Apparatus for assembling MEMS

Industry

CPC
B81C99/002

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C99/00Subject matter not provided for in other groups of this subclass

Current Industry

B81C99/002Apparatus for assembling MEMS

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and method for multi-object micro-assembly control with the...
- Patent number 12,020,399
- Issue date Jun 25, 2024
- Xerox Corporation
- Ion Matei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heterogeneous integration of components onto compact devices using...
- Patent number 12,009,247
- Issue date Jun 11, 2024
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-packing three-arm thermal scanning probe for micro-nano manufa...
- Patent number 11,970,392
- Issue date Apr 30, 2024
- Zhejiang University
- Huan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,926,524
- Issue date Mar 12, 2024
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of controlling the placement of micro-objects
- Patent number 11,891,299
- Issue date Feb 6, 2024
- Xerox Corporation
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mass transfer tool with high productivity
- Patent number 11,820,651
- Issue date Nov 21, 2023
- Apple Inc.
- Antoine Manens
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of controlling the placement of micro-objects on a micro-ass...
- Patent number 11,772,964
- Issue date Oct 3, 2023
- Xerox Corporation
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus for controlling the placement of micro-objects on a micro...
- Patent number 11,673,800
- Issue date Jun 13, 2023
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro pick up array and manufacturing method thereof
- Patent number 11,600,509
- Issue date Mar 7, 2023
- Au Optronics Corporation
- Ze-Yu Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor removing apparatus and operation method thereof
- Patent number 11,505,457
- Issue date Nov 22, 2022
- Xintec Inc.
- Yu-Tang Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of transferring micro device using micro device transfer head
- Patent number 11,495,485
- Issue date Nov 8, 2022
- Acer Incorporated
- Jui-Chieh Hsiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transparent material processing method, transparent material proces...
- Patent number 11,471,981
- Issue date Oct 18, 2022
- HIROSAKI UNIVERSITY
- Yasutaka Hanada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heterogeneous integration of components onto compact devices using...
- Patent number 11,469,131
- Issue date Oct 11, 2022
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mobile device for grasping and active release of objects
- Patent number 11,285,599
- Issue date Mar 29, 2022
- The Governing Council of the University of Toronto
- Eric Diller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multipass transfer surface for dynamic assembly
- Patent number 11,279,616
- Issue date Mar 22, 2022
- Palo Alto Research Center Incorporated
- Sourobh Raychaudhuri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of controlling the placement of micro-objects on a micro-ass...
- Patent number 11,242,244
- Issue date Feb 8, 2022
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of controlling the placement of micro-objects
- Patent number 11,203,525
- Issue date Dec 21, 2021
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System for manufacturing microneedle preparation, and air-condition...
- Patent number 11,130,148
- Issue date Sep 28, 2021
- Hisamitsu Pharmaceutical Co., Inc.
- Eiji Hashimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,066,296
- Issue date Jul 20, 2021
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Additive manufacturing processes and manufactured article
- Patent number 11,053,154
- Issue date Jul 6, 2021
- Corning Incorporated
- Xinghua Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for a transfer print between substrates
- Patent number 11,037,812
- Issue date Jun 15, 2021
- X-FAB SEMICONDUCTOR FOUNDRIES GMBH
- Ralf Lerner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro device transfer head
- Patent number 11,004,721
- Issue date May 11, 2021
- Acer Incorporated
- Jui-Chieh Hsiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System for transfer of nanomembrane elements with improved preserva...
- Patent number 10,857,773
- Issue date Dec 8, 2020
- Wisconsin Alumni Research Foundation
- Kevin Thomas Turner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for fast imprinting of nanometer scale features...
- Patent number 10,737,434
- Issue date Aug 11, 2020
- North Carolina State University
- Thomas A. Dow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectro-mechanical system device and method for electrostatic...
- Patent number 10,717,644
- Issue date Jul 21, 2020
- United Microeletronics Corp
- Linlin Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
- Patent number 10,605,824
- Issue date Mar 31, 2020
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transfer head and method for transferring micro devices
- Patent number 10,593,581
- Issue date Mar 17, 2020
- MIKRO MESA TECHNOLOGY CO., LTD.
- Li-Yi Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a microelectromechanical system d...
- Patent number 10,570,011
- Issue date Feb 25, 2020
- United States of America as represented by Secretary of the Navy
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing system and MEMS manufacturing method
- Patent number 10,538,429
- Issue date Jan 21, 2020
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MODEL-PREDICTIVE-CONTROL-BASED MICRO-ASSEMBLY...
