulence compensation

Optical interferometric sensor detected intensity noise reduction m...

Light wave interference length-measuring apparatus

Interferometer system for making length or angle measurements

System for obtaining displacement-amplitude information from a quad...

Patents Applicationslast 30 patents

ASYMMETRY EXTENDED GRID MODEL FOR WAFER ALIGNMENT

APPARATUS FOR MEASURING THICKNESS AND SURFACE PROFILE OF MULTILAYER...

OPHTHALMOLOGIC APPARATUS

METHOD OF AIR REFRACTIVE INDEX CORRECTION FOR ABSOLUTE LONG DISTANC...

PRECISION SURFACE MEASUREMENT IN A VACUUM

Shape Measuring Device

ACCURATE CHIRPED SYNTHETIC WAVELENGTH INTERFEROMETER

OPHTHALMOLOGIC APPARATUS

Spectral filtering of k-clock signal in OCT system and method

INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...

POSITION MONITORING SYSTEM WITH REDUCED NOISE

OPHTHALMOLOGIC APPARATUS

TWO-WAVELENGTH LASER INTERFEROMETER AND METHOD OF ADJUSTING OPTICAL...

Data age adjustments