amorphous

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H01L21/02592

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02592amorphous

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of crystallizing amorphous silicon film and deposition appar...
- Patent number 12,112,947
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing gate spacers with stepped sidewalls by remo...
- Patent number 12,087,841
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Lun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing silicon film and film deposition apparatus
- Patent number 12,080,552
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crystallization process of oxide semiconductor, and method of manuf...
- Patent number 12,062,668
- Issue date Aug 13, 2024
- ADRC. CO. KR
- Soon Ho Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with conformal source/drain layer
- Patent number 12,057,495
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Sheng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device having polycrystalline silicon layer
- Patent number 12,058,888
- Issue date Aug 6, 2024
- Samsung Display Co., Ltd.
- Dong-Sung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crystalline semiconductor layer formed in BEOL processes
- Patent number 12,051,702
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Matthias Passlack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technologies for high aspect ratio carbon etching with inserted cha...
- Patent number 12,040,176
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device including annealing a...
- Patent number 11,996,291
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including a semiconductor fin comprising a sil...
- Patent number 11,978,632
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor memory device
- Patent number 11,978,807
- Issue date May 7, 2024
- Kioxia Corporation
- Akifumi Gawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device including polycrystalline silicon layer, method of m...
- Patent number 11,942,481
- Issue date Mar 26, 2024
- Samsung Display Co., Ltd.
- Dong-Sung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for forming a vertical thin-film transistor that serves as...
- Patent number 11,910,612
- Issue date Feb 20, 2024
- SUNRISE MEMORY CORPORATION
- Tianhong Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method for fabricating the semicond...
- Patent number 11,903,200
- Issue date Feb 13, 2024
- SK hynix Inc.
- Yu Jeong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,903,202
- Issue date Feb 13, 2024
- Kioxia Corporation
- Aki Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device having polycrystalline silicon layer
- Patent number 11,903,247
- Issue date Feb 13, 2024
- Samsung Display Co., Ltd.
- Dong-Sung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amorphous metal oxide semiconductor layer and semiconductor device
- Patent number 11,894,429
- Issue date Feb 6, 2024
- Nissan Chemical Industries, Ltd.
- Yoshiomi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming transition metal dichalcogenidethin film and meth...
- Patent number 11,887,849
- Issue date Jan 30, 2024
- Samsung Electronics Co., Ltd.
- Changhyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus and manufacturing method using the same
- Patent number 11,887,998
- Issue date Jan 30, 2024
- Samsung Display Co., Ltd.
- Soo Young Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting display device and manufacturing method thereof
- Patent number 11,871,617
- Issue date Jan 9, 2024
- Samsung Display Co., Ltd.
- Keun Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF substrate structure and method of production
- Patent number 11,848,191
- Issue date Dec 19, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Emmanuel Augendre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amorphization and regrowth of source-drain regions from the bottom-...
- Patent number 11,798,991
- Issue date Oct 24, 2023
- Intel Corporation
- Aaron Lilak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 11,799,012
- Issue date Oct 24, 2023
- United Microelectronics Corp.
- Chun-Chieh Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating thin, crystalline silicon film and thin film...
- Patent number 11,791,159
- Issue date Oct 17, 2023
- Ramesh kumar Harjivan Kakkad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical memory devices
- Patent number 11,778,826
- Issue date Oct 3, 2023
- Samsung Electronics Co., Ltd.
- Kohji Kanamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic devices comprising crystalline materials and related mem...
- Patent number 11,735,416
- Issue date Aug 22, 2023
- Micron Technology, Inc.
- Ashonita A. Chavan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,728,406
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 11,715,666
- Issue date Aug 1, 2023
- Samsung Electronics Co., Ltd.
- Dong-Hyun Im
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and forming method thereof
- Patent number 11,705,507
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Sheng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory cell comprising a transistor that comprises a pair of insula...
- Patent number 11,695,077
- Issue date Jul 4, 2023
- Micron Technology, Inc.
- Durai Vishak Nirmal Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD HEATED BY CIRCULAR ARRAY
- Publication number 20240408621
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Shashidhara Patel H B
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR...
- Publication number 20240395547
- Publication date Nov 28, 2024
- UNIVERSITY OF TSUKUBA
- Kaoru TOKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387190
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND STRUCTURES FOR REDUCING DEFORMATIONS OF GALLIUM NITRIDE...
- Publication number 20240363342
- Publication date Oct 31, 2024
- ROBERT BOSCH GmbH
- BO CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS COMPRISING CRYSTALLINE SEMICONDUCTOR MATERIALS AND METAL...
- Publication number 20240334676
- Publication date Oct 3, 2024
- Micron Technology, Inc.
- Jay S. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING APPARATUS COMPRISING CRYSTALLINE SEMICONDUCTOR M...
- Publication number 20240332015
- Publication date Oct 3, 2024
- Micron Technology, Inc.
- Protyush Sahu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
- Publication number 20240266184
- Publication date Aug 8, 2024
- NANYA TECHNOLOGY CORPORATION
- HSUAN-WU LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK AND SEMICONDUCTOR DEVICE COMPRISING THE SAME
- Publication number 20240231219
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Nam Jin CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...
- Publication number 20240222114
- Publication date Jul 4, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Claudia Fafard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING THE SEMICONDUCTOR MEMORY DEVICE
- Publication number 20240188298
- Publication date Jun 6, 2024
- SK HYNIX INC.
- Yu Jeong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...
- Publication number 20240179919
- Publication date May 30, 2024
- Sunrise Memory Corporation
- Tianhong Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDCUTOR STRUCTURES AND METHODS OF SEMICONDUCTOR STRUCTURE
- Publication number 20240128160
- Publication date Apr 18, 2024
- Semiconductor Manufacturing International (Shanghai) Corporation
- Zhaoxu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240128081
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING A TRENCH FORMED IN A SEMICONDUCTOR SUBSTRATE
- Publication number 20240096620
- Publication date Mar 21, 2024
- STMicroelectronics (Crolles 2) SAS
- Bilel Saidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH MOBILITY TRANSISTOR ELEMENT RESULTING FROM IGTO OXIDE SEMICOND...
- Publication number 20240088270
- Publication date Mar 14, 2024
- IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Jae Kyeong JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORM EPITAXIAL GROWTH OVER CRYSTALLINE TEMPLATE
- Publication number 20240088222
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Shawn THOMAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A III-N MATERIAL-BASED LAYER
- Publication number 20240038532
- Publication date Feb 1, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Matthew CHARLES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL MEMORY DEVICES
- Publication number 20240015968
- Publication date Jan 11, 2024
- Samsung Electronics Co., Ltd.
- Kohji KANAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AMORPHIZATION AND REGROWTH OF SOURCE-DRAIN REGIONS FROM THE BOTTOM-...
- Publication number 20240006489
- Publication date Jan 4, 2024
- Intel Corporation
- Aaron LILAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...
- Publication number 20230420253
- Publication date Dec 28, 2023
- Ramesh Kumar Harjivan Kakkad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...
- Publication number 20230420254
- Publication date Dec 28, 2023
- Ramesh Kumar Harjivan Kakkad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20230369502
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Yang Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVELY FORMING CRYSTALLINE BORON-DOPED SILICON GERMA...
- Publication number 20230352301
- Publication date Nov 2, 2023
- ASM IP HOLDING, B.V.
- Rami Khazaka
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor Device and Method
- Publication number 20230352563
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR AND MANUFACTURING METHOD FOR THIN FILM TRANSISTOR
- Publication number 20230335648
- Publication date Oct 19, 2023
- ADRC. CO. KR
- Jin JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH CONFORMAL SOURCE/DRAIN LAYER
- Publication number 20230327004
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Sheng HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNOLOGIES FOR HIGH ASPECT RATIO CARBON ETCHING WITH INSERTED CHA...
- Publication number 20230326737
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET MATERIAL AND OXIDE SEMICONDUCTOR
- Publication number 20230307549
- Publication date Sep 28, 2023
- Mitsui Mining and Smelting Co., Ltd.
- Kyosuke TERAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION FOR REDUCED HYDROGEN INCORPORATION IN AMORPHOUS SI...
- Publication number 20230298892
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-DIE FORMATION OF SINGLE-CRYSTAL SEMICONDUCTOR STRUCTURES
- Publication number 20230276635
- Publication date Aug 31, 2023
- Micron Technology, Inc.
- Jeffery Brandt Hull
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of crystallizing amorphous silicon film and deposition appar...

