Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

Industry

CPC
C23C14/56

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/56Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

Industries

Patents Grantslast 30 patents

Information Patent Grant
System and method to evaporate an OLED layer stack in a vertical or...
- Patent number 11,972,964
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Sebastian Gunther Zang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming nickel silicide materials
- Patent number 11,965,236
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Minrui Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Glass roll production method
- Patent number 11,946,133
- Issue date Apr 2, 2024
- Nippon Electric Glass Co., Ltd.
- Hiroki Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 11,947,232
- Issue date Apr 2, 2024
- View, Inc.
- Sridhar Karthik Kailasam
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
- Patent number 11,939,666
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit geometry for particle reduction in PVD processes
- Patent number 11,935,732
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Adolph M. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for homogeneously coating 3D substrates
- Patent number 11,913,108
- Issue date Feb 27, 2024
- FHR Anlagenbau GmbH
- Sven Häberlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alloy coated steel sheet
- Patent number 11,905,587
- Issue date Feb 20, 2024
- POSCO Co., Ltd
- Ji Hoon Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic film forming apparatus
- Patent number 11,906,246
- Issue date Feb 20, 2024
- Shibaura Mechatronics Corporation
- Yukinobu Nishibe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and devices for subtractive self-alignment
- Patent number 11,908,696
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- He Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material deposition apparatus having at least one heating assembly...
- Patent number 11,905,589
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,898,238
- Issue date Feb 13, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,897,811
- Issue date Feb 13, 2024
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 11,891,327
- Issue date Feb 6, 2024
- View, Inc.
- Anshu A. Pradhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,885,021
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum arrangement and method
- Patent number 11,887,867
- Issue date Jan 30, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Torsten Dsaak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate flipping in vacuum for dual sided PVD sputtering
- Patent number 11,881,427
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffusion barrier films enabling the stability of lithium
- Patent number 11,876,231
- Issue date Jan 16, 2024
- Applied Materials, Inc.
- Dmitri A. Brevnov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,869,791
- Issue date Jan 9, 2024
- Ulvac, Inc.
- Dai Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment apparatus and surface treatment method
- Patent number 11,866,819
- Issue date Jan 9, 2024
- Semes Co., Ltd.
- Sung Nam Yoo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multi-chamber substrate processing platform
- Patent number 11,860,528
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 11,851,751
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line monitoring of OLED layer thickness and dopant concentration
- Patent number 11,856,833
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal nanoparticle fabrication on TCO for plasmonic interaction of...
- Patent number 11,851,743
- Issue date Dec 26, 2023
- SunDensity, Inc.
- Nishikant Sonwalkar
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and apparatus for extended chamber for through silicon via...
- Patent number 11,846,013
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device, method and use for the coating of lenses
- Patent number 11,842,889
- Issue date Dec 12, 2023
- Schneider GmbH & Co. KG
- Gunter Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display apparatus and methods
- Patent number 11,840,758
- Issue date Dec 12, 2023
- Nanolumens Acquisition, Inc.
- Richard C. Cope
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...
- Publication number 20240141478
- Publication date May 2, 2024
- Applied Materials, Inc.
- Timothy KLEINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING AN ELECTROCHEMICAL COMPONENT COMPRISING A...
- Publication number 20240136495
- Publication date Apr 25, 2024
- Pulsedeon Oy
- Ville KEKKONEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
- Publication number 20240136211
- Publication date Apr 25, 2024
- Pragmatic Printing Ltd.
- Richard David PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATER CONDITIONING MODE
- Publication number 20240124970
- Publication date Apr 18, 2024
- BÜHLER ALZENAU GMBH
- Simon LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION
- Publication number 20240130210
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION...
- Publication number 20240117484
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Wolfgang BUSCHBECK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Display Apparatus and Methods
- Publication number 20240110276
- Publication date Apr 4, 2024
- Nanolumens Acquisition, Inc
- Richard C. Cope
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240112932
- Publication date Apr 4, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE
- Publication number 20240102147
- Publication date Mar 28, 2024
- nexTC Corporation
- Cory K. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...
- Publication number 20240102154
- Publication date Mar 28, 2024
- Chun Cheng CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240107865
- Publication date Mar 28, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shingo EGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL LASER EVAPORATION SYSTEM
- Publication number 20240102151
- Publication date Mar 28, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER
- Publication number 20240102153
- Publication date Mar 28, 2024
- Fuhong ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW...
- Publication number 20240102155
- Publication date Mar 28, 2024
- Solayer GmbH
- Jens HERGENRÖTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRAT...
- Publication number 20240102152
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Yun-Chu TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING
- Publication number 20240096687
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Harish V PENMETHSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS
- Publication number 20240084442
- Publication date Mar 14, 2024
- University of Ulsan Foundation for Industry Cooperation
- Eun Jung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-chamber Configuration
- Publication number 20240087924
- Publication date Mar 14, 2024
- HINE AUTOMATION, LLC
- Joseph Arthur Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...
- Publication number 20240068090
- Publication date Feb 29, 2024
- KITZ SCT CORPORATION
- Yoshifumi HOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS
- Publication number 20240068087
- Publication date Feb 29, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shubo WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM
- Publication number 20240068089
- Publication date Feb 29, 2024
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Apparatus and Methods for Sequential Coating
- Publication number 20240068102
- Publication date Feb 29, 2024
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
- Publication number 20240060171
- Publication date Feb 22, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20240060170
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- MANABU HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240057464
- Publication date Feb 15, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shingo EGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240052477
- Publication date Feb 15, 2024
- Canon ANELVA Corporation
- Masahiro ATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL
- Publication number 20240052479
- Publication date Feb 15, 2024
- Chongqing JIMAT New Material Technology Co., Ltd.
- Shiwei ZANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT
- Publication number 20240047267
- Publication date Feb 8, 2024
- Tsung-Han YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM SYSTEM CLUSTER TOOL
- Publication number 20240026534
- Publication date Jan 25, 2024
- EMPA EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
- Carlos GUERRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED LITHIUM DEPOSITION WITH PROTECTIVE LAYER TOOL
- Publication number 20240030417
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Subramanya P. HERLE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method to evaporate an OLED layer stack in a vertical or...

Method of forming nickel silicide materials

Process kit having tall deposition ring for PVD chamber

Glass roll production method

Fabrication of low defectivity electrochromic devices

Hot showerhead

Methods and apparatus for precleaning and treating wafer surfaces

Process kit geometry for particle reduction in PVD processes

Method and device for homogeneously coating 3D substrates

Cleaning of sin with CCP plasma or RPS clean

Alloy coated steel sheet

Organic film forming apparatus

Methods and devices for subtractive self-alignment

Material deposition apparatus having at least one heating assembly...

Shielding device and thin-film-deposition equipment with the same

System for forming nano-laminate optical coating

Fabrication of low defectivity electrochromic devices

Gas supply member with baffle

Vacuum arrangement and method

Substrate flipping in vacuum for dual sided PVD sputtering

Diffusion barrier films enabling the stability of lithium

Vacuum processing apparatus

Surface treatment apparatus and surface treatment method

Multi-chamber substrate processing platform

Deposition system and method

In-line monitoring of OLED layer thickness and dopant concentration

Metal nanoparticle fabrication on TCO for plasmonic interaction of...

Methods and apparatus for extended chamber for through silicon via...

Device, method and use for the coating of lenses

Display apparatus and methods

Patents Applicationslast 30 patents

WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LI...

METHOD FOR MANUFACTURING AN ELECTROCHEMICAL COMPONENT COMPRISING A...

SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS

COATER CONDITIONING MODE

IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION

EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION...

Display Apparatus and Methods

MANUFACTURING DEVICE OF DISPLAY DEVICE

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

THERMAL LASER EVAPORATION SYSTEM

PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER

METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW...

METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRAT...

SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING

MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS

Multi-chamber Configuration

GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...

MAGNETRON SPUTTERING APPARATUS

DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM

Deposition Apparatus and Methods for Sequential Coating

SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

DEPOSITION APPARATUS

METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL

TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT

VACUUM SYSTEM CLUSTER TOOL

INTEGRATED LITHIUM DEPOSITION WITH PROTECTIVE LAYER TOOL