Apparatus for manufacture or treatment

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CPC
H01L21/67011

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67011Apparatus for manufacture or treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning electrostatic chuck
- Patent number 12,170,218
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh-Lin Yang
- B08 - CLEANING
Information Patent Grant
Shutter disk
- Patent number 12,148,629
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Virtual measurement of conditions proximate to a substrate with phy...
- Patent number 12,131,105
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Preetham Prahallada Rao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Adhesion device, micro device optical inspection and repairing equi...
- Patent number 12,131,961
- Issue date Oct 29, 2024
- PlayNitride Display Co., Ltd.
- Cheng-Cian Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool
- Patent number 12,084,769
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method of manufacturing wafer and method of manufacturing stacked d...
- Patent number 12,087,589
- Issue date Sep 10, 2024
- Disco Corporation
- Kazuma Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor die having edge with multiple grad...
- Patent number 12,087,618
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Sheng Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for processing a substrate and methods of processing a...
- Patent number 12,059,714
- Issue date Aug 13, 2024
- Semes Co., Ltd.
- Sangmin Lee
- B08 - CLEANING
Information Patent Grant
Method for forming barrier layer in semiconductor structure
- Patent number 12,062,573
- Issue date Aug 13, 2024
- Yangtze Memory Technologies Co., Ltd.
- Peng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 12,051,568
- Issue date Jul 30, 2024
- Toto Ltd.
- Yasutaka Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaving apparatus and method for cleaving semiconductor cells, sys...
- Patent number 12,051,764
- Issue date Jul 30, 2024
- Applied Materials Italia S.R.L.
- Daniele Gislon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for predicting maintenance for components used in substrate...
- Patent number 11,940,785
- Issue date Mar 26, 2024
- ASM IP Holding B.V.
- Taku Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extending life cycles of vacuum pumps used in manufacturing processes
- Patent number 11,905,955
- Issue date Feb 20, 2024
- Kashiyama Industries, Ltd.
- Yoshinori Christopher Dokko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of manufacturing display device and method of manufacturi...
- Patent number 11,889,742
- Issue date Jan 30, 2024
- Samsung Display Co., Ltd.
- Seungkuk Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk
- Patent number 11,862,480
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool
- Patent number 11,851,761
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses for processing a substrate and methods of processing a...
- Patent number 11,833,555
- Issue date Dec 5, 2023
- Semes Co., Ltd.
- Sangmin Lee
- B08 - CLEANING
Information Patent Grant
Gas-phase reactor system-with a reaction chamber, a solid precursor...
- Patent number 11,814,747
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes magn...
- Patent number 11,804,384
- Issue date Oct 31, 2023
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container, processing apparatus, particle removing method, and meth...
- Patent number 11,798,818
- Issue date Oct 24, 2023
- Canon Kabushiki Kaisha
- Masami Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support device, thermal processing apparatus, substrate s...
- Patent number 11,694,920
- Issue date Jul 4, 2023
- SCREEN Holdings Co., Ltd.
- Scott Prengle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,692,283
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for heating semiconductor wafers
- Patent number 11,688,615
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flat lead package formation method
- Patent number 11,652,084
- Issue date May 16, 2023
- Infineon Technologies AG
- Thorsten Meyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable end effector contact pads, end effectors, and maintenan...
- Patent number 11,600,580
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Whitney Kroetz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,578,407
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Jun Yamawaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Underfill injection for electronic devices
- Patent number 11,574,848
- Issue date Feb 7, 2023
- International Business Machines Corporation
- Akihiro Horibe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL
- Publication number 20240384416
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WIRE GRIPPER, WIRE PROCESSING APPARATUS INCLUDING THE SAME, AND WIR...
- Publication number 20240379384
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Jongseong Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DIE HAVING EDGE WITH MULTIPLE GRADIENTS
- Publication number 20240363398
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Sheng TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240331982
- Publication date Oct 3, 2024
- TOTO LTD.
- Yasutaka NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATIC CHAMBER CLEANING SYSTEM
- Publication number 20240326108
- Publication date Oct 3, 2024
- Samsung Electronics Co., Ltd.
- Jinuk PARK
- A46 - BRUSHWARE
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WIRELESS POWER APPARATUS FOR SUBSTRATES TREATING APPARATUS AND MANU...
- Publication number 20240146103
- Publication date May 2, 2024
- SEMES CO., LTD.
- Chan Young Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20240087913
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...
- Publication number 20240042497
- Publication date Feb 8, 2024
- Semes Co., Ltd.
- Sangmin LEE
- B08 - CLEANING
Information Patent Application
GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...
- Publication number 20240011189
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR CLEANING ELECTROSTATIC CHUCK
- Publication number 20230343628
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin YANG
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR HEATING SEMICONDUCTOR WAFERS
- Publication number 20230298916
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT DEVICE, THERMAL PROCESSING APPARATUS, SUBSTRATE S...
- Publication number 20230253237
- Publication date Aug 10, 2023
- SCREEN Holdings Co., Ltd.
- Scott PRENGLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MOUNTING SOLDER BALLS
- Publication number 20230187228
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Young-Ja KIM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESSING METHOD OF SEMI...
- Publication number 20230170235
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Hiromichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20230112057
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHEET PASTING DEVICE AND SHEET PASTING METHOD
- Publication number 20230090910
- Publication date Mar 23, 2023
- LINTEC CORPORATION
- Yoshiaki SUGISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING ELECTROSTATIC CHUCK
- Publication number 20230093409
- Publication date Mar 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Lin YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHY...
- Publication number 20230078146
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Preetham Prahallada Rao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF FORMING METAL OXIDE LAYER USING...
- Publication number 20220364234
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING WAFER AND METHOD OF MANUFACTURING STACKED D...
- Publication number 20220293424
- Publication date Sep 15, 2022
- Disco Corporation
- Kazuma Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING FILLING GAS SUPPLY LINE AN...
- Publication number 20220285174
- Publication date Sep 8, 2022
- Samsung Electronics Co., Ltd.
- Byunghwan KONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESION DEVICE, MICRO DEVICE OPTICAL INSPECTION AND REPAIRING EQUI...
- Publication number 20220262688
- Publication date Aug 18, 2022
- PlayNitride Display Co., Ltd.
- Cheng-Cian Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNDERFILL INJECTION FOR ELECTRONIC DEVICES
- Publication number 20220238403
- Publication date Jul 28, 2022
- International Business Machines Corporation
- AKIHIRO HORIBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING A SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER
- Publication number 20220139676
- Publication date May 5, 2022
- TOTO LTD.
- Yasutaka NITTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE FOR VARYING FLOW CONDUCTANCE UNDER VACUUM
- Publication number 20220042617
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Muhannad MUSTAFA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Shutter Disk
- Publication number 20220028702
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Apparatus for manufacture or treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for cleaning electrostatic chuck

Shutter disk

Virtual measurement of conditions proximate to a substrate with phy...

Adhesion device, micro device optical inspection and repairing equi...

Semiconductor processing tool

Method of manufacturing wafer and method of manufacturing stacked d...

Method for forming semiconductor die having edge with multiple grad...

Apparatuses for processing a substrate and methods of processing a...

Method for forming barrier layer in semiconductor structure

Semiconductor manufacturing apparatus

Cleaving apparatus and method for cleaving semiconductor cells, sys...

Integrated showerhead with thermal control for delivering radical a...

Apparatus for growing a semiconductor wafer and associated manufact...

Method for predicting maintenance for components used in substrate...

Extending life cycles of vacuum pumps used in manufacturing processes

Apparatus of manufacturing display device and method of manufacturi...

Shutter disk

Semiconductor processing tool

Apparatuses for processing a substrate and methods of processing a...

Gas-phase reactor system-with a reaction chamber, a solid precursor...

Device for self-assembling semiconductor light-emitting diodes magn...

Container, processing apparatus, particle removing method, and meth...

Substrate support device, thermal processing apparatus, substrate s...

Apparatus for growing a semiconductor wafer and associated manufact...

System and method for heating semiconductor wafers

Flat lead package formation method

Integrated showerhead with thermal control for delivering radical a...

Replaceable end effector contact pads, end effectors, and maintenan...

Film-forming apparatus and film-forming method

Underfill injection for electronic devices

Patents Applicationslast 30 patents

LOAD PORT AND METHODS OF OPERATION

SEMICONDUCTOR PROCESSING TOOL

WIRE GRIPPER, WIRE PROCESSING APPARATUS INCLUDING THE SAME, AND WIR...

SEMICONDUCTOR DIE HAVING EDGE WITH MULTIPLE GRADIENTS

SEMICONDUCTOR MANUFACTURING APPARATUS

AUTOMATIC CHAMBER CLEANING SYSTEM

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

WIRELESS POWER APPARATUS FOR SUBSTRATES TREATING APPARATUS AND MANU...

Shutter Disk

APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...

GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...

METHOD FOR CLEANING ELECTROSTATIC CHUCK

SYSTEM AND METHOD FOR HEATING SEMICONDUCTOR WAFERS

SUBSTRATE SUPPORT DEVICE, THERMAL PROCESSING APPARATUS, SUBSTRATE S...

APPARATUS FOR MOUNTING SOLDER BALLS

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESSING METHOD OF SEMI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

SHEET PASTING DEVICE AND SHEET PASTING METHOD

METHOD FOR CLEANING ELECTROSTATIC CHUCK

VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHY...

DEPOSITION APPARATUS AND METHOD OF FORMING METAL OXIDE LAYER USING...

METHOD OF MANUFACTURING WAFER AND METHOD OF MANUFACTURING STACKED D...

SUBSTRATE PROCESSING APPARATUS INCLUDING FILLING GAS SUPPLY LINE AN...

ADHESION DEVICE, MICRO DEVICE OPTICAL INSPECTION AND REPAIRING EQUI...

UNDERFILL INJECTION FOR ELECTRONIC DEVICES

METHOD OF MAKING A SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER

VALVE FOR VARYING FLOW CONDUCTANCE UNDER VACUUM

Shutter Disk

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...