- Publication number 20240338791
- Publication date Oct 10, 2024
- Xerox Corporation
- Ion Matei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING...
- Publication number 20240332056
- Publication date Oct 3, 2024
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Component for Manufacturing Micro- and/or Nanostructured Devices an...
- Publication number 20240228268
- Publication date Jul 11, 2024
- SUSS MicroTec Solutions GmbH & Co. KG
- Marco SARCLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND M...
- Publication number 20240182294
- Publication date Jun 6, 2024
- Kabushiki Kaisha Toshiba
- Hiroki HIRAGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED DICING DIE BONDING SHEET AND METHOD FOR PRODUCING SEMICO...
- Publication number 20240087941
- Publication date Mar 14, 2024
- Dow Toray Co., Ltd.
- Nohno TODA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-PACKING THREE-ARM THERMAL SCANNING PROBE FOR MICRO-NANO MANUFA...
- Publication number 20240002220
- Publication date Jan 4, 2024
- ZHEJIANG UNIVERSITY
- Huan HU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED INERTIAL SENSOR AND MET...
- Publication number 20230287555
- Publication date Sep 14, 2023
- Abdulilah Mayet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING...
- Publication number 20230042873
- Publication date Feb 9, 2023
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
- Publication number 20220340416
- Publication date Oct 27, 2022
- TOP TECHNOLOGY LTD
- Youngho LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20220332571
- Publication date Oct 20, 2022
- XINTEC INC.
- Yu-Tang SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND ARRANGEMENT FOR ASSEMBLY OF MICROCHIPS INTO A SEPARATE S...
- Publication number 20220324703
- Publication date Oct 13, 2022
- Federico RIBET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF CONTROLLING THE PLACEMENT OF MICRO-OBJECTS ON A MICRO-ASS...
- Publication number 20220153575
- Publication date May 19, 2022
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF CONTROLLING THE PLACEMENT OF MICRO-OBJECTS ON A MICRO-ASS...
- Publication number 20220153576
- Publication date May 19, 2022
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mass Transfer Tool with High Productivity
- Publication number 20220135400
- Publication date May 5, 2022
- Apple Inc.
- Antoine Manens
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF CONTROLLING THE PLACEMENT OF MICRO-OBJECTS
- Publication number 20220033257
- Publication date Feb 3, 2022
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADDITIVE MANUFACTURING PROCESSES AND MANUFACTURED ARTICLE
- Publication number 20210292216
- Publication date Sep 23, 2021
- Corning Incorporated
- Xinghua Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF TRANSFERRING MICRO DEVICE USING MICRO DEVICE TRANSFER HEAD
- Publication number 20210225686
- Publication date Jul 22, 2021
- ACER INCORPORATED
- Jui-Chieh Hsiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING...
- Publication number 20210134640
- Publication date May 6, 2021
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSPARENT MATERIAL PROCESSING METHOD, TRANSPARENT MATERIAL PROCES...
- Publication number 20210061650
- Publication date Mar 4, 2021
- HIROSAKI UNIVERSITY
- Yasutaka HANADA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Deposition Apparatus
- Publication number 20210005439
- Publication date Jan 7, 2021
- SPTS TECHNOLOGIES LIMITED
- Rhonda Hyndman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ASSEMBLER SYSTEM FOR MANIPULATING MICRO-OBJECTS
- Publication number 20200207617
- Publication date Jul 2, 2020
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ASSEMBLER SYSTEM FOR DIVIDING SETS OF MICRO-OBJECTS
- Publication number 20200207616
- Publication date Jul 2, 2020
- Palo Alto Research Center Incorporated
- Anne Plochowietz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIPASS TRANSFER SURFACE FOR DYNAMIC ASSEMBLY
- Publication number 20200102219
- Publication date Apr 2, 2020
- Palo Alto Research Center Incorporated
- SOUROBH RAYCHAUDHURI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and System for Fabricating a Microelectromechanical System D...
- Publication number 20200071161
- Publication date Mar 5, 2020
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three dimensional (3D) robotic micro electro mechanical systems (ME...
- Publication number 20200024128
- Publication date Jan 23, 2020
- Harold L. Stalford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR ETCHING A SUBSTRATE
- Publication number 20190359482
- Publication date Nov 28, 2019
- Institut National de la Sante et de la Recherche Medicale (INSERM)
- Jérôme BELOUGNE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-TRANSFER PRINTERS WITH ROLL STAMP(S)
- Publication number 20190300289
- Publication date Oct 3, 2019
- X-Celeprint Limited
- Ronald S. Cok
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSFER HEAD AND METHOD FOR TRANSFERRING MICRO DEVICES
- Publication number 20190267271
- Publication date Aug 29, 2019
- MIKRO MESA TECHNOLOGY CO., LTD.
- Li-Yi CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO PICK UP ARRAY AND MANUFACTURING METHOD THEREOF
- Publication number 20190115242
- Publication date Apr 18, 2019
- AU OPTRONICS CORPORATION
- Ze-Yu Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...
- Publication number 20190062157
- Publication date Feb 28, 2019
- Hitachi, Ltd
- Keiji WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Apparatus for assembling MEMS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for multi-object micro-assembly control with the...

Heterogeneous integration of components onto compact devices using...

Self-packing three-arm thermal scanning probe for micro-nano manufa...

Methods, apparatus, and systems for fabricating solution-based cond...

Method of controlling the placement of micro-objects

Mass transfer tool with high productivity

Method of controlling the placement of micro-objects on a micro-ass...

Apparatus for controlling the placement of micro-objects on a micro...

Micro pick up array and manufacturing method thereof

Semiconductor removing apparatus and operation method thereof

Method of transferring micro device using micro device transfer head

Transparent material processing method, transparent material proces...

Heterogeneous integration of components onto compact devices using...

Mobile device for grasping and active release of objects

Multipass transfer surface for dynamic assembly

Method of controlling the placement of micro-objects on a micro-ass...

Method of controlling the placement of micro-objects

System for manufacturing microneedle preparation, and air-condition...

Methods, apparatus, and systems for fabricating solution-based cond...

Additive manufacturing processes and manufactured article

Method for a transfer print between substrates

Micro device transfer head

System for transfer of nanomembrane elements with improved preserva...

Methods and systems for fast imprinting of nanometer scale features...

Microelectro-mechanical system device and method for electrostatic...

Micro-electro-mechanical-systems processing method, and micro-elect...

MEMS manufacturing method and MEMS manufacturing apparatus

Transfer head and method for transferring micro devices

Method and system for fabricating a microelectromechanical system d...

MEMS manufacturing system and MEMS manufacturing method

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MODEL-PREDICTIVE-CONTROL-BASED MICRO-ASSEMBLY...

HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING...

Component for Manufacturing Micro- and/or Nanostructured Devices an...

ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND M...

INTEGRATED DICING DIE BONDING SHEET AND METHOD FOR PRODUCING SEMICO...

SELF-PACKING THREE-ARM THERMAL SCANNING PROBE FOR MICRO-NANO MANUFA...

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED INERTIAL SENSOR AND MET...

HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING...

A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE

SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF

METHOD AND ARRANGEMENT FOR ASSEMBLY OF MICROCHIPS INTO A SEPARATE S...

METHOD OF CONTROLLING THE PLACEMENT OF MICRO-OBJECTS ON A MICRO-ASS...

METHOD OF CONTROLLING THE PLACEMENT OF MICRO-OBJECTS ON A MICRO-ASS...

Mass Transfer Tool with High Productivity

METHOD OF CONTROLLING THE PLACEMENT OF MICRO-OBJECTS

ADDITIVE MANUFACTURING PROCESSES AND MANUFACTURED ARTICLE

METHOD OF TRANSFERRING MICRO DEVICE USING MICRO DEVICE TRANSFER HEAD

HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING...

TRANSPARENT MATERIAL PROCESSING METHOD, TRANSPARENT MATERIAL PROCES...

Deposition Apparatus

MICRO-ASSEMBLER SYSTEM FOR MANIPULATING MICRO-OBJECTS

MICRO-ASSEMBLER SYSTEM FOR DIVIDING SETS OF MICRO-OBJECTS

MULTIPASS TRANSFER SURFACE FOR DYNAMIC ASSEMBLY

Method and System for Fabricating a Microelectromechanical System D...

Three dimensional (3D) robotic micro electro mechanical systems (ME...

METHOD AND APPARATUS FOR ETCHING A SUBSTRATE

MICRO-TRANSFER PRINTERS WITH ROLL STAMP(S)

TRANSFER HEAD AND METHOD FOR TRANSFERRING MICRO DEVICES

MICRO PICK UP ARRAY AND MANUFACTURING METHOD THEREOF

MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...