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H01L21/67017
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67017
Apparatus for fluid treatment
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer cleaning device and wafer cleaning system
Patent number
11,969,767
Issue date
Apr 30, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Feng Zhang
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
Patent number
11,970,770
Issue date
Apr 30, 2024
Jusung Engineering Co., Ltd.
Dong Won Seo
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
Patent number
11,970,771
Issue date
Apr 30, 2024
Kokusai Electric Corporation
Atsushi Morikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas transport system
Patent number
11,971,057
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jheng-Syun Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas flow accelerator to prevent buildup of processing byproduct in...
Patent number
11,972,957
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Sheng-chun Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of using liquid supply system with improved bubble venting c...
Patent number
11,969,677
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Y. L. Huang
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
Patent number
11,965,240
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Keigo Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Capacitive sensor for monitoring gas concentration
Patent number
11,959,868
Issue date
Apr 16, 2024
Applied Materials, Inc.
Xiaopu Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate holding apparatus and substrate processing apparatus
Patent number
11,961,757
Issue date
Apr 16, 2024
SCREEN Holdings Co., Ltd.
Ryo Muramoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Asymmetric injection for better wafer uniformity
Patent number
11,959,169
Issue date
Apr 16, 2024
Applied Materials, Inc.
Eric Kihara Shono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing systems including gas delivery system with red...
Patent number
11,959,172
Issue date
Apr 16, 2024
Lam Research Corporation
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Automated inspection tool
Patent number
11,961,770
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Han Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Isolation valve
Patent number
11,953,097
Issue date
Apr 9, 2024
Applied Materials, Inc.
Benjamin Riordon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
11,955,350
Issue date
Apr 9, 2024
SCREEN Holdings Co., Ltd.
Noritake Sumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,952,664
Issue date
Apr 9, 2024
Kokusai Electric Corporation
Hidenari Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magazine supporting equipment and semiconductor manufacturing appar...
Patent number
11,955,359
Issue date
Apr 9, 2024
Samsung Electronics Co., Ltd.
Jun Young Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling water circulation system-integrated by-product collection a...
Patent number
11,955,351
Issue date
Apr 9, 2024
J-SOLUTION CO., LTD.
Seungyong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermally stable flow meters for precision fluid delivery
Patent number
11,946,686
Issue date
Apr 2, 2024
Applied Materials, Inc.
Shailendra Srivastava
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone showerhead
Patent number
11,944,988
Issue date
Apr 2, 2024
Applied Materials, Inc.
Muhannad Mustafa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Valve structure and substrate processing apparatus including the same
Patent number
11,948,814
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Kangmin Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum valve and apparatus for fabricating semiconductor having the...
Patent number
11,946,138
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Jaeheung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for processing substrates or wafers
Patent number
11,948,810
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Li-Chao Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for predicting maintenance for components used in substrate...
Patent number
11,940,785
Issue date
Mar 26, 2024
ASM IP Holding B.V.
Taku Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
Patent number
11,939,666
Issue date
Mar 26, 2024
Applied Materials, Inc.
Xiangjin Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,942,337
Issue date
Mar 26, 2024
Semes Co., Ltd.
Eui Sang Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,935,762
Issue date
Mar 19, 2024
Kokusai Electric Corporation
Daigi Kamimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and non...
Patent number
11,926,893
Issue date
Mar 12, 2024
Kokusai Electric Corporation
Naofumi Ohashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for cleaning substrates using high temperature...
Patent number
11,925,881
Issue date
Mar 12, 2024
ACM Research (Shanghai) Inc.
Fuping Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
Publication number
20240141484
Publication date
May 2, 2024
Kokusai Electric Corporation
Yasuaki KOMAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AIRFLOW HEATING MODULE FOR EQUIPMENT FRONT-END MODULE
Publication number
20240145260
Publication date
May 2, 2024
Kogaku Technology Inc.
Yueh-Lin CHIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL
Publication number
20240145275
Publication date
May 2, 2024
Applied Materials, Inc.
Kevin Brashear
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20240145261
Publication date
May 2, 2024
SEMES CO., LTD.
Eui Sang LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS INJECTOR ASSEMBLY
Publication number
20240145262
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Theodorus G.M. Oosterlaken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20240145264
Publication date
May 2, 2024
SEMES CO., LTD.
Sungho KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOLDING APPARATUS FOR FABRICATING SEMICONDUCTOR PACKAGE AND MOLDING...
Publication number
20240145268
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
Jun Woo Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Buffer Layer for Dielectric Protection in Physical Vapor Deposition...
Publication number
20240145300
Publication date
May 2, 2024
Sahil PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...
Publication number
20240120225
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Takehiro SHINDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE P...
Publication number
20240120204
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Keisuke TSUGAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC ON DIELECTRIC SELECTIVE DEPOSITION USING ANILINE PASSIVA...
Publication number
20240120195
Publication date
Apr 11, 2024
Applied Materials, Inc.
Keith T. Wong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS INLET ASSEMBLY OF PROCESS CHAMBER, GAS INLET DEVICE, AND SEMICO...
Publication number
20240117522
Publication date
Apr 11, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Shikai LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY CONTROL DEVICE
Publication number
20240111313
Publication date
Apr 4, 2024
Hitachi High-Tech Corporation
Yoshifumi Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOG BONE EXHAUST SLIT TUNNEL FOR PROCESSING CHAMBERS
Publication number
20240110278
Publication date
Apr 4, 2024
Applied Materials, Inc.
Vishwas Kumar PANDEY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240105479
Publication date
Mar 28, 2024
ASM IP HOLDING B.V.
WonKi Jeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...
Publication number
20240102165
Publication date
Mar 28, 2024
Kojusai Electric Corporation
Shuhei Saido
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZER AND VAPORIZATION SUPPLY DEVICE
Publication number
20240101446
Publication date
Mar 28, 2024
Fujikin Incorporated
Ichiro TOKUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPORIZER, PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICON...
Publication number
20240093361
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Gen LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20240093370
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Masahiro TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
Publication number
20240096615
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Akinori TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096617
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Kimihiko Nakatani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS SYSTEM AND GAS TREATMENT METHOD
Publication number
20240096649
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Wonsu LEE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240096651
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Shuichi YASUDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240087927
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Koichiro HARADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE BONDING TOOL AND METHODS OF OPERATION
Publication number
20240087915
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Hao HUANG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240079251
Publication date
Mar 7, 2024
SCREEN Holdings Co., Ltd.
Jun KOMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT STAGE, SUPPORT DEVICE, AND METHOD FOR MANUFACTURING SEMICON...
Publication number
20240079262
Publication date
Mar 7, 2024
Rohm Co., Ltd.
Hajime USHIO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...
Publication number
20240076780
Publication date
Mar 7, 2024
Kokusai Electric Corporation
Masamichi YACHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20240071750
Publication date
Feb 29, 2024
Kokusai Electric Corporation
Hiroshi ASHIHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION AND CONTROL
Publication number
20240071804
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
Peipei Gao
H01 - BASIC ELECTRIC ELEMENTS