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Aligning or positioning in direction perpendicular to substrate surface
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G03F9/7023
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F9/00
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces
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G03F9/7023
Aligning or positioning in direction perpendicular to substrate surface
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last 30 patents
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Measurement apparatus, lithography apparatus, and article manufactu...
Patent number
12,339,595
Issue date
Jun 24, 2025
Canon Kabushiki Kaisha
Satoru Jimbo
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Combination of inline metrology and on tool metrology for advanced...
Patent number
12,326,667
Issue date
Jun 10, 2025
Applied Materials, Inc.
Ulrich Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method of wafer alignment using at resolution metrology on product...
Patent number
12,124,179
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method for calibrating alignment of wafer and lithography system
Patent number
11,854,854
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Jen Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
System and method for optimizing a lithography exposure process
Patent number
11,531,279
Issue date
Dec 20, 2022
Onto Innovation Inc.
Elvino da Silveira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Imprint apparatus and method of manufacturing article
Patent number
11,526,090
Issue date
Dec 13, 2022
Canon Kabushiki Kaisha
Ryosuke Tsutsumi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Grant
Exposure method and exposure apparatus
Patent number
11,500,299
Issue date
Nov 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Yao Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Position measurement apparatus, overlay inspection apparatus, posit...
Patent number
11,372,342
Issue date
Jun 28, 2022
Canon Kabushiki Kaisha
Toshiki Iwai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method of determining a height profile, a measurement system and a...
Patent number
11,137,695
Issue date
Oct 5, 2021
ASML Netherlands B.V.
Arend Johannes Donkerbroek
H01 - BASIC ELECTRIC ELEMENTS
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System and method for optimizing a lithography exposure process
Patent number
11,126,096
Issue date
Sep 21, 2021
Onto Innovation, Inc.
Elvino Da Silveira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic method
Patent number
11,029,610
Issue date
Jun 8, 2021
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method in which alignment control of a member and a substrate is ef...
Patent number
10,990,005
Issue date
Apr 27, 2021
Canon Kabushiki Kaisha
Shingo Okushima
B82 - NANO-TECHNOLOGY
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Lithographic method
Patent number
10,962,887
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Light-spot distribution structure, surface shape measurement method...
Patent number
10,915,030
Issue date
Feb 9, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Zhenhui Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Imager for lithographic reproduction
Patent number
10,908,504
Issue date
Feb 2, 2021
Optical Associates, Inc.
David Kessler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure method and exposure apparatus
Patent number
10,747,128
Issue date
Aug 18, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Yao Lee
H01 - BASIC ELECTRIC ELEMENTS
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Imprint method
Patent number
10,705,422
Issue date
Jul 7, 2020
Canon Kabushiki Kaisha
Yoshihiro Shiode
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Imprinting apparatus for producing a member in which a mold contact...
Patent number
10,670,961
Issue date
Jun 2, 2020
Canon Kabushiki Kaisha
Shingo Okushima
B82 - NANO-TECHNOLOGY
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Alignment system and method
Patent number
10,663,874
Issue date
May 26, 2020
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
Hamed Sadeghian Marnani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Metrology apparatus, method of measuring a structure, device manufa...
Patent number
10,599,048
Issue date
Mar 24, 2020
ASML Netherlands B.V.
Sergey Tarabrin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
10,481,508
Issue date
Nov 19, 2019
Canon Kabushiki Kaisha
Takanori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,241,426
Issue date
Mar 26, 2019
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
10,209,631
Issue date
Feb 19, 2019
Canon Kabushiki Kaisha
Takanori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Condensing point position detecting method
Patent number
10,183,359
Issue date
Jan 22, 2019
Disco Corporation
Joel Koerwer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Device and method for aligning substrates
Patent number
9,851,645
Issue date
Dec 26, 2017
EV Group E. Thallner GmbH
Thomas Wagenleitner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus and method of manufacturing article
Patent number
9,798,231
Issue date
Oct 24, 2017
Canon Kabushiki Kaisha
Yoshihiro Shiode
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Grant
Lithography apparatus, and article manufacturing method
Patent number
9,639,008
Issue date
May 2, 2017
Canon Kabushiki Kaisha
Yuichiro Morikuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask, exposure apparatus and device manufacturing method
Patent number
9,563,116
Issue date
Feb 7, 2017
Nikon Corporation
Yuichi Shibazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of aligning substrate-scale mask with substrate
Patent number
9,490,154
Issue date
Nov 8, 2016
Applied Materials, Inc.
Abraham Ravid
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position measurement apparatus and exposure apparatus which measure...
Patent number
9,400,437
Issue date
Jul 26, 2016
Canon Kabushiki Kaisha
Noritoshi Sakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
COMBINATION OF INLINE METROLOGY AND ON TOOL METROLOGY FOR ADVANCED...
Publication number
20240201605
Publication date
Jun 20, 2024
Applied Materials, Inc.
Ulrich MUELLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
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Publication number
20230185208
Publication date
Jun 15, 2023
Canon Kabushiki Kaisha
SATORU JIMBO
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
METHOD OF WAFER ALIGNMENT USING AT RESOLUTION METROLOGY ON PRODUCT...
Publication number
20230168594
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD AND DEVICE FOR DETERMINING AN ALIGNMENT OF A PHOTOMASK ON A...
Publication number
20230152089
Publication date
May 18, 2023
Carl Zeiss SMT GMBH
Christof Baur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
Publication number
20230076566
Publication date
Mar 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Yao LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230049521
Publication date
Feb 16, 2023
Canon Kabushiki Kaisha
Ryosuke Tsutsumi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Application
METHOD FOR CALIBRATING ALIGNMENT OF WAFER AND LITHOGRAPHY SYSTEM
Publication number
20230024673
Publication date
Jan 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chang-Jen CHEN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
TAG COORDINATE DETERMINATION METHOD AND APPARATUS, COMPUTER-READABL...
Publication number
20220146927
Publication date
May 12, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Jing LI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS
Publication number
20220075282
Publication date
Mar 10, 2022
Onto Innovation, Inc.
Elvino da Silveira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
POSITION MEASUREMENT APPARATUS, OVERLAY INSPECTION APPARATUS, POSIT...
Publication number
20210263432
Publication date
Aug 26, 2021
Canon Kabushiki Kaisha
Toshiki Iwai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
Publication number
20200379361
Publication date
Dec 3, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yung-Yao LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20200285159
Publication date
Sep 10, 2020
Canon Kabushiki Kaisha
Ryosuke Tsutsumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD IN WHICH ALIGNMENT CONTROL OF A MEMBER AND A SUBSTRATE IS EF...
Publication number
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Publication date
Jul 30, 2020
Canon Kabushiki Kaisha
Shingo Okushima
B82 - NANO-TECHNOLOGY
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Patent Application
SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS
Publication number
20200233320
Publication date
Jul 23, 2020
Onto Innovation, Inc.
Elvino DA SILVEIRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LITHOGRAPHIC METHOD
Publication number
20200081356
Publication date
Mar 12, 2020
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LENS CONTROL FOR LITHOGRAPHY TOOLS
Publication number
20190384183
Publication date
Dec 19, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Yueh Lin YANG
G02 - OPTICS
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Patent Application
POSITION DETECTION DEVICE, POSITION DETECTION METHOD, IMPRINT APPAR...
Publication number
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Publication date
Sep 12, 2019
Canon Kabushiki Kaisha
Satoshi Iino
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
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Publication date
May 16, 2019
Canon Kabushiki Kaisha
Takanori Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Publication number
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Publication date
May 2, 2019
ASML NETHERLANDS B.V.
Sergey Tarabrin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Publication number
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Publication date
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Arkema France
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Publication date
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Optical Associates, Inc.
David Kessler
G02 - OPTICS
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Publication date
Oct 18, 2018
Disco Corporation
Joel Koerwer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Publication date
Aug 16, 2018
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
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Nikon Corporation
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G02 - OPTICS
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Publication date
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Canon Kabushiki Kaisha
Yoshihiro SHIODE
B82 - NANO-TECHNOLOGY
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Publication number
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Publication date
Apr 27, 2017
Canon Kabushiki Kaisha
Shingo Okushima
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Publication number
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Publication date
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Canon Kabushiki Kaisha
Yuichiro MORIKUNI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
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Publication number
20130268225
Publication date
Oct 10, 2013
Canon Kabushiki Kaisha
Hiroshi OKUDA
G01 - MEASURING TESTING
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Patent Application
POSITION MEASUREMENT APPARATUS AND EXPOSURE APPARATUS WHICH MEASURE...
Publication number
20130120733
Publication date
May 16, 2013
Canon Kabushiki Kaisha
Noritoshi Sakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, A METH...
Publication number
20120268724
Publication date
Oct 25, 2012
Guido De Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY