PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS

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Patents Grantslast 30 patents

Information Patent Grant
MEMS cavity with non-contaminating seal
- Patent number 12,187,606
- Issue date Jan 7, 2025
- SiTime Corporation
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing cell
- Patent number 12,192,722
- Issue date Jan 7, 2025
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic sensors with sensor die in package structure cavity
- Patent number 12,187,601
- Issue date Jan 7, 2025
- Texas Instruments Incorporated
- Barry Jon Male
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching gaps of unequal width
- Patent number 12,187,605
- Issue date Jan 7, 2025
- Murata Manufacturing Co., Ltd.
- Petteri Kilpinen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package and method of producing the sensor package
- Patent number 12,180,066
- Issue date Dec 31, 2024
- Sciosense B.V.
- Willem Frederik Adrianus Besling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 12,180,064
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-folding 3D film assemblies
- Patent number 12,180,068
- Issue date Dec 31, 2024
- 3M Innovative Properties Company
- Jia Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pizoelectric MEMS device with electrodes having low surface roughness
- Patent number 12,185,631
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatuses for packaging an ultrasound-on-a-chip
- Patent number 12,178,648
- Issue date Dec 31, 2024
- BFLY OPERATIONS, INC.
- Keith G. Fife
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing package structure including sound producing membran...
- Patent number 12,172,887
- Issue date Dec 24, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction enhancement of ruthenium contact
- Patent number 12,172,888
- Issue date Dec 24, 2024
- Qorvo US, Inc.
- James D. Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with compensation of residual voltage
- Patent number 12,174,215
- Issue date Dec 24, 2024
- Invensense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...
- Patent number 12,172,886
- Issue date Dec 24, 2024
- UPBEAT TECHNOLOGY CO., LTD
- Hsien-Lung Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterned structured transfer tape
- Patent number 12,172,417
- Issue date Dec 24, 2024
- 3M Innovative Properties Company
- Martin B. Wolk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing fine structures in the volume of a substrate c...
- Patent number 12,172,157
- Issue date Dec 24, 2024
- Schott AG
- Andreas Ortner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Manufacture of surface relief structures
- Patent number 12,169,359
- Issue date Dec 17, 2024
- Snap Inc.
- Ian Sturland
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic post complementary metal-oxide-semiconductor integration...
- Patent number 12,168,603
- Issue date Dec 17, 2024
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-nano incremental mechanical surface treatment method
- Patent number 12,168,604
- Issue date Dec 17, 2024
- Nanjing University of Aeronautics and Astronautics
- Hongyu Wei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an electroacoustic transducer
- Patent number 12,168,602
- Issue date Dec 17, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loïc Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and a method of manufacturing the same
- Patent number 12,168,605
- Issue date Dec 17, 2024
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang Hsiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enclosed cavity structures
- Patent number 12,162,747
- Issue date Dec 10, 2024
- X-CELEPRINT LIMITED
- Ronald S. Cok
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device having a capacitor se...
- Patent number 12,163,851
- Issue date Dec 10, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical microsystem
- Patent number 12,162,748
- Issue date Dec 10, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Laurent Mollard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bond wave optimization method and device
- Patent number 12,162,749
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kang-Yi Lien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
- Patent number 12,157,665
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ADDITIVE MANUFACTURING USING BONDING OF VOXELS AND RELATED SYSTEMS,...
- Publication number 20250011166
- Publication date Jan 9, 2025
- Massachusetts Institute of Technology
- Alain Stefan Reiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING A MICROELECTRONICS H-FRAME DEVICE
- Publication number 20250011160
- Publication date Jan 9, 2025
- Northrop Grumman Systems Corporation
- Dah-Weih Duan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250011165
- Publication date Jan 9, 2025
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE
- Publication number 20250016509
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
- Publication number 20250002331
- Publication date Jan 2, 2025
- NXP USA, Inc.
- Mostafa Soliman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CREATING SURFACE MICROSTRUCTURES
- Publication number 20250004183
- Publication date Jan 2, 2025
- ROLIC Technologies AG
- Martin URBANSKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOLD UNIT FOR MANUFACTURING MICROSTRUCTURES
- Publication number 20250001651
- Publication date Jan 2, 2025
- IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Yong Hee KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...
- Publication number 20250002332
- Publication date Jan 2, 2025
- STMicroelectronics International N.V.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONICS PACKAGE WITH VERTICALLY STACKED MEMS DEVICE AND CO...
- Publication number 20250002330
- Publication date Jan 2, 2025
- Qorvo US, Inc.
- Julio C. Costa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
- Publication number 20250002333
- Publication date Jan 2, 2025
- STMicroelectronics International N.V.
- Eric SAUGIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
- Publication number 20240425367
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR FABRICATING MEMS HAVI...
- Publication number 20240425366
- Publication date Dec 26, 2024
- United Microelectronics Corp.
- Jung-Hao CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
- Publication number 20240425364
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240417240
- Publication date Dec 19, 2024
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon CHO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240416385
- Publication date Dec 19, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PRESSURE DIAPHRAGMS
- Publication number 20240417243
- Publication date Dec 19, 2024
- Edwards Lifesciences Corporation
- Alexander H. Siemons
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240418510
- Publication date Dec 19, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED...
- Publication number 20240418915
- Publication date Dec 19, 2024
- Magic Leap, Inc.
- Mauro Melli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK
- Publication number 20240417242
- Publication date Dec 19, 2024
- Calient.AI Inc.
- Scott A. MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCLOSURE
- Publication number 20240417244
- Publication date Dec 19, 2024
- SCHOTT AG
- Jens Ulrich Thomas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESS FOR MANUFACTURING A THREE-DIMENSIONAL STRUCTURE IN BENDING
- Publication number 20240411057
- Publication date Dec 12, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Raphaël FEOUGIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
- Publication number 20240409398
- Publication date Dec 12, 2024
- Murata Manufacturing Co., Ltd.
- Konsta HANNULA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System And Method For Generating Fluid Flow
- Publication number 20240409399
- Publication date Dec 12, 2024
- Sonicedge Ltd.
- Mordehai Margalit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20240409395
- Publication date Dec 12, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Chung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
- Publication number 20240409397
- Publication date Dec 12, 2024
- Menlo Microsystems, Inc.
- Christopher F. Keimel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

MEMS cavity with non-contaminating seal

Sound producing cell

Electronic sensors with sensor die in package structure cavity

Method for manufacturing semiconductor substrate, method for manufa...

Optical device production method

Method for etching gaps of unequal width

Sensor package and method of producing the sensor package

Curved cantilever design to reduce stress in MEMS actuator

Self-folding 3D film assemblies

Microelectromechanical system and process of making it

Method and system for fabricating a MEMS device

Pizoelectric MEMS device with electrodes having low surface roughness

Methods and apparatuses for packaging an ultrasound-on-a-chip

Sound producing package structure including sound producing membran...

Anti-stiction enhancement of ruthenium contact

MEMS sensor with compensation of residual voltage

Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...

Patterned structured transfer tape

Method for producing fine structures in the volume of a substrate c...

Manufacture of surface relief structures

Monolithic post complementary metal-oxide-semiconductor integration...

Micro-nano incremental mechanical surface treatment method

Method for manufacturing an electroacoustic transducer

Semiconductor device package and a method of manufacturing the same

Enclosed cavity structures

Micromechanical component for a sensor device having a capacitor se...

Electromechanical microsystem

Bond wave optimization method and device

Process for producing a base of an analysis cell for analyzing a bi...

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

Patents Applicationslast 30 patents

ADDITIVE MANUFACTURING USING BONDING OF VOXELS AND RELATED SYSTEMS,...

METHOD FOR FABRICATING A MICROELECTRONICS H-FRAME DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

METHOD FOR CREATING SURFACE MICROSTRUCTURES

MOLD UNIT FOR MANUFACTURING MICROSTRUCTURES

MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...

MICROELECTRONICS PACKAGE WITH VERTICALLY STACKED MEMS DEVICE AND CO...

WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME

FORMING A PASSIVATION COATING FOR MEMS DEVICES

DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR FABRICATING MEMS HAVI...

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...

INTEGRATED PRESSURE DIAPHRAGMS

INERTIAL SENSOR AND METHOD FOR FORMING THE SAME

METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED...

METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

ENCLOSURE

PROCESS FOR MANUFACTURING A THREE-DIMENSIONAL STRUCTURE IN BENDING

MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...

System And Method For Generating Fluid Flow

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER