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H01J2237/1215
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/1215
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Axially progressive lens for transporting charged particles
Patent number
11,791,149
Issue date
Oct 17, 2023
Agilent Technologies, Inc.
Tong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Particle beam system for adjusting the current of individual partic...
Patent number
11,562,880
Issue date
Jan 24, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens arrangement usable in particle-optical systems
Patent number
11,527,379
Issue date
Dec 13, 2022
Carl Zeiss Microscopy GmbH
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Objective lens arrangement usable in particle-optical systems
Patent number
10,622,184
Issue date
Apr 14, 2020
Carl Zeiss Microscopy GmbH
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
10,586,625
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multi-electrode electron optics
Patent number
9,905,322
Issue date
Feb 27, 2018
Mapper Lithography IP B.V.
Marco Jan-Jaco Wieland
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multi-electrode stack arrangement
Patent number
9,355,751
Issue date
May 31, 2016
Mapper Lithography IP B.V.
Willem Henk Urbanus
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multi-electrode cooling arrangement
Patent number
9,165,693
Issue date
Oct 20, 2015
Mapper Lithography IP B.V.
Willem Henk Urbanus
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Electronic optical lens barrel and production method therefor
Patent number
7,193,221
Issue date
Mar 20, 2007
Toudai TLO, Ltd.
Katsuya Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle-optical apparatus, electron microscopy system and electron...
Patent number
6,914,249
Issue date
Jul 5, 2005
Carl Zeiss NTS GmbH
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron optic column and scanning electron microscope
Patent number
5,399,860
Issue date
Mar 21, 1995
Kabushiki Kaisha Toshiba
Motosuke Miyoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and controlling method therefor
Patent number
5,293,508
Issue date
Mar 8, 1994
Mitsubishi Denki Kabushiki Kaisha
Shigeru Shiratake
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charged particle generating device and focusing lens therefor
Patent number
5,095,208
Issue date
Mar 10, 1992
Hitachi, Ltd.
Yoichi Ose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced path ion beam implanter
Patent number
5,091,655
Issue date
Feb 25, 1992
Eaton Corporation
Jerald P. Dykstra
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
Publication number
20240038521
Publication date
Feb 1, 2024
Agilent Technologies, Inc.
Tong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
Publication number
20220336199
Publication date
Oct 20, 2022
Agilent Technologies, Inc.
Tong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20210383941
Publication date
Dec 9, 2021
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...
Publication number
20210210303
Publication date
Jul 8, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
Publication number
20200243296
Publication date
Jul 30, 2020
CARL ZEISS MICROSCOPY GMBH
Rainer KNIPPELMEYER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20200194141
Publication date
Jun 18, 2020
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Particle-Optical Component
Publication number
20090159810
Publication date
Jun 25, 2009
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electronic optical lens barrel and production method therefor
Publication number
20050173649
Publication date
Aug 11, 2005
Katsuya Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Particle-optical apparatus, electron microscopy system and electron...
Publication number
20040105160
Publication date
Jun 3, 2004
LEO Elektronenmikroskopie GmbH
Oliver Kienzle
B82 - NANO-TECHNOLOGY