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G03F9/7088
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Parent Industries
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F9/00
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces
Current Industry
G03F9/7088
Alignment mark detection
Industries
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer alignment using form birefringence of targets or product
Patent number
11,971,665
Issue date
Apr 30, 2024
ASML Holding N.V.
Joshua Adams
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic overlay correction and lithographic process
Patent number
11,966,170
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Ai-Jen Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement apparatus and a method for determining a substrate grid
Patent number
11,966,166
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for producing overlay results with absolute reference for se...
Patent number
11,966,171
Issue date
Apr 23, 2024
Tokyo Electron Limited
Anton J. deVilliers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Invariable magnification multilevel optical device with telecentric...
Patent number
11,960,216
Issue date
Apr 16, 2024
ASML Holding N.V.
Lev Ryzhikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Detection apparatus, lithography apparatus, and article manufacturi...
Patent number
11,934,098
Issue date
Mar 19, 2024
Canon Kabushiki Kaisha
Tomokazu Taki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment method and associated alignment and lithographic apparatuses
Patent number
11,927,892
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,914,308
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for and method of sensing alignment marks
Patent number
11,899,380
Issue date
Feb 13, 2024
ASML Holding N.V.
Krishanu Shome
G01 - MEASURING TESTING
Information
Patent Grant
Methods for forming alignment marks
Patent number
11,899,376
Issue date
Feb 13, 2024
Applied Materials, Inc.
Prayudi Lianto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Bonding alignment marks at bonding interface
Patent number
11,876,049
Issue date
Jan 16, 2024
Yangtze Memory Technologies Co., Ltd.
Meng Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment mark count acquiring method and device
Patent number
11,860,555
Issue date
Jan 2, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Heng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for calibrating alignment of wafer and lithography system
Patent number
11,854,854
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Jen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Display panel test method comprising the step of automatically sear...
Patent number
11,841,627
Issue date
Dec 12, 2023
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
Zanting Zeng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for and method of sensing alignment marks
Patent number
11,841,628
Issue date
Dec 12, 2023
ASML Holding N.V.
Krishanu Shome
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment sensor based on wavelength-scanning
Patent number
11,841,626
Issue date
Dec 12, 2023
ASML Holding N.V.
Muhsin Eralp
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay measuring apparatus
Patent number
11,829,078
Issue date
Nov 28, 2023
NANYA TECHNOLOGY CORPORATION
Chien-Hsien Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Detection apparatus, lithography apparatus, article manufacturing m...
Patent number
11,829,083
Issue date
Nov 28, 2023
Canon Kabushiki Kaisha
Tomokazu Taki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Embedded high-Z marker material and process for alignment of multil...
Patent number
11,823,864
Issue date
Nov 21, 2023
HRL Laboratories, LLC
Christopher Bohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology apparatus and a method of determining a characteristic of...
Patent number
11,822,254
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology device and phase modulator apparatus therefor comprising...
Patent number
11,815,675
Issue date
Nov 14, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment mark for front to back side alignment and lithography for...
Patent number
11,815,823
Issue date
Nov 14, 2023
Applied Materials, Inc.
Yongan Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase modulators in alignment to decrease mark size
Patent number
11,803,130
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for disposing substrate and method for manufacturing article
Patent number
11,774,850
Issue date
Oct 3, 2023
Canon Kabushiki Kaisha
Naoki Funabashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensor apparatus for lithographic measurements
Patent number
11,761,929
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Alessandro Polo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment method
Patent number
11,762,305
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Sergei Sokolov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic patterning device multichannel position and level gauge
Patent number
11,754,935
Issue date
Sep 12, 2023
ASML Holding N.V.
Yuli Vladimirsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing system, processing method, measurement apparatus, substr...
Patent number
11,726,412
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Overlay marks for reducing effect of bottom layer asymmetry
Patent number
11,726,413
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Chih Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus
Patent number
11,709,421
Issue date
Jul 25, 2023
Canon Kabushiki Kaisha
Ken-ichiro Shinoda
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
BUTTRESSED FIELD TARGET DESIGN FOR OPTICAL AND E-BEAM BASED METROLO...
Publication number
20240069447
Publication date
Feb 29, 2024
Intel Corporation
Deepak SELVANATHAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR FORMING ALIGNMENT MARKS
Publication number
20240069448
Publication date
Feb 29, 2024
Applied Materials, Inc.
Prayudi LIANTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETECTING COORDINATE OF MARK, COMPUTING SYSTEM FOR PERFO...
