Instruments as specified in the subgroups and characterised by the use of optical measuring means

Industry

  • CPC
  • G01B9/00
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Sub Industries

G01B9/02Interferometers for determining dimensional properties of, or relations between, measurement objects G01B9/02001characterised by manipulating or generating specific radiation properties G01B9/02002Frequency variation G01B9/02003by using beat frequencies generated by mixing of two or more frequencies G01B9/02004by using a continuous frequency sweep or scan G01B9/02005by using discrete frequency stepping or switching G01B9/02007Two or more frequencies or sources used for interferometric measurement G01B9/02008by using a frequency comb G01B9/02009by using two or more low coherence lengths using different or varying spectral width G01B9/0201using temporal phase variation G01B9/02011using temporal polarization variation G01B9/02012using temporal intensity variation G01B9/02014by using pulsed light G01B9/02015characterised by a particular beam path configuration G01B9/02016contacting two or more objects G01B9/02017contacting one object several times G01B9/02018Multiple-pass interferometer G01B9/02019contacting different points on same face of object G01B9/02021contacting different faces of object G01B9/02022contacting one object by grazing incidence G01B9/02023Indirect probing of object G01B9/02024Measuring in transmission G01B9/02025Interference between three or more discrete surfaces G01B9/02027Two or more interferometric channels or interferometers G01B9/02028Two or more reference or object arms in one interferometer G01B9/02029Combination with non-interferometric systems G01B9/0203With imaging systems G01B9/02031With non-optical systems G01B9/02032generating a spatial carrier frequency G01B9/02034characterised by particularly shaped beams or wavefronts G01B9/02035Shaping the focal point G01B9/02036by using chromatic effects G01B9/02037by generating a transverse line focus G01B9/02038Shaping the wavefront G01B9/02039by matching the wavefront with a particular object surface shape G01B9/02041characterised by particular imaging or detection techniques G01B9/02042Confocal imaging G01B9/02043Imaging of the Fourier or pupil or back focal plane G01B9/02044Imaging in the frequency domain G01B9/02045using the Doppler effect G01B9/02047using digital holographic imaging G01B9/02048Rough and fine measurement G01B9/02049characterised by particular mechanical design details G01B9/0205of probe head G01B9/02051Integrated design G01B9/02052Protecting G01B9/02054Hand held G01B9/02055characterised by error reduction techniques G01B9/02056Passive error reduction, i.e. not varying during measurement G01B9/02057by using common path configuration G01B9/02058by particular optical compensation or alignment elements G01B9/02059Reducing effect of parasitic reflections G01B9/02061Reducing or preventing effect of tilt or misalignment G01B9/02062Active error reduction G01B9/02063by particular alignment of focus position G01B9/02064by particular adjustment of coherence gate G01B9/02065using a second interferometer before or after measuring interferometer G01B9/02067by electronic control systems G01B9/02068Auto-alignment of optical elements G01B9/02069Synchronization of light source or manipulator and detector G01B9/0207Error reduction by correction of the measurement signal based on independently determined error sources G01B9/02071by measuring path difference independently from interferometer G01B9/02072by calibration or testing of interferometer G01B9/02074of the detector G01B9/02075of particular errors G01B9/02076Caused by motion G01B9/02077of the object G01B9/02078Caused by ambiguity G01B9/02079Quadrature detection G01B9/02081simultaneous quadrature detection G01B9/02082Caused by speckles G01B9/02083characterised by particular signal processing and presentation G01B9/02084Processing in the Fourier or frequency domain when not imaged in the frequency domain G01B9/02085Combining two or more images of different regions G01B9/02087Combining two or more images of the same region G01B9/02088Matching signals with a database G01B9/02089Displaying the signal G01B9/0209Non-tomographic low coherence interferometers G01B9/02091Tomographic low coherence interferometers G01B9/02092Self-mixing interferometers G01B9/02094Speckle interferometers G01B9/02095detecting deformation from original shape G01B9/02096detecting a contour or curvature G01B9/02097Self-interferometers G01B9/02098shearing interferometers G01B9/021using holographic techniques G01B9/023for contour producing G01B9/025Double exposure technique G01B9/027in real time G01B9/029by time averaging G01B9/04Measuring microscopes G01B9/06Measuring telescopes G01B9/08Optical projection comparators G01B9/10Goniometers for measuring angles between surfaces