Apparatus for fluid treatment

Industry

CPC
H01L21/67017

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67017Apparatus for fluid treatment

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,365,987
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, processing method, and non-transito...
- Patent number 12,368,043
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer treatment device
- Patent number 12,368,058
- Issue date Jul 22, 2025
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced closed loop gas based heat exchange
- Patent number 12,368,057
- Issue date Jul 22, 2025
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 12,362,179
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Hung Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supercritical fluid processing apparatus and substrate processing s...
- Patent number 12,362,200
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Seohyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cup, liquid processing apparatus, and liquid processing method
- Patent number 12,358,016
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Ryunosuke Higashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Interface tool and methods of operation
- Patent number 12,362,198
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Syuan Cai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 12,354,887
- Issue date Jul 8, 2025
- Kokusai Electric Corporation
- Gen Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for removing bipolar element
- Patent number 12,354,888
- Issue date Jul 8, 2025
- Samsung Display Co., Ltd.
- Jin Yool Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, reco...
- Patent number 12,354,868
- Issue date Jul 8, 2025
- Kokusai Electric Corporation
- Yuma Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filter device, purification device, chemical solution production me...
- Patent number 12,343,681
- Issue date Jul 1, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Filter apparatus for semiconductor device fabrication process
- Patent number 12,343,684
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chwen Yu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,347,698
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Koki Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer
- Patent number 12,349,245
- Issue date Jul 1, 2025
- Lintec Co., Ltd.
- Hirofumi Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detecting the presence of deposits in fluid...
- Patent number 12,347,703
- Issue date Jul 1, 2025
- Watlow Electric Manufacturing Company
- Miranda P. Pizzella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 12,341,000
- Issue date Jun 24, 2025
- Kokusai Electric Corporation
- Masanori Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resin shaping device
- Patent number 12,341,036
- Issue date Jun 24, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid preparation device, and substrate processing device
- Patent number 12,337,289
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical dispensing system
- Patent number 12,341,026
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust piping for a semiconductor processing tool
- Patent number 12,334,365
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Sheng Lien
- B08 - CLEANING
Information Patent Grant
Purge controlling system
- Patent number 12,334,363
- Issue date Jun 17, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Chen-Wei Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,331,402
- Issue date Jun 17, 2025
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Systems and methods for controlling precursor delivery
- Patent number 12,334,364
- Issue date Jun 17, 2025
- Entegris, Inc.
- Michael Watson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust device, processing apparatus, and exhausting method
- Patent number 12,322,578
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing liquid supply apparatus and method of removing solids fr...
- Patent number 12,322,610
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Mu Hyeon Lee
- B08 - CLEANING
Information Patent Grant
Bubble measurement unit, substrate treating apparatus including the...
- Patent number 12,320,735
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Jung Suk Goh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High purity ethylenediamine for semiconductor applications
- Patent number 12,319,637
- Issue date Jun 3, 2025
- VERSUM MATERIALS US, LLC
- Hareesh Thridandam
- B08 - CLEANING
Information Patent Grant
Exhaust assembly, and liquid processing apparatus and substrate pro...
- Patent number 12,318,819
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Kyung Min Kim
- B08 - CLEANING
Information Patent Grant
Methods of installing a purge fluid conditioning element into a sem...
- Patent number 12,315,749
- Issue date May 27, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WET PROCESS AIR ABATEMENT SYSTEM AND METHOD
- Publication number 20250235815
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Chih-Ming Tsao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
HIGH-PRESSURE SUBSTRATE PROCESSING APPARATUS AND PROCESSING GAS LIN...
- Publication number 20250239464
- Publication date Jul 24, 2025
- HPSP Co., Ltd.
- Kunyoung LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK DEVICE
- Publication number 20250239465
- Publication date Jul 24, 2025
- Canon ANELVA Corporation
- Jun MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THE...
- Publication number 20250236949
- Publication date Jul 24, 2025
- HPSP Co., Ltd.
- Hye Seong YOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20250232966
- Publication date Jul 17, 2025
- Hitachi High-Tech Corporation
- Yutaka KADOMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...
- Publication number 20250223694
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Tomoya ONITSUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BOX AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250226239
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Masami SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218743
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20250218804
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Makoto HIRANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20250218809
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Mi So PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
- Publication number 20250218802
- Publication date Jul 3, 2025
- TOKYO ELECTRON LIMITED
- Keiichi YAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLUDING COVER MODULE
- Publication number 20250218823
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Sung Gyu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD FOR EXHAUST GAS TREATMENT FACILITY
- Publication number 20250214119
- Publication date Jul 3, 2025
- KURITA WATER INDUSTRIES LTD.
- Shingo Harashima
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TRANSFER CHAMBERS, ASSOCIATED SEMICONDUCTOR PROCESSING SYSTEMS, AND...
- Publication number 20250218803
- Publication date Jul 3, 2025
- ASM IP HOLDING B.V.
- Coral Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR REACTOR FOR SUBSTRATE PROCESSING
- Publication number 20250210377
- Publication date Jun 26, 2025
- Mitch Hoerner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DYNAMIC LOADLOCK PRESSURE CONTROL
- Publication number 20250210378
- Publication date Jun 26, 2025
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20250210394
- Publication date Jun 26, 2025
- NGK Insulators, Ltd.
- Masaki ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210383
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Taehee YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250207697
- Publication date Jun 26, 2025
- Jusung Engineering Co., Ltd.
- Ji Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCULATION APPARATUS AND METHOD OF CONTROLLING CIRCULATION APPARATUS
- Publication number 20250198521
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Michinori IWAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250201584
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250201585
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20250201586
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...
- Publication number 20250197993
- Publication date Jun 19, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiaobin SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBS...
- Publication number 20250201595
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Kazuhiko FUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID SUPPLY DEVICE
- Publication number 20250187031
- Publication date Jun 12, 2025
- EBARA CORPORATION
- SATOSHI AO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20250191940
- Publication date Jun 12, 2025
- SPTS TECHNOLOGIES LIMITED
- Phil WALLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEV...
- Publication number 20250178153
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chwen YU
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
WORKING STATION SYSTEMS FOR DISPENSING A FLUID IN CONNECTION WITH E...
- Publication number 20250174474
- Publication date May 29, 2025
- Kulicke and Soffa Hi-Tech Co., Ltd.
- Jolly Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...
- Publication number 20250174475
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS

Apparatus for fluid treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of processing substrate, method of manufacturing semiconduct...

Substrate processing apparatus, processing method, and non-transito...

Wafer treatment device

Enhanced closed loop gas based heat exchange

Method and apparatus for coating photo resist over a substrate

Supercritical fluid processing apparatus and substrate processing s...

Cup, liquid processing apparatus, and liquid processing method

Interface tool and methods of operation

Cleaning method, method of manufacturing semiconductor device, and...

Apparatus for removing bipolar element

Cleaning method, method of manufacturing semiconductor device, reco...

Filter device, purification device, chemical solution production me...

Filter apparatus for semiconductor device fabrication process

Liquid processing apparatus and liquid processing method

Vaporizer

Systems and methods for detecting the presence of deposits in fluid...

Substrate processing apparatus and recording medium

Resin shaping device

Chemical liquid preparation device, and substrate processing device

Chemical dispensing system

Exhaust piping for a semiconductor processing tool

Purge controlling system

Integrated showerhead with thermal control for delivering radical a...

Systems and methods for controlling precursor delivery

Exhaust device, processing apparatus, and exhausting method

Processing liquid supply apparatus and method of removing solids fr...

Bubble measurement unit, substrate treating apparatus including the...

High purity ethylenediamine for semiconductor applications

Exhaust assembly, and liquid processing apparatus and substrate pro...

Methods of installing a purge fluid conditioning element into a sem...

Patents Applicationslast 30 patents

WET PROCESS AIR ABATEMENT SYSTEM AND METHOD

HIGH-PRESSURE SUBSTRATE PROCESSING APPARATUS AND PROCESSING GAS LIN...

LOAD LOCK DEVICE

HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THE...

WAFER PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...

GAS BOX AND SEMICONDUCTOR MANUFACTURING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

COVER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLUDING COVER MODULE

CLEANING METHOD FOR EXHAUST GAS TREATMENT FACILITY

TRANSFER CHAMBERS, ASSOCIATED SEMICONDUCTOR PROCESSING SYSTEMS, AND...

LINEAR REACTOR FOR SUBSTRATE PROCESSING

SYSTEM AND METHOD FOR DYNAMIC LOADLOCK PRESSURE CONTROL

MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

CIRCULATION APPARATUS AND METHOD OF CONTROLLING CIRCULATION APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBS...

FLUID SUPPLY DEVICE

APPARATUS AND METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEV...

WORKING STATION SYSTEMS FOR DISPENSING A FLUID IN CONNECTION WITH E...

SUPPORT SLEEVE FOR SUPPORTING A PROCESS VESSEL AND ASSOCIATED SEMIC...