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Amplitude modulation, includes pulsing
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H01J37/32146
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/32146
Amplitude modulation, includes pulsing
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Patents Grants
last 30 patents
Information
Patent Grant
Adaptive pulse shaping with post match sensor
Patent number
12,362,146
Issue date
Jul 15, 2025
MKS Inc.
Jonathan Smyka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and substrate processing apparatus
Patent number
12,362,142
Issue date
Jul 15, 2025
Tokyo Electron Limited
Takashi Chiba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for OES data collection and endpoint detection
Patent number
12,362,158
Issue date
Jul 15, 2025
Tokyo Electron Limited
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High aspect ratio etch with infinite selectivity
Patent number
12,354,880
Issue date
Jul 8, 2025
Lam Research Corporation
Leonid Belau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, method, and apparatus for controlling ion energy distributi...
Patent number
12,354,836
Issue date
Jul 8, 2025
Advanced Energy Industries, Inc.
Victor Brouk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Determining an optimal ion energy for plasma processing of a dielec...
Patent number
12,347,662
Issue date
Jul 1, 2025
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V.
Qihao Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Directional selective deposition
Patent number
12,347,674
Issue date
Jul 1, 2025
Applied Materials, Inc.
Bhargav S. Citla
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma excitation with ion energy control
Patent number
12,347,647
Issue date
Jul 1, 2025
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
12,347,646
Issue date
Jul 1, 2025
Tokyo Electron Limited
Bongseong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma etching
Patent number
12,334,353
Issue date
Jun 17, 2025
SPTS Technologies Limited
Weikang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integration processes utilizing boron-doped silicon materials
Patent number
12,334,358
Issue date
Jun 17, 2025
Applied Materials, Inc.
Takehito Koshizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and methods for implementing a micro pulsing scheme using du...
Patent number
12,334,304
Issue date
Jun 17, 2025
Applied Materials, Inc.
A N M Wasekul Azad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-state RF pulsing to control mask shape and breaking selectivi...
Patent number
12,322,571
Issue date
Jun 3, 2025
Lam Research Corporation
Nikhil Dole
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsing assembly and power supply arrangement
Patent number
12,322,570
Issue date
Jun 3, 2025
TRUMPF Huettinger Sp. z o. o.
Andrzej Klimczak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for etching a semiconductor substrate in a pla...
Patent number
12,315,732
Issue date
May 27, 2025
Applied Materials, Inc.
Daisuke Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
12,315,698
Issue date
May 27, 2025
Tokyo Electron Limited
Cedric Thomas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Active switch on time control for bias supply
Patent number
12,308,210
Issue date
May 20, 2025
Advanced Energy Industries, Inc.
Maneesh Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical emission spectroscopy for advanced process characterization
Patent number
12,306,044
Issue date
May 20, 2025
Tokyo Electron Limited
Sergey Voronin
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for automated frequency tuning of radiofrequency...
Patent number
12,300,463
Issue date
May 13, 2025
Lam Research Corporation
Mathew Evans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma enhanced film formation method
Patent number
12,300,466
Issue date
May 13, 2025
Tokyo Electron Limited
Toshihiko Iwao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of uniformity control
Patent number
12,300,468
Issue date
May 13, 2025
Tokyo Electron Limited
Shyam Sridhar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
Patent number
12,283,461
Issue date
Apr 22, 2025
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for multi-level pulsing in RF plasma tools
Patent number
12,283,463
Issue date
Apr 22, 2025
Lam Research Corporation
Ying Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for metastable activated radical selective stri...
Patent number
12,272,570
Issue date
Apr 8, 2025
Lam Research Corporation
Dengliang Yang
B08 - CLEANING
Information
Patent Grant
Systems and methods for metastable activated radical selective stri...
Patent number
12,272,571
Issue date
Apr 8, 2025
Lam Research Corporation
Dengliang Yang
B08 - CLEANING
Information
Patent Grant
Plasma-enhanced atomic layer deposition with radio-frequency power...
Patent number
12,270,103
Issue date
Apr 8, 2025
Lam Research Corporation
Jeremy David Fields
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for using binning to increase power during a lo...
Patent number
12,266,505
Issue date
Apr 1, 2025
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
12,261,021
Issue date
Mar 25, 2025
Samsung Electronics Co., Ltd.
