Apparatus for monitoring, sorting or marking

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CPC
H01L21/67242

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67242Apparatus for monitoring, sorting or marking

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Load port and methods of operation
- Patent number 12,272,573
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with circuit-locating mechanism
- Patent number 12,266,411
- Issue date Apr 1, 2025
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-phase reactor system including a gas detector
- Patent number 12,195,855
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 12,191,178
- Issue date Jan 7, 2025
- Ebara Corporation
- Jumpei Fujikata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of semiconductor manufacturing equipment in mixed reality e...
- Patent number 12,181,849
- Issue date Dec 31, 2024
- Lam Research Corporation
- Rainer Unterguggenberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for forming capacitor via
- Patent number 12,183,776
- Issue date Dec 31, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chunyang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and workpiece processing method
- Patent number 12,148,649
- Issue date Nov 19, 2024
- Disco Corporation
- Yukiyasu Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus and wafer transfer method
- Patent number 12,099,309
- Issue date Sep 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,080,566
- Issue date Sep 3, 2024
- SCREEN Holdings Co., Ltd.
- Taiki Hinode
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, method and recording medium storing command for inspection
- Patent number 12,051,606
- Issue date Jul 30, 2024
- Koh Young Technology Inc.
- Jung Woo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to minimize irradiation non uniformity
- Patent number 12,040,201
- Issue date Jul 16, 2024
- LASER SYSTEMS & SOLUTIONS OF EUROPE
- Fulvio Mazzamuto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift apparatus and substrate processing apparatus including the same
- Patent number 11,984,344
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container and method for charging substrate-like sensor
- Patent number 11,984,332
- Issue date May 14, 2024
- Tokyo Electron Limited
- Yuuji Akiduki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 11,972,939
- Issue date Apr 30, 2024
- Semes Co., Ltd.
- Ohyeol Kwon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 11,967,513
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with circuit-locating mechanism
- Patent number 11,967,390
- Issue date Apr 23, 2024
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Grant
Conveying system and method for operating the same
- Patent number 11,942,342
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
- Patent number 11,935,775
- Issue date Mar 19, 2024
- Kioxia Corporation
- Satoshi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ metrology and process control
- Patent number 11,908,718
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Ramesh Krishnamurthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating transport system
- Patent number 11,854,844
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Yuan Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 11,854,860
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for real-time wafer chucking detection
- Patent number 11,791,190
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a molded flip chip package to facilitate el...
- Patent number 11,784,100
- Issue date Oct 10, 2023
- SK hynix Inc.
- Jee Won Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid storage for facility chemical supply system
- Patent number 11,769,678
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Yang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing device
- Patent number 11,728,188
- Issue date Aug 15, 2023
- Kioxia Corporation
- Yuji Hashimoto
- B08 - CLEANING
Information Patent Grant
Front surface and back surface orientation detection of transparent...
- Patent number 11,728,191
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Michelle Alejandra Wong
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS-PHASE REACTOR SYSTEM INCLUDING A GAS DETECTOR
- Publication number 20250092525
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- SungBae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEVEL SEALING SYSTEM AND METHOD OF USING THE SAME
- Publication number 20250096014
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Meng Ou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND MECHANISMS FOR VIBRATION MONITORING
- Publication number 20250079207
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Punyabrahma Panda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250079233
- Publication date Mar 6, 2025
- MICO CERAMICS LTD.
- Mina CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRA...
- Publication number 20250079216
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Keisuke KONDOH
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AN...
- Publication number 20250076843
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Masakazu YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250054805
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CoO., LTD.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20250038024
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Molding System and Foreign Object Detection Method
- Publication number 20250029232
- Publication date Jan 23, 2025
- DIODES INCORPORATED
- Desen Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OFFSET DATA CORRECTION METHOD AND SEMICONDUCTOR DEVICE MANUFACTURIN...
- Publication number 20250022713
- Publication date Jan 16, 2025
- Samsung Electronics Co., Ltd.
- Joongsuk Oh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS
- Publication number 20240404841
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Praveen A. KOTINATOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GENERATING REFERENCE STATUS DATA FOR MONITORING STATUS O...
- Publication number 20240395583
- Publication date Nov 28, 2024
- AETHER, INC.
- Jaehyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM
- Publication number 20240395582
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Yang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PICK-AND-PLACE APPARATUS AND METHOD
- Publication number 20240321607
- Publication date Sep 26, 2024
- NEXPERIA B.V.
- Tim Ellenbroek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS WITH CIRCUIT-LOCATING MECHANISM
- Publication number 20240265990
- Publication date Aug 8, 2024
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240234183
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20240222166
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- B66 - HOISTING LIFTING HAULING
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20240194501
- Publication date Jun 13, 2024
- Disco Corporation
- Kentaro IIZUKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT IN MIXED REALITY E...
- Publication number 20240192653
- Publication date Jun 13, 2024
- LAM RESEARCH CORPORATION
- Rainer Unterguggenberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES
- Publication number 20240153787
- Publication date May 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhih-Yu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20240087945
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20240014056
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP PEELING APARATUS AND CHIP PEELING METHOD
- Publication number 20230369078
- Publication date Nov 16, 2023
- Samsung Electronics Co., Ltd.
- Tatsuya ISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM
- Publication number 20230369084
- Publication date Nov 16, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMANY, LTD.
- Tzu-Yang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307271
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307270
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- B08 - CLEANING
Information Patent Application
APPARATUS, METHOD AND RECORDING MEDIUM STORING COMMAND FOR INSPECTION
- Publication number 20230282499
- Publication date Sep 7, 2023
- KOH YOUNG TECHNOLOGY INC.
- Jung Woo PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230220552
- Publication date Jul 13, 2023
- Kokusai Electric Corporation
- Tsuyoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS

Apparatus for monitoring, sorting or marking

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Load port and methods of operation

Apparatus with circuit-locating mechanism

Semiconductor processing apparatus and method utilizing electrostat...

Gas-phase reactor system including a gas detector

Substrate processing chamber, substrate processing system including...

Semiconductor manufacturing apparatus, failure prediction method fo...

Control of semiconductor manufacturing equipment in mixed reality e...

Method for forming capacitor via

Processing apparatus and workpiece processing method

Wafer processing apparatus and wafer transfer method

Substrate treating apparatus and substrate treating method

Prevention of contamination of substrates during gas purging

Apparatus, method and recording medium storing command for inspection

System and method to minimize irradiation non uniformity

Lift apparatus and substrate processing apparatus including the same

Container and method for charging substrate-like sensor

Method and apparatus for treating substrate

Substrate processing apparatus

Apparatus with circuit-locating mechanism

Conveying system and method for operating the same

Semiconductor manufacturing apparatus and method of manufacturing s...

In-situ metrology and process control

Method of operating transport system

Semiconductor processing apparatus and method utilizing electrostat...

Prevention of contamination of substrates during gas purging

Apparatus and methods for real-time wafer chucking detection

Method of manufacturing a molded flip chip package to facilitate el...

Liquid storage for facility chemical supply system

Semiconductor manufacturing device

Front surface and back surface orientation detection of transparent...

Patents Applicationslast 30 patents

GAS-PHASE REACTOR SYSTEM INCLUDING A GAS DETECTOR

BEVEL SEALING SYSTEM AND METHOD OF USING THE SAME

METHODS AND MECHANISMS FOR VIBRATION MONITORING

CERAMIC SUSCEPTOR

SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRA...

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AN...

SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

Semiconductor Molding System and Foreign Object Detection Method

OFFSET DATA CORRECTION METHOD AND SEMICONDUCTOR DEVICE MANUFACTURIN...

FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS

METHOD FOR GENERATING REFERENCE STATUS DATA FOR MONITORING STATUS O...

LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM

LOAD PORT AND METHODS OF OPERATION

PICK-AND-PLACE APPARATUS AND METHOD

APPARATUS WITH CIRCUIT-LOCATING MECHANISM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...

SUBSTRATE PROCESSING APPARATUS

CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME

WAFER PROCESSING APPARATUS

CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT IN MIXED REALITY E...

CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

CHIP PEELING APARATUS AND CHIP PEELING METHOD

LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS, METHOD AND RECORDING MEDIUM STORING COMMAND FOR INSPECTION

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...