Publication number
20240061354
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
Seung Hak PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INVARIABLE MAGNIFICATION MULTILEVEL OPTICAL DEVICE WITH TELECENTRIC...
Publication number
20240053688
Publication date
Feb 15, 2024
ASML Holding N.V.
Lev Ryzhikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ANALYZING METHOD, ANALYSIS APPARATUS, MEASURING METHOD, MEASUREMENT...
Publication number
20240045348
Publication date
Feb 8, 2024
Nikon Corporation
Ayako SUGIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS
Publication number
20240036486
Publication date
Feb 1, 2024
Fuji Electric Co., Ltd.
Kazuhiro KITAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAS...
Publication number
20240036480
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Armand Eugene Albert KOOLEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20240027926
Publication date
Jan 25, 2024
Canon Kabushiki Kaisha
SHUN TODA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT SYSTEM AND METHOD FOR ALIGNING AN OBJECT HAVING AN ALIGNM...
Publication number
20240004321
Publication date
Jan 4, 2024
Nearfield Instruments B.V.
Hamed SADEGHIAN MARNANI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY SYSTEM AND LITHOGRAPHIC SYSTEM
Publication number
20230418168
Publication date
Dec 28, 2023
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASURING METHOD, MEASURING APPARATUS, LITHOGRAPHY APPARATUS, AND A...
Publication number
20230408249
Publication date
Dec 21, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AUTOMATED METROLOGY METHOD FOR LARGE DEVICES
Publication number
20230408928
Publication date
Dec 21, 2023
Applied Materials, Inc.
Yongan XU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus and a Method of Determining a Characteristic of...
Publication number
20230393490
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
OVERLAY MARKS FOR REDUCING EFFECT OF BOTTOM LAYER ASYMMETRY
Publication number
20230359135
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Chih Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
Publication number
20230359134
Publication date
Nov 9, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OFFSET ALIGNMENT METHOD AND MICRO-LITHOGRAPHIC PRINTING DEVICE
Publication number
20230341788
Publication date
Oct 26, 2023
Mycronic AB
Anders SVENSSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE M...
Publication number
20230341786
Publication date
Oct 26, 2023
Canon Kabushiki Kaisha
HIRONOBU FUJISHIMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, AND METHODS THEREOF
Publication number
20230341785
Publication date
Oct 26, 2023
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE CONTROL IN PHOTOLITHOGRAPHIC DIRECT EXPOSURE METHODS FOR M...
Publication number
20230333492
Publication date
Oct 19, 2023
Laser Imaging Systems GmbH
Christian SCHWARZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND INTENSITY IMBALANCE M...
Publication number
20230324817
Publication date
Oct 12, 2023
ASML Holding N.V.
Earl William EBERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LOW NUMERICAL APERTURE ALIGNMENT
Publication number
20230314967
Publication date
Oct 5, 2023
ONTO INNOVATION INC.
J. Casey Donaher
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUB-NANOSCALE HIGH-PRECISION LITHOGRAPHY WRITING FIELD STITCHING ME...
Publication number
20230296990
Publication date
Sep 21, 2023
Parcan Nanotech Co., Ltd.
Xiangqian ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Back Side to Front Side Alignment on a Semiconductor Wafer with Spe...
Publication number
20230296994
Publication date
Sep 21, 2023
INFINEON TECHNOLOGIES AG
Dirk Offenberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTUR...
Publication number
20230288823
Publication date
Sep 14, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OVERLAY MEASURING APPARATUS
Publication number
20230273530
Publication date
Aug 31, 2023
NANYA TECHNOLOGY CORPORATION
CHIEN-HSIEN LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION METHOD, DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND A...
Publication number
20230273016
Publication date
Aug 31, 2023
Canon Kabushiki Kaisha
MASAHARU KAJITANI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT APPARATUS, MEASUREMENT METHOD, LITHOGRAPHY APPARATUS AN...
Publication number
20230273011
Publication date
Aug 31, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20230266678
Publication date
Aug 24, 2023
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND APPARATUS FOR USE IN THE SPATIAL REGISTRATION OF OBJECTS
Publication number
20230252672
Publication date
Aug 10, 2023
University of Strathclyde
Michael Strain
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF DETERMINING POSITION OF MARK, LITHOGRAPHY METHOD, EXPOSUR...
Publication number
20230236520
Publication date
Jul 27, 2023
Canon Kabushiki Kaisha
RYOTA MAKINO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY