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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Patents Grants
last 30 patents
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer comprising a lobe...
Patent number
12,251,729
Issue date
Mar 18, 2025
STMicroelectronics S.r.l.
Domenico Giusti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, liquid ejecting head, and liquid ejecting apparatus
Patent number
12,251,936
Issue date
Mar 18, 2025
Seiko Epson Corporation
Motoki Takabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonance device and resonance device manufacturing method
Patent number
12,252,393
Issue date
Mar 18, 2025
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Circuits and methods to calibrate mirror displacement
Patent number
12,253,356
Issue date
Mar 18, 2025
Texas Instruments Incorporated
Robert Floyd Payne
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-level microelectromechanical system structure with non-photod...
Patent number
12,252,396
Issue date
Mar 18, 2025
Texas Instruments Incorporated
Christopher Murray Beard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Parasitic insensitive sampling in sensors
Patent number
12,253,426
Issue date
Mar 18, 2025
Murata Manufacturing Co., Ltd.
Vishnu Srinivasan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS-driven optical package with micro-LED array
Patent number
12,253,715
Issue date
Mar 18, 2025
Matthew E. Ward
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for sensor configuration
Patent number
12,252,395
Issue date
Mar 18, 2025
Vamshi Gangumalla
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component for a sensor device
Patent number
12,252,394
Issue date
Mar 18, 2025
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Temperature dependent calibration of movement detection devices
Patent number
12,247,846
Issue date
Mar 11, 2025
Magic Leap, Inc.
Cuthbert Martindale Allen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing variable radio frequency micro-electromech...
Patent number
12,249,468
Issue date
Mar 11, 2025
Universite de Limoges
Romain Stefanini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon carbide nanoneedles and fabrication thereof
Patent number
12,246,155
Issue date
Mar 11, 2025
Lawrence Livermore National Security, LLC
Clint D. Frye
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS capacitance microphone and manufacturing method thereof
Patent number
12,250,519
Issue date
Mar 11, 2025
Qsensing Microelectronics Co., Ltd
Chien-Hsing Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and systems for transmission and detection of free radicals
Patent number
12,247,920
Issue date
Mar 11, 2025
Wisconsin Alumni Research Foundation
J. Leon Shohet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Managing trench depth in integrated systems
Patent number
12,249,540
Issue date
Mar 11, 2025
Ciena Corporation
Benoît Filion
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Particle extraction apparatus and particle extraction method
Patent number
12,240,747
Issue date
Mar 4, 2025
Sony Group Corporation
Tatsuo Shimizu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, assembly comprising the MEMS device, and methods for o...
Patent number
12,240,749
Issue date
Mar 4, 2025
Bert Kaiser
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package substrate, sensor module having the same, and sensor...
Patent number
12,240,751
Issue date
Mar 4, 2025
TDK Corporation
Kazutoshi Tsuyutani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a sequencing unit for sequencing a biochemical...
Patent number
12,240,752
Issue date
Mar 4, 2025
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical device having a soft magnetic material elec...
Patent number
12,240,753
Issue date
Mar 4, 2025
International Business Machines Corporation
William J. Gallagher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS die and MEMS-based sensor
Patent number
12,240,748
Issue date
Mar 4, 2025
Knowles Electronics, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tiles having multiple cooling cells for MEMS-based cooling
Patent number
12,240,750
Issue date
Mar 4, 2025
Frore Systems Inc.
Suryaprakash Ganti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical shock resistant MEMS accelerometer arrangement, associat...
Patent number
12,241,909
Issue date
Mar 4, 2025
Merlin Technology, Inc.
Albert W. Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic passage with protective layer
Patent number
12,240,239
Issue date
Mar 4, 2025
Hewlett-Packard Development Company, L.P.
Juan Carlos Ramos
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS mirror system with slow light beam deflection using fast reson...
Patent number
12,235,439
Issue date
Feb 25, 2025
Infineon Technologies AG
Boris Kirillov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Top notch slit profile for MEMS device
Patent number
12,238,478
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for wafer bonding
Patent number
12,234,145
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Wei Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system component or a microfluidic component...
Patent number
12,234,143
Issue date
Feb 25, 2025
Berkin B.V.
Wouter Sparreboom
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS speaker and manufacturing method for same
Patent number
12,238,479
Issue date
Feb 25, 2025
AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
Shiyang Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
Patent number
12,234,141
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
EXTREMAL MICROSTRUCTURED SURFACES
Publication number
20250091856
Publication date
Mar 20, 2025
Lukas Bluecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMORY DEVICES INCLUDING PAD STRUCTURES
Publication number
20250098159
Publication date
Mar 20, 2025
Micron Technology, Inc.
Erwin E. Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
Publication number
20250093212
Publication date
Mar 20, 2025
Centre National de la Recherche Scientifique
Olivier BOURGEOIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
Publication number
20250091857
Publication date
Mar 20, 2025
TEXAS INSTRUMENTS INCORPORATED
Adam Joseph Fruehling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE WITH HOLLOW STRUCTURE AND METHOD FOR ASSEMBLING SENS...
Publication number
20250091859
Publication date
Mar 20, 2025
Carrier Corporation
Jacob Kerling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLUIDIC FLOW CHANNEL OVER ACTIVE SURFACE OF A DIE
Publication number
20250096050
Publication date
Mar 20, 2025
Illumina, Inc.
Arvin Emadi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...
Publication number
20250091313
Publication date
Mar 20, 2025
Illumina, Inc.
M. Shane Bowen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
Publication number
20250091858
Publication date
Mar 20, 2025
INFINEON TECHNOLOGIES AG
Theresa LUTZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOUND SENSOR AND MANUFACTURING METHOD
Publication number
20250091860
Publication date
Mar 20, 2025
Panasonic Intellectual Property Management Co., Ltd.
Hiroki SAKAMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LASER MICROMACHINING OF MEMS RESONATORS FROM BULK OPTICALLY TRANSPA...
Publication number
20250091861
Publication date
Mar 20, 2025
The Regents of the University of California
Daryosh VATANPARVAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...
Publication number
20250085175
Publication date
Mar 13, 2025
Beijing BOE Technology Development Co., Ltd.
Kui LIANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMAGE CAPTURE AT VARYING OPTICAL POWERS
Publication number
20250085514
Publication date
Mar 13, 2025
Meta Platforms Technologies, LLC
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR
Publication number
20250083950
Publication date
Mar 13, 2025
Kabushiki Kaisha Toshiba
Hiroaki YAMAZAKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
Publication number
20250083948
Publication date
Mar 13, 2025
ROBERT BOSCH GmbH
Andreas Winden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE
Publication number
20250083947
Publication date
Mar 13, 2025
ROBERT BOSCH GmbH
Jochen REINMUTH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VARIABLE INDUCTOR AND INDUCTOR MODULE
Publication number
20250087401
Publication date
Mar 13, 2025
DB HiTek Co., Ltd.
Jung Ah KIM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
Publication number
20250083949
Publication date
Mar 13, 2025
MEMS DRIVE (NANJING) CO., LTD.
Matthew Ng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...
Publication number
20250083951
Publication date
Mar 13, 2025
STMicroelectronics International N.V.
Andrea NOMELLINI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR WITH INTEGRATED FLUID CAVITY
Publication number
20250085179
Publication date
Mar 13, 2025
Apple Inc.
Michael J. GLICKMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
Publication number
20250074763
Publication date
Mar 6, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20250074766
Publication date
Mar 6, 2025
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Humidity Sensor, Manufacturing Method Therefor and Electronic Device
Publication number
20250076241
Publication date
Mar 6, 2025
BOE TECHNOLOGY GROUP CO., LTD.
Jianxing LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIFFERENTIAL MEASUREMENT OF IR ABSORPTION IN PLASMONIC MEMS SENSORS
Publication number
20250076190
Publication date
Mar 6, 2025
TEXAS INSTRUMENTS INCORPORATED
Jeronimo Segovia Fernandez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20250074764
Publication date
Mar 6, 2025
Beijing BOE Technology Development Co., Ltd.
Wenbo LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH RELIABILITY SENSOR
Publication number
20250074765
Publication date
Mar 6, 2025
TEXAS INSTRUMENTS INCORPORATED
Daiki Komatsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSING ELEMENT AND RELATED METHODS
Publication number
20250076135
Publication date
Mar 6, 2025
GENERAL ELECTRIC COMPANY
Robert James MacDonald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME
Publication number
20250074762
Publication date
Mar 6, 2025
USound GmbH
Andrea Rusconi Clerici Beltrami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIRTUAL VALVE IN A MEMS-BASED COOLING SYSTEM
Publication number
20250075825
Publication date
Mar 6, 2025
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20250079385
Publication date
Mar 6, 2025
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Liang Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS GRATING AND FABRICATION METHOD
Publication number
20250066188
Publication date
Feb 27, 2025
Northwestern Polytechnical University
Yongqian Li
B81 - MICRO-STRUCTURAL TECHNOLOGY