Apparatus for applying a liquid, a resin, an ink or the like

Industry

CPC
H01L21/6715

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of using liquid supply system with improved bubble venting c...
- Patent number 11,969,677
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Y. L. Huang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Photolithography method and photolithography system
- Patent number 11,959,864
- Issue date Apr 16, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chi-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrate and operating method thereof
- Patent number 11,938,493
- Issue date Mar 26, 2024
- Semes Co., Ltd.
- Noh Hoon Myoung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interlock apparatus for chemical supply system
- Patent number 11,935,769
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fang-Pin Chiang
- B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information Patent Grant
Substrate treating method
- Patent number 11,927,886
- Issue date Mar 12, 2024
- Semes Co., Ltd.
- Doo Young Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Development processing apparatus and development processing method
- Patent number 11,923,218
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Kouichirou Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,921,428
- Issue date Mar 5, 2024
- Kioxia Corporation
- Yoshihiro Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,923,209
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Hyunwoong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,915,930
- Issue date Feb 27, 2024
- SCREEN Holdings Co., Ltd.
- Naoko Arima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus and method of detecting liquid in liqui...
- Patent number 11,914,298
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization process, planarization system and method of manufactu...
- Patent number 11,908,711
- Issue date Feb 20, 2024
- Canon Kabushiki Kaisha
- Steven C. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,905,597
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Tetsuro Shirasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tilt and rotate dispenser having material flow rate control
- Patent number 11,904,337
- Issue date Feb 20, 2024
- Illinois Tool Works Inc.
- Ronald J. Forget
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film-forming device
- Patent number 11,891,692
- Issue date Feb 6, 2024
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for liquid dispense and coverage control
- Patent number 11,883,837
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Mirko Vukovic
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Additive process for circular printing of electronic devices
- Patent number 11,865,773
- Issue date Jan 9, 2024
- Texas Instruments Incorporated
- Daniel Lee Revier
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,862,486
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Kazuki Kosai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing system, behavior recognition device and...
- Patent number 11,860,607
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Ting Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle standby device, liquid processing apparatus and operation me...
- Patent number 11,862,485
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,862,474
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Taisei Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,860,542
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coater photoresist arm smart centering jig
- Patent number 11,852,983
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Heng-Wei Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 11,850,692
- Issue date Dec 26, 2023
- TAIWAN SEMICONDUCTORMANUFACTURING COMPANY LIMITED
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,848,189
- Issue date Dec 19, 2023
- Tokyo Electron Limited
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle apparatus, apparatus and method for treating substrate
- Patent number 11,845,090
- Issue date Dec 19, 2023
- Semes Co., Ltd.
- Chang Suk Oh
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,839,893
- Issue date Dec 12, 2023
- SCREEN Holdings Co., Ltd.
- Yosuke Yasutake
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist pump buffer tank and method of resist defect reduction
- Patent number 11,835,861
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen Yi Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 11,819,965
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,823,921
- Issue date Nov 21, 2023
- SCREEN Holdings Co., Ltd.
- Michinori Iwao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tilt and rotate dispenser having strain wave gear system
- Patent number 11,818,846
- Issue date Nov 14, 2023
- Illinois Tool Works Inc.
- Thomas C. Prentice
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM AND METHOD OF MANUFACTU...
- Publication number 20240145269
- Publication date May 2, 2024
- Canon Kabushiki Kaisha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240141501
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DISPENSING A LIQUID
- Publication number 20240136209
- Publication date Apr 25, 2024
- LAM RESEARCH AG
- Karl David HENRIKS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Making a Substrate with Improved...
- Publication number 20240136217
- Publication date Apr 25, 2024
- UTAC Headquarters Pte. Ltd.
- Hua Hong Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR AUTOMATED SYNTHESIS OF BIOCHIPS
- Publication number 20240118630
- Publication date Apr 11, 2024
- Centrillion Technology Holdings Corporation
- Bolan LI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ADDITIVE PROCESS FOR CIRCULAR PRINTING
- Publication number 20240109247
- Publication date Apr 4, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Daniel Lee Revier
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS
- Publication number 20240105496
- Publication date Mar 28, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND...
- Publication number 20240094705
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- KAI-TING YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20240082964
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SPIN COATER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USI...
- Publication number 20240071751
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Moosong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-FUNCTION DEVICE
- Publication number 20240071790
- Publication date Feb 29, 2024
- KULICKE AND SOFFA HI-TECH CO., LTD.
- Lu-Min Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD FOR CONTROLLING SUBSTRATE PROCE...
- Publication number 20240055281
- Publication date Feb 15, 2024
- SEMES CO., LTD.
- Sung Yong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20240047244
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Koki YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
- Publication number 20240047245
- Publication date Feb 8, 2024
- SCREEN Holdings Co., Ltd.
- Kana TAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Liquid Dispense and Coverage Control
- Publication number 20240042472
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Mirko VUKOVIC
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
UNIT FOR SUPPLYING CHEMICAL AND APPARATUS FOR TREATING SUBSTRATE WI...
- Publication number 20240047236
- Publication date Feb 8, 2024
- SEMES CO., LTD.
- Soo Han SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20240047237
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Koki YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...
- Publication number 20240030023
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSI...
- Publication number 20240018661
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Chun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240009697
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006205
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240006226
- Publication date Jan 4, 2024
- NGK Insulators, Ltd.
- Mitsuru KOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20240006201
- Publication date Jan 4, 2024
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
- Publication number 20230395380
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki NODA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20230395406
- Publication date Dec 7, 2023
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- G01 - MEASURING TESTING
Information Patent Application
RESIST PUMP BUFFER TANK AND METHOD OF RESIST DEFECT REDUCTION
- Publication number 20230393481
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen Yi HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230386855
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD FOR ALIGNING DIPOLES AND METHOD OF FABRICA...
- Publication number 20230386878
- Publication date Nov 30, 2023
- SAMSUNG DISPLAY CO., LTD.
- Won Ho LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESIVE DISPENSE UNIT
- Publication number 20230386869
- Publication date Nov 30, 2023
- NEXPERIA B.V.
- Erik ELTINK
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RESIST DISPENSING SYSTEM AND METHOD OF USE
- Publication number 20230367218
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Ching CHANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Apparatus for applying a liquid, a resin, an ink or the like