Hyun Bae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,261,020
Issue date
Mar 25, 2025
Tokyo Electron Limited
Takahiro Takeuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus to control ion energy
Patent number
12,255,048
Issue date
Mar 18, 2025
Advanced Energy Industries, Inc.
Victor Brouk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PULSING CONTROL MATCH NETWORK AND GENERATOR
Publication number
20250232955
Publication date
Jul 17, 2025
COMET TECHNOLOGIES USA, INC.
Stephen E. SAVAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAP-FILLING METHOD FOR A SEMICONDUCTOR DEVICE AND METHOD OF MANUFAC...
Publication number
20250233017
Publication date
Jul 17, 2025
WONIK IPS CO., LTD.
Chang Gyu SONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM
Publication number
20250232954
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Mitsuhiro IWANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS
Publication number
20250232957
Publication date
Jul 17, 2025
LAM RESEARCH CORPORATION
Ying Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS
Publication number
20250226182
Publication date
Jul 10, 2025
LAM RESEARCH CORPORATION
Ying Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM
Publication number
20250226181
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Mitsuhiro IWANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD
Publication number
20250210308
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS USING MICROWAVES
Publication number
20250210316
Publication date
Jun 26, 2025
SEMES CO., LTD.
Yoon Seok CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20250210328
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrode and Coil Configurations For Processing Chambers and Relat...
Publication number
20250210304
Publication date
Jun 26, 2025
Applied Materials, Inc.
Ala MORADIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENERGY REFEEDING MODULE, SWITCHING CIRCUIT AND EMBODIMENT, PLASMA P...
Publication number
20250210306
Publication date
Jun 26, 2025
TRUMPF Huettinger Sp. z o. o.
Andrzej KLIMCZAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST ATOMIC LAYER ETCH
Publication number
20250210363
Publication date
Jun 26, 2025
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION WITH RADIO-FREQUENCY POWER...
Publication number
20250197995
Publication date
Jun 19, 2025
LAM RESEARCH CORPORATION
Jeremy David Fields
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20250201520
Publication date
Jun 19, 2025
Samsung Electronics Co., Ltd.
Hyun Bae KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250191880
Publication date
Jun 12, 2025
TOKYO ELECTRON LIMITED
Yohei YAMAZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20250191881
Publication date
Jun 12, 2025
TOKYO ELECTRON LIMITED
Takahiro TAKEUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250183004
Publication date
Jun 5, 2025
Samsung Electronics Co., Ltd.
Hwasoo SEOK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATCH NETWORK WITH VARIABLE CAPACITANCE AND SWITCHABLE ARRAY OF SOL...
Publication number
20250183006
Publication date
Jun 5, 2025
Advanced Energy Industries, Inc.
Denis Shaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK
Publication number
20250183012
Publication date
Jun 5, 2025
TOKYO ELECTRON LIMITED
Takashi ARAMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM
Publication number
20250174434
Publication date
May 29, 2025
TOKYO ELECTRON LIMITED
Kota SHIHOMMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL DEVICE AND METHOD FOR ACTUATING AN IMPEDANCE MATCHING CIRCU...
Publication number
20250174437
Publication date
May 29, 2025
TRUMPF Hüttinger GmbH + Co. KG
Florian A. Maier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING A SUBSTRATE
Publication number
20250174433
Publication date
May 29, 2025
SAMSUNG ELECTRONICS CO,. LTD.
Donghyeon NA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING WITH PHASE-LOCKED WAVEFORMS
Publication number
20250166966
Publication date
May 22, 2025
TOKYO ELECTRON LIMITED
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING VARIABILITY IN FEATURES OF A SUBST...
Publication number
20250166967
Publication date
May 22, 2025
LAM RESEARCH CORPORATION
Sriharsha Jayanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUB-MILLISECOND OPTICAL DETECTION OF PULSED PLASMA PROCESSES
Publication number
20250157801
Publication date
May 15, 2025
TOKYO ELECTRON LIMITED
Francisco Machuca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20250149294
Publication date
May 8, 2025
Hitachi High-Tech Corporation
Juhyun NAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250149298
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Nozomu NAGASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING
Publication number
20250149295
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Alok Ranjan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20250149300
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Tangkuei WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STATE PULSING FOR ACHIEVING A BALANCE BETWEEN BOW CONTROL AND...
Publication number
20250140565
Publication date
May 1, 2025
LAM RESEARCH CORPORATION
Nikhil Dole
H01 - BASIC ELECTRIC ELEMENTS