Membership
Tour
Register
Log in
Apparatus not specifically provided for elsewhere
Follow
Industry
CPC
H01L21/67005
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67005
Apparatus not specifically provided for elsewhere
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of bonding substrates, microchip and method of manufacturing...
Patent number
12,103,246
Issue date
Oct 1, 2024
Ushio Denki Kabushiki Kaisha
Motohiro Sakai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Conveying system and method for operating the same
Patent number
11,942,342
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
11,765,793
Issue date
Sep 19, 2023
Semes Co., Ltd.
Muhyeon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for optically representing electronic semiconduct...
Patent number
11,754,511
Issue date
Sep 12, 2023
FormFactor, Inc.
Jens Fiedler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate carrier deterioration detection and repair
Patent number
11,584,019
Issue date
Feb 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Jen-Ti Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck
Patent number
11,393,708
Issue date
Jul 19, 2022
Toto Ltd.
Masafumi Ikeguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Assembling apparatus and assembling method for semiconductor manufa...
Patent number
11,114,318
Issue date
Sep 7, 2021
Tokyo Electron Limited
Hisashi Inoue
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conveying system and method for operating the same
Patent number
11,107,713
Issue date
Aug 31, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
10,714,362
Issue date
Jul 14, 2020
Kokusai Electric Corporation
Shuhei Saido
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Equipment for manufacturing semiconductor devices and method for us...
Patent number
10,319,619
Issue date
Jun 11, 2019
Samsung Electronics Co., Ltd.
BongJin Son
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for bonding substrates
Patent number
10,131,126
Issue date
Nov 20, 2018
Applied Materials, Inc.
Kadthala Ramaya Narendrnath
B32 - LAYERED PRODUCTS
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
10,128,104
Issue date
Nov 13, 2018
Hitachi Kokusai Electric Inc.
Atsushi Sano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma assisted atomic layer deposition metal oxide for patterning...
Patent number
10,043,657
Issue date
Aug 7, 2018
Lam Research Corporation
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming wafer-level molded structure for package assembly
Patent number
9,754,917
Issue date
Sep 5, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung-Ding Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma assisted atomic layer deposition titanium oxide for patterni...
Patent number
9,673,041
Issue date
Jun 6, 2017
Lam Research Corporation
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for depositing electronically conductive pasti...
Patent number
9,666,416
Issue date
May 30, 2017
Applied Materials, Inc.
John C. Forster
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for bonding substrates
Patent number
9,627,231
Issue date
Apr 18, 2017
Applied Materials, Inc.
Kadthala Ramaya Narendrnath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating of graphite tooling for manufacture of semiconductors
Patent number
9,620,664
Issue date
Apr 11, 2017
Mossey Creek Technologies, Inc.
John Carberry
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for operating semiconductor manufacturing equipment
Patent number
9,580,800
Issue date
Feb 28, 2017
Samsung Electronics Co., Ltd.
Byoung-Hoon Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Debonders with a recess and a side wall opening for semiconductor f...
Patent number
9,539,801
Issue date
Jan 10, 2017
Skyworks Solutions, Inc.
Steve Canale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned dynamic pattern generator device and method of fabrica...
Patent number
9,536,706
Issue date
Jan 3, 2017
Corporation for National Research Initiatives
Michael A. Huff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Debonders with a recess and a heater for semiconductor fabrication
Patent number
9,533,484
Issue date
Jan 3, 2017
Skyworks Solutions, Inc.
Steve Canale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressuring module, pressuring apparatus, substrate bonding apparatu...
Patent number
9,498,944
Issue date
Nov 22, 2016
Shigeto Izumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressuring module, pressuring apparatus, substrate bonding apparatu...
Patent number
9,457,554
Issue date
Oct 4, 2016
Shigeto Izumi
B32 - LAYERED PRODUCTS
Information
Patent Grant
Debonders and related devices and methods for semiconductor fabrica...
Patent number
9,296,194
Issue date
Mar 29, 2016
Skyworks Solutions, Inc.
Steve Canale
B32 - LAYERED PRODUCTS
Information
Patent Grant
Method and apparatus for wafer electroless plating
Patent number
9,287,110
Issue date
Mar 15, 2016
Lam Research Corporation
William Thie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for depositing electrically conductive pasting...
Patent number
9,224,582
Issue date
Dec 29, 2015
Applied Materials, Inc.
John Forster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming wafer-level molded structure for package assembly
Patent number
9,117,939
Issue date
Aug 25, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung-Ding Wang
B32 - LAYERED PRODUCTS
Information
Patent Grant
Process device for processing in particular stacked processed goods
Patent number
9,082,796
Issue date
Jul 14, 2015
Volker Probst
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for detaching a semiconductor chip from a foil
Patent number
9,039,867
Issue date
May 26, 2015
Besi Switzerland AG
Ernst Barmettler
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
Publication number
20240222166
Publication date
Jul 4, 2024
Taiwan Semiconductor Manufacturing company Ltd.
FU-HSIEN LI
B66 - HOISTING LIFTING HAULING
Information
Patent Application
CLEANING DEVICE AND CLEANING METHOD
Publication number
20230191460
Publication date
Jun 22, 2023
EBARA CORPORATION
Yuki TANAKA
B08 - CLEANING
Information
Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
Publication number
20230191619
Publication date
Jun 22, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Jen-Ti Wang
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20220319898
Publication date
Oct 6, 2022
TOTO LTD.
Masafumi IKEGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
Publication number
20210384052
Publication date
Dec 9, 2021
Taiwan Semiconductor Manufacturing company Ltd.
FU-HSIEN LI
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
DEVICE POSITIONING USING SENSORS
Publication number
20210082718
Publication date
Mar 18, 2021
Taiwan Semiconductor Manufacturing Company Limited
Yan-Han CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESSES AND METHODS FOR APPLYING UNDERFILL TO SINGULATED DIE
Publication number
20180286704
Publication date
Oct 4, 2018
Intel Corporation
Elizabeth M. Nofen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF BONDING SUBSTRATES, MICROCHIP AND METHOD OF MANUFACTURING...
Publication number
20180141280
Publication date
May 24, 2018
Ushio Denki Kabushiki Kaisha
Motohiro SAKAI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ASSEMBLING DEVICE USED FOR SEMICONDUCTOR EQUIPMENT
Publication number
20170358463
Publication date
Dec 14, 2017
HERMES-EPITEK CORPORATION
Tsan-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ASSISTED ATOMIC LAYER DEPOSITION METAL OXIDE FOR PATTERNING...
Publication number
20170263450
Publication date
Sep 14, 2017
LAM RESEARCH CORPORATION
Shankar Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING MACHINE INCLUDING ELECTRIC DISCHARGER
Publication number
20170013700
Publication date
Jan 12, 2017
FANUC CORPORATION
Naoki Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED DYNAMIC PATTERN GENERATOR DEVICE AND METHOD OF FABRICA...
Publication number
20160233054
Publication date
Aug 11, 2016
Corporation for National Research Initiatives
Michael A. Huff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Increasing Productivity of Combinatorial Scre...
Publication number
20140315332
Publication date
Oct 23, 2014
Gustavo A. Pinto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEBONDERS AND RELATED DEVICES AND METHODS FOR SEMICONDUCTOR FABRICA...
Publication number
20140262053
Publication date
Sep 18, 2014
SKYWORKS SOLUTIONS, INC.
Steve Canale
B32 - LAYERED PRODUCTS
Information
Patent Application
Pressuring Module, Pressuring Apparatus, Substrate Bonding Apparatu...
Publication number
20140262045
Publication date
Sep 18, 2014
Nikon Corporation
Keiichi Tanaka
B32 - LAYERED PRODUCTS
Information
Patent Application
SELF-ALIGNED DYNAMIC PATTERN GENERATOR DEVICE AND METHOD OF FABRICA...
Publication number
20140268076
Publication date
Sep 18, 2014
Corporation for National Research Initiatives
Michael A. HUFF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Forming Wafer-Level Molded Structure for Package Assembly
Publication number
20140206140
Publication date
Jul 24, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung-Ding Wang
B32 - LAYERED PRODUCTS
Information
Patent Application
CHIP SORTING APPARATUS
Publication number
20140202627
Publication date
Jul 24, 2014
EPISTAR CORPORATION
Chen-Ke HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR BONDING SUBSTRATES
Publication number
20140099485
Publication date
Apr 10, 2014
Kadthala Ramaya NARENDRNATH
B32 - LAYERED PRODUCTS
Information
Patent Application
Semiconductor Equipment
Publication number
20140000655
Publication date
Jan 2, 2014
Chien-Ping HUANG
A46 - BRUSHWARE
Information
Patent Application
Methods and Apparatus for Ex Situ Seasoning of Electronic Device Ma...
Publication number
20130299464
Publication date
Nov 14, 2013
Applied Materials, Inc.
Jiansheng Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Apparatus for Wafer Electroless Plating
Publication number
20130280917
Publication date
Oct 24, 2013
William Thie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STABLE SURFACE WAVE PLASMA SOURCE
Publication number
20130264938
Publication date
Oct 10, 2013
TOKYO ELECTRON LIMITED
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method For Detaching A Semiconductor Chip From A Foil
Publication number
20130255889
Publication date
Oct 3, 2013
Besi Switzerland AG
Ernst Barmettler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROBE AND METHOD OF MANUFACTURING PROBE
Publication number
20130247375
Publication date
Sep 26, 2013
FUJITSU COMPONENT LIMITED
Koki Sato
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR EQUIPMENT
Publication number
20130219639
Publication date
Aug 29, 2013
HERMES-EPITEK CORPORATION
Chien-Ping HUANG
A46 - BRUSHWARE
Information
Patent Application
METHODS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT THROUGH HOLE VIA G...
Publication number
20130171820
Publication date
Jul 4, 2013
LAM RESEARCH CORPORATION
John Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR CLEANING SEMICONDUCTOR SUBSTRATE
Publication number
20130068257
Publication date
Mar 21, 2013
Hiroshi TOMITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus and Substrate Processing System
Publication number
20130046403
Publication date
Feb 21, 2013
Hitachi Kokusai Electric Inc.
Yoshihiko Nakagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRESSURING MODULE, PRESSURING APPARATUS, SUBSTRATE BONDING APPARATU...
Publication number
20120251789
Publication date
Oct 4, 2012
Keiichi TANAKA
B32 - LAYERED PRODUCTS