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of using liquid supply system with improved bubble venting c...

Photolithography method and photolithography system

Apparatus for processing substrate and operating method thereof

Interlock apparatus for chemical supply system

Substrate treating method

Development processing apparatus and development processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Liquid processing apparatus and method of detecting liquid in liqui...

Planarization process, planarization system and method of manufactu...

Substrate processing apparatus, substrate processing method and rec...

Tilt and rotate dispenser having material flow rate control

Film-forming device

System and method for liquid dispense and coverage control

Additive process for circular printing of electronic devices

Substrate liquid processing apparatus, substrate liquid processing...

Semiconductor manufacturing system, behavior recognition device and...

Nozzle standby device, liquid processing apparatus and operation me...

Substrate processing apparatus and substrate processing method

Liquid treatment apparatus and method of adjusting temperature of t...

Coater photoresist arm smart centering jig

Device maintenance in semiconductor manufacturing environment

Substrate processing method, recording medium and substrate process...

Nozzle apparatus, apparatus and method for treating substrate

Substrate processing apparatus

Resist pump buffer tank and method of resist defect reduction

Device maintenance in semiconductor manufacturing environment

Substrate processing device and substrate processing method

Tilt and rotate dispenser having strain wave gear system

Patents Applicationslast 30 patents

PLANARIZATION PROCESS, PLANARIZATION SYSTEM AND METHOD OF MANUFACTU...

SUBSTRATE PROCESSING METHOD

APPARATUS FOR DISPENSING A LIQUID

Semiconductor Device and Method of Making a Substrate with Improved...

SYSTEM FOR AUTOMATED SYNTHESIS OF BIOCHIPS

ADDITIVE PROCESS FOR CIRCULAR PRINTING

SUBSTRATE SUPPORTING APPARATUS

SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND...

DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT

SPIN COATER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USI...

MULTI-FUNCTION DEVICE

SUBSTRATE PROCESSING METHOD, METHOD FOR CONTROLLING SUBSTRATE PROCE...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE

System and Method for Liquid Dispense and Coverage Control

UNIT FOR SUPPLYING CHEMICAL AND APPARATUS FOR TREATING SUBSTRATE WI...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...

SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSI...

LIQUID PROCESSING APPARATUS

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

RESIST PUMP BUFFER TANK AND METHOD OF RESIST DEFECT REDUCTION

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR AND METHOD FOR ALIGNING DIPOLES AND METHOD OF FABRICA...

ADHESIVE DISPENSE UNIT

RESIST DISPENSING SYSTEM AND METHOD OF USE