Apparatus for monitoring, sorting or marking

Industry

CPC
H01L21/67242

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67242Apparatus for monitoring, sorting or marking

Industries

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus and workpiece processing method
- Patent number 12,148,649
- Issue date Nov 19, 2024
- Disco Corporation
- Yukiyasu Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus and wafer transfer method
- Patent number 12,099,309
- Issue date Sep 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,080,566
- Issue date Sep 3, 2024
- SCREEN Holdings Co., Ltd.
- Taiki Hinode
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, method and recording medium storing command for inspection
- Patent number 12,051,606
- Issue date Jul 30, 2024
- Koh Young Technology Inc.
- Jung Woo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to minimize irradiation non uniformity
- Patent number 12,040,201
- Issue date Jul 16, 2024
- LASER SYSTEMS & SOLUTIONS OF EUROPE
- Fulvio Mazzamuto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift apparatus and substrate processing apparatus including the same
- Patent number 11,984,344
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container and method for charging substrate-like sensor
- Patent number 11,984,332
- Issue date May 14, 2024
- Tokyo Electron Limited
- Yuuji Akiduki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 11,972,939
- Issue date Apr 30, 2024
- Semes Co., Ltd.
- Ohyeol Kwon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus with circuit-locating mechanism
- Patent number 11,967,390
- Issue date Apr 23, 2024
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus
- Patent number 11,967,513
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying system and method for operating the same
- Patent number 11,942,342
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
- Patent number 11,935,775
- Issue date Mar 19, 2024
- Kioxia Corporation
- Satoshi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ metrology and process control
- Patent number 11,908,718
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Ramesh Krishnamurthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating transport system
- Patent number 11,854,844
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Yuan Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 11,854,860
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for real-time wafer chucking detection
- Patent number 11,791,190
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a molded flip chip package to facilitate el...
- Patent number 11,784,100
- Issue date Oct 10, 2023
- SK hynix Inc.
- Jee Won Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid storage for facility chemical supply system
- Patent number 11,769,678
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Yang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing device
- Patent number 11,728,188
- Issue date Aug 15, 2023
- Kioxia Corporation
- Yuji Hashimoto
- B08 - CLEANING
Information Patent Grant
Front surface and back surface orientation detection of transparent...
- Patent number 11,728,191
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Michelle Alejandra Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, method and recording medium storing command for inspection
- Patent number 11,694,916
- Issue date Jul 4, 2023
- Koh Young Technology Inc.
- Jung Woo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Valve assembly and system used to control flow rate of a fluid
- Patent number 11,669,111
- Issue date Jun 6, 2023
- Illinois Tool Works Inc.
- Mohamed Saleem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Instrumented substrate apparatus
- Patent number 11,668,601
- Issue date Jun 6, 2023
- KLA Corporation
- Robert D. Tas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuumizing device and vacuumizing method for bonding substrate
- Patent number 11,664,228
- Issue date May 30, 2023
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yuangen Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation device, substrate processing apparatus, and metho...
- Patent number 11,629,408
- Issue date Apr 18, 2023
- Kokusai Electric Corporation
- Tsuyoshi Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for analyzing a semiconductor device
- Patent number 11,626,306
- Issue date Apr 11, 2023
- SK hynix Inc.
- Jin Hee Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer unit, and apparatus and method for treating substrate with t...
- Patent number 11,569,110
- Issue date Jan 31, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for optically monitoring individual...
- Patent number 11,562,915
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Ji-Dih Hu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PICK-AND-PLACE APPARATUS AND METHOD
- Publication number 20240321607
- Publication date Sep 26, 2024
- NEXPERIA B.V.
- Tim Ellenbroek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS WITH CIRCUIT-LOCATING MECHANISM
- Publication number 20240265990
- Publication date Aug 8, 2024
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240234183
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20240222166
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- B66 - HOISTING LIFTING HAULING
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20240194501
- Publication date Jun 13, 2024
- Disco Corporation
- Kentaro IIZUKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT IN MIXED REALITY E...
- Publication number 20240192653
- Publication date Jun 13, 2024
- LAM RESEARCH CORPORATION
- Rainer Unterguggenberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES
- Publication number 20240153787
- Publication date May 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhih-Yu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20240087945
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20240014056
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP PEELING APARATUS AND CHIP PEELING METHOD
- Publication number 20230369078
- Publication date Nov 16, 2023
- Samsung Electronics Co., Ltd.
- Tatsuya ISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM
- Publication number 20230369084
- Publication date Nov 16, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMANY, LTD.
- Tzu-Yang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307271
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307270
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- B08 - CLEANING
Information Patent Application
APPARATUS, METHOD AND RECORDING MEDIUM STORING COMMAND FOR INSPECTION
- Publication number 20230282499
- Publication date Sep 7, 2023
- KOH YOUNG TECHNOLOGY INC.
- Jung Woo PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230220552
- Publication date Jul 13, 2023
- Kokusai Electric Corporation
- Tsuyoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING A SUBSTRATE AND ELECTROSTATIC MONITORING MET...
- Publication number 20230207341
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Do Yeon KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for the Temperature Control of a Substrate and Correspond...
- Publication number 20230148124
- Publication date May 11, 2023
- ERS electronic GmbH
- Klaus Reitinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE MONITORING APPARATUS FOR AIR VALVE FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20230126604
- Publication date Apr 27, 2023
- SPSGLOBAL Co., Ltd
- Sang Hyub LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR PACKAGES WITH INDICATIONS OF DIE-SPECIFIC INFORMATION
- Publication number 20230121141
- Publication date Apr 20, 2023
- Micron Technology, Inc.
- Federico Pio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRE-DEPOSITION TREATMENT OF A WORK-FUNCTION METAL LAYER
- Publication number 20230106314
- Publication date Apr 6, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Yen TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND MECHANISMS FOR COUPLING SENSORS TO TRANSFER CHAMBER ROBOT
- Publication number 20230089982
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Phillip Criminale
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS WITH CIRCUIT-LOCATING MECHANISM
- Publication number 20230087823
- Publication date Mar 23, 2023
- Micron Technology, Inc.
- Itamar Lavy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20230077331
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ETCHING DEVICE
- Publication number 20230068174
- Publication date Mar 2, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chin-Kuan LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METROLOGY SYSTEM
- Publication number 20230061147
- Publication date Mar 2, 2023
- NOVA LTD
- Alex Shichtman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER TRANSFER METHOD
- Publication number 20230057774
- Publication date Feb 23, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu LIANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SE...
- Publication number 20230041619
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Yuuji AKIDUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20230043451
- Publication date Feb 9, 2023
- Samsung Electronics Co., Ltd.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS

Apparatus for monitoring, sorting or marking

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Processing apparatus and workpiece processing method

Wafer processing apparatus and wafer transfer method

Substrate treating apparatus and substrate treating method

Prevention of contamination of substrates during gas purging

Apparatus, method and recording medium storing command for inspection

System and method to minimize irradiation non uniformity

Lift apparatus and substrate processing apparatus including the same

Container and method for charging substrate-like sensor

Method and apparatus for treating substrate

Apparatus with circuit-locating mechanism

Substrate processing apparatus

Conveying system and method for operating the same

Semiconductor manufacturing apparatus and method of manufacturing s...

In-situ metrology and process control

Method of operating transport system

Semiconductor processing apparatus and method utilizing electrostat...

Prevention of contamination of substrates during gas purging

Apparatus and methods for real-time wafer chucking detection

Method of manufacturing a molded flip chip package to facilitate el...

Liquid storage for facility chemical supply system

Semiconductor manufacturing device

Front surface and back surface orientation detection of transparent...

Apparatus, method and recording medium storing command for inspection

Valve assembly and system used to control flow rate of a fluid

Instrumented substrate apparatus

Vacuumizing device and vacuumizing method for bonding substrate

Plasma generation device, substrate processing apparatus, and metho...

Method for analyzing a semiconductor device

Buffer unit, and apparatus and method for treating substrate with t...

Methods, systems, and apparatus for optically monitoring individual...

Patents Applicationslast 30 patents

LOAD PORT AND METHODS OF OPERATION

PICK-AND-PLACE APPARATUS AND METHOD

APPARATUS WITH CIRCUIT-LOCATING MECHANISM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...

SUBSTRATE PROCESSING APPARATUS

CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME

WAFER PROCESSING APPARATUS

CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT IN MIXED REALITY E...

CONTROL OF ENVIRONMENT WITHIN PROCESSING MODULES

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

CHIP PEELING APARATUS AND CHIP PEELING METHOD

LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS, METHOD AND RECORDING MEDIUM STORING COMMAND FOR INSPECTION

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

APPARATUS FOR TREATING A SUBSTRATE AND ELECTROSTATIC MONITORING MET...

Apparatus for the Temperature Control of a Substrate and Correspond...

REMOTE MONITORING APPARATUS FOR AIR VALVE FOR SEMICONDUCTOR EQUIPMENT

SEMICONDUCTOR PACKAGES WITH INDICATIONS OF DIE-SPECIFIC INFORMATION

METHODS FOR PRE-DEPOSITION TREATMENT OF A WORK-FUNCTION METAL LAYER

METHODS AND MECHANISMS FOR COUPLING SENSORS TO TRANSFER CHAMBER ROBOT

APPARATUS WITH CIRCUIT-LOCATING MECHANISM

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

SEMICONDUCTOR ETCHING DEVICE

INTEGRATED METROLOGY SYSTEM

WAFER PROCESSING APPARATUS AND WAFER TRANSFER METHOD

ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SE...

SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...