Method of manufacturing gate spacers with stepped sidewalls by remo...

Method of depositing silicon film and film deposition apparatus

Crystallization process of oxide semiconductor, and method of manuf...

Semiconductor device with conformal source/drain layer

Display device having polycrystalline silicon layer

Crystalline semiconductor layer formed in BEOL processes

Technologies for high aspect ratio carbon etching with inserted cha...

Method for manufacturing semiconductor device including annealing a...

Semiconductor device including a semiconductor fin comprising a sil...

Semiconductor device and semiconductor memory device

Display device including polycrystalline silicon layer, method of m...

Process for forming a vertical thin-film transistor that serves as...

Semiconductor memory device and method for fabricating the semicond...

Method of manufacturing semiconductor device

Display device having polycrystalline silicon layer

Amorphous metal oxide semiconductor layer and semiconductor device

Method of forming transition metal dichalcogenidethin film and meth...

Manufacturing apparatus and manufacturing method using the same

Light emitting display device and manufacturing method thereof

RF substrate structure and method of production

Amorphization and regrowth of source-drain regions from the bottom-...

Semiconductor device and method for fabricating the same

Method of fabricating thin, crystalline silicon film and thin film...

Vertical memory devices

Electronic devices comprising crystalline materials and related mem...

Semiconductor device and method

Method of fabricating semiconductor device

Semiconductor device and forming method thereof

Memory cell comprising a transistor that comprises a pair of insula...

Patents Applicationslast 30 patents

SHOWERHEAD HEATED BY CIRCULAR ARRAY

SEMICONDUCTOR APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR...

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

METHODS AND STRUCTURES FOR REDUCING DEFORMATIONS OF GALLIUM NITRIDE...

APPARATUS COMPRISING CRYSTALLINE SEMICONDUCTOR MATERIALS AND METAL...

METHODS OF FORMING APPARATUS COMPRISING CRYSTALLINE SEMICONDUCTOR M...

METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE

HARD MASK AND SEMICONDUCTOR DEVICE COMPRISING THE SAME

METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...

METHOD FOR FABRICATING THE SEMICONDUCTOR MEMORY DEVICE

VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...

SEMICONDCUTOR STRUCTURES AND METHODS OF SEMICONDUCTOR STRUCTURE

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD OF FILLING A TRENCH FORMED IN A SEMICONDUCTOR SUBSTRATE

HIGH MOBILITY TRANSISTOR ELEMENT RESULTING FROM IGTO OXIDE SEMICOND...

UNIFORM EPITAXIAL GROWTH OVER CRYSTALLINE TEMPLATE

METHOD FOR PRODUCING A III-N MATERIAL-BASED LAYER

VERTICAL MEMORY DEVICES

AMORPHIZATION AND REGROWTH OF SOURCE-DRAIN REGIONS FROM THE BOTTOM-...

Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...

Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...

SEMICONDUCTOR DEVICE AND METHOD

METHOD OF SELECTIVELY FORMING CRYSTALLINE BORON-DOPED SILICON GERMA...

Semiconductor Device and Method

THIN FILM TRANSISTOR AND MANUFACTURING METHOD FOR THIN FILM TRANSISTOR

SEMICONDUCTOR DEVICE WITH CONFORMAL SOURCE/DRAIN LAYER

TECHNOLOGIES FOR HIGH ASPECT RATIO CARBON ETCHING WITH INSERTED CHA...

SPUTTERING TARGET MATERIAL AND OXIDE SEMICONDUCTOR

ION IMPLANTATION FOR REDUCED HYDROGEN INCORPORATION IN AMORPHOUS SI...

ON-DIE FORMATION OF SINGLE-CRYSTAL SEMICONDUCTOR STRUCTURES