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Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum

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  • CPC
  • C23C14/56
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/56Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus
    • Patent number 12,365,976
    • Issue date Jul 22, 2025
    • Shibaura Mechatronics Corporation
    • Shigeki Matsunaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrochromic cathode materials
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    • Issue date Jul 22, 2025
    • View Operating Corporation
    • Robert Tad Rozbicki
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    Ion beam etching chamber with etching by-product redistributor
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    • Issue date Jul 15, 2025
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Te-Hsien Hsieh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film deposition apparatus and film deposition method
    • Patent number 12,359,302
    • Issue date Jul 15, 2025
    • Tokyo Electron Limited
    • Manabu Honma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation apparatus
    • Patent number 12,354,854
    • Issue date Jul 8, 2025
    • Shibaura Mechatronics Corporation
    • Hisashi Nishigaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process kits and related methods for processing chambers to facilit...
    • Patent number 12,354,855
    • Issue date Jul 8, 2025
    • Applied Materials, Inc.
    • Zhepeng Cong
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  • Information Patent Grant

    Electrochromic cathode materials
    • Patent number 12,353,109
    • Issue date Jul 8, 2025
    • View Operating Corporation
    • Robert T. Rozbicki
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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    Device and method for producing thin-film catalyst
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    • SUZHOU TAONE SINCERE NANOMATERIAL TECHNOLOGY CO., LTD.
    • Ruoqi Qian
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  • Information Patent Grant

    Deposition apparatus
    • Patent number 12,338,526
    • Issue date Jun 24, 2025
    • Canon Anelva Corporation
    • Masahiro Atsumi
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  • Information Patent Grant

    Shutter disk for physical vapor deposition (PVD) chamber
    • Patent number 12,338,527
    • Issue date Jun 24, 2025
    • Applied Materials, Inc.
    • Zhiyong Wang
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  • Information Patent Grant

    Filter for a plasma plume
    • Patent number 12,330,102
    • Issue date Jun 17, 2025
    • Lam Researh Corporation
    • Jan Matthijn Dekkers
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    Argon-helium based coating
    • Patent number 12,331,390
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    • VIA VI SOLUTIONS INC.
    • Andrew Clark
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  • Information Patent Grant

    Deposition system and method
    • Patent number 12,331,392
    • Issue date Jun 17, 2025
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Wen-Hao Cheng
    • B08 - CLEANING
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    Microminiature patterned metal on medical grade balloons
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    • Craig A. Ingalls
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  • Information Patent Grant

    Vacuum coating device
    • Patent number 12,319,998
    • Issue date Jun 3, 2025
    • Baoshan Iron & Steel Co., Ltd.
    • Sanbing Ren
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing solid state battery cathodes for use in bat...
    • Patent number 12,312,673
    • Issue date May 27, 2025
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    • Robert Ian Joseph Gruar
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  • Information Patent Grant

    Evaporation apparatus, vapor deposition apparatus, and evaporation...
    • Patent number 12,286,703
    • Issue date Apr 29, 2025
    • Applied Materials, Inc.
    • Wolfgang Buschbeck
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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    Structures and methods for processing a semiconductor substrate
    • Patent number 12,286,706
    • Issue date Apr 29, 2025
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Ming-Yi Shen
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  • Information Patent Grant

    Apparatus for manufacturing semiconductor device
    • Patent number 12,286,707
    • Issue date Apr 29, 2025
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    • Joonmyoung Lee
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    Transport device and method
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    Semiconductor cleaning step
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    Process chamber component and method of forming a surface texture
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    • Cleanpart Group GmbH
    • Olivier Marchand
    • B22 - CASTING POWDER METALLURGY
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    Transfer apparatus and film deposition apparatus using transfer app...
    • Patent number 12,270,100
    • Issue date Apr 8, 2025
    • SHINCRON CO., LTD.
    • Yoshinori Ogo
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    Steel sheet provided with a zinc coating
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    • Daniel Chaleix
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  • Information Patent Grant

    Magnetron sputter device
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    • Issue date Apr 1, 2025
    • Daegu Gyeongbuk Institute of Science & Technology
    • June Seo Kim
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    System, method and support for coating eyeglass lenses
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    • Schneider GmbH & Co. KG
    • Gunter Schneider
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    Apparatus for and method of manufacturing semiconductor device
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  • Information Patent Grant

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  • Information Patent Grant

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    • Issue date Mar 11, 2025
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  • Information Patent Grant

    Substrate flipping in vacuum for dual sided PVD sputtering
    • Patent number 12,249,537
    • Issue date Mar 11, 2025
    • Applied Materials, Inc.
    • Harish V Penmethsa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents