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Apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems not provided for in B81C99/001 - B81C99/002
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C99/00
Subject matter not provided for in other groups of this subclass
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B81C99/0025
Apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems not provided for in B81C99/001 - B81C99/002
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Patents Grants
last 30 patents
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Patent Grant
Self-packing three-arm thermal scanning probe for micro-nano manufa...
Patent number
11,970,392
Issue date
Apr 30, 2024
Zhejiang University
Huan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
Patent number
11,926,524
Issue date
Mar 12, 2024
Iowa State University Research Foundation, Inc.
Metin Uz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor removing apparatus and operation method thereof
Patent number
11,505,457
Issue date
Nov 22, 2022
Xintec Inc.
Yu-Tang Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transparent material processing method, transparent material proces...
Patent number
11,471,981
Issue date
Oct 18, 2022
HIROSAKI UNIVERSITY
Yasutaka Hanada
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System for manufacturing microneedle preparation, and air-condition...
Patent number
11,130,148
Issue date
Sep 28, 2021
Hisamitsu Pharmaceutical Co., Inc.
Eiji Hashimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
Patent number
11,066,296
Issue date
Jul 20, 2021
Iowa State University Research Foundation, Inc.
Metin Uz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Additive manufacturing processes and manufactured article
Patent number
11,053,154
Issue date
Jul 6, 2021
Corning Incorporated
Xinghua Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and systems for fast imprinting of nanometer scale features...
Patent number
10,737,434
Issue date
Aug 11, 2020
North Carolina State University
Thomas A. Dow
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectro-mechanical system device and method for electrostatic...
Patent number
10,717,644
Issue date
Jul 21, 2020
United Microeletronics Corp
Linlin Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
Patent number
10,662,059
Issue date
May 26, 2020
Hitachi, Ltd.
Keiji Watanabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
Patent number
10,605,824
Issue date
Mar 31, 2020
Hitachi, Ltd.
Shuntaro Machida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transfer head and method for transferring micro devices
Patent number
10,593,581
Issue date
Mar 17, 2020
MIKRO MESA TECHNOLOGY CO., LTD.
Li-Yi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a microelectromechanical system d...
Patent number
10,570,011
Issue date
Feb 25, 2020
United States of America as represented by Secretary of the Navy
Paul D. Swanson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS manufacturing system and MEMS manufacturing method
Patent number
10,538,429
Issue date
Jan 21, 2020
Hitachi, Ltd.
Misuzu Sagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microstructure processing method and microstructure processing appa...
Patent number
10,336,609
Issue date
Jul 2, 2019
Hitachi, Ltd.
Keiji Watanabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microcantilever
Patent number
10,202,276
Issue date
Feb 12, 2019
Industry-University Cooperation Foundation Sogang University
Jung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Circuit board module comprising a continuous cavity, associated son...
Patent number
10,206,046
Issue date
Feb 12, 2019
USOUND GMBH
Ferruccio Bottoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Adhesive tape separating tool, manufacturing apparatus of semicondu...
Patent number
10,147,621
Issue date
Dec 4, 2018
Seiko Epson Corporation
Akira Takada
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of selectively removing an anti-stiction layer on a eutectic...
Patent number
10,053,361
Issue date
Aug 21, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device manufacturing method and device manufacturing apparatus
Patent number
10,002,801
Issue date
Jun 19, 2018
Hitachi, Ltd.
Misuzu Sagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultra-high speed anisotropic reactive ion etching
Patent number
9,966,232
Issue date
May 8, 2018
The Penn State Research Foundation
Srinivas Tadigadapa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and systems for fast imprinting of nanometer scale features...
Patent number
9,956,720
Issue date
May 1, 2018
North Carolina State University
Thomas A. Dow
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Inertial angular sensor of balanced MEMS type and method for balanc...
Patent number
9,869,551
Issue date
Jan 16, 2018
Sagem Defense Securite
Alain Jeanroy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing micro-array substrate
Patent number
9,783,893
Issue date
Oct 10, 2017
Gachon University of Industry-Academic cooperation Foundation
Young Soo Yoon
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Room temperature bonding apparatus and room temperature bonding method
Patent number
9,580,306
Issue date
Feb 28, 2017
MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO., LTD.
Masato Kinouchi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Micropattern generation with pulsed laser diffraction
Patent number
9,527,730
Issue date
Dec 27, 2016
Indian Institute of Technology Kanpur
Ashutosh Sharma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Nanopositioning substrate preparation apparatus and preparation met...
Patent number
9,403,180
Issue date
Aug 2, 2016
Korea Research Institute of Bioscience & Biotechnology
Tai-Hwan Ha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for forming self-assembly arrays
Patent number
9,255,002
Issue date
Feb 9, 2016
Cornell University
Dan Luo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a structured surface
Patent number
9,233,843
Issue date
Jan 12, 2016
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic surface processing systems with self-regulated distanc...
Patent number
9,229,455
Issue date
Jan 5, 2016
International Business Machines Corporation
Emmanuel Delamarche
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND M...
Publication number
20240182294
Publication date
Jun 6, 2024
Kabushiki Kaisha Toshiba
Hiroki HIRAGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED DICING DIE BONDING SHEET AND METHOD FOR PRODUCING SEMICO...
Publication number
20240087941
Publication date
Mar 14, 2024
Dow Toray Co., Ltd.
Nohno TODA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-PACKING THREE-ARM THERMAL SCANNING PROBE FOR MICRO-NANO MANUFA...
Publication number
20240002220
Publication date
Jan 4, 2024
ZHEJIANG UNIVERSITY
Huan HU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED INERTIAL SENSOR AND MET...
Publication number
20230287555
Publication date
Sep 14, 2023
Abdulilah Mayet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
Publication number
20220340416
Publication date
Oct 27, 2022
TOP TECHNOLOGY LTD
Youngho LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF
Publication number
20220332571
Publication date
Oct 20, 2022
XINTEC INC.
Yu-Tang SHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADDITIVE MANUFACTURING PROCESSES AND MANUFACTURED ARTICLE
Publication number
20210292216
Publication date
Sep 23, 2021
Corning Incorporated
Xinghua Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRANSPARENT MATERIAL PROCESSING METHOD, TRANSPARENT MATERIAL PROCES...
Publication number
20210061650
Publication date
Mar 4, 2021
HIROSAKI UNIVERSITY
Yasutaka HANADA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Deposition Apparatus
Publication number
20210005439
Publication date
Jan 7, 2021
SPTS TECHNOLOGIES LIMITED
Rhonda Hyndman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and System for Fabricating a Microelectromechanical System D...
Publication number
20200071161
Publication date
Mar 5, 2020
Paul D. Swanson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING A SUBSTRATE
Publication number
20190359482
Publication date
Nov 28, 2019
Institut National de la Sante et de la Recherche Medicale (INSERM)
Jérôme BELOUGNE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRANSFER HEAD AND METHOD FOR TRANSFERRING MICRO DEVICES
Publication number
20190267271
Publication date
Aug 29, 2019
MIKRO MESA TECHNOLOGY CO., LTD.
Li-Yi CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...
Publication number
20190062157
Publication date
Feb 28, 2019
Hitachi, Ltd
Keiji WATANABE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTRO-MECHANICAL SYSTEM DEVICE AND METHOD FOR ELECTROSTATIC...
Publication number
20180362336
Publication date
Dec 20, 2018
UNITED MICROELECTRONICS CORP.
LINLIN ZHAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Mems Manufacturing Method and Mems Manufacturing Apparatus
Publication number
20180267075
Publication date
Sep 20, 2018
Hitachi, Ltd
Shuntaro MACHIDA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADHESIVE TAPE SEPARATING TOOL, MANUFACTURING APPARATUS OF SEMICONDU...
Publication number
20180090351
Publication date
Mar 29, 2018
SEIKO EPSON CORPORATION
Akira TAKADA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROSTRUCTURE PROCESSING METHOD AND MICROSTRUCTURE PROCESSING APPA...
Publication number
20170362082
Publication date
Dec 21, 2017
Hitachi, Ltd
Keiji WATANABE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR PRODUCING MICRO-ARRAY SUBSTRATE
Publication number
20160298241
Publication date
Oct 13, 2016
Gachon University of Industry-Academic Cooperation Foundation
Young Soo YOON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROCANTILEVER
Publication number
20160236929
Publication date
Aug 18, 2016
Industry-University Cooperation Foundation Sogang University
Jung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of Selectively Removing an Anti-Stiction Layer on a Eutectic...
Publication number
20160185592
Publication date
Jun 30, 2016
Taiwan Semiconductor Manufacturing Co., LTD
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROOM TEMPERATURE BONDING APPARATUS AND ROOM TEMPERATURE BONDING METHOD
Publication number
20150251904
Publication date
Sep 10, 2015
Mitsubishi Heavy Industries, Ltd.
Masato Kinouchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROOM-TEMPERATURE BONDING APPARATUS AND ROOM-TEMPERATURE BONDING METHOD
Publication number
20150249026
Publication date
Sep 3, 2015
Mitsubishi Heavy Industries, Ltd.
Takeshi Tsuno
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A STRUCTURED SURFACE
Publication number
20150140717
Publication date
May 21, 2015
ROBERT BOSCH GmbH
Andrea URBAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATE ETCHING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20140363975
Publication date
Dec 11, 2014
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL ANGULAR SENSOR OF BALANCED MEMS TYPE AND METHOD FOR BALANC...
Publication number
20140299947
Publication date
Oct 9, 2014
Sagem Defense Securite
Alain Jeanroy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING
Publication number
20140166618
Publication date
Jun 19, 2014
The Penn State Research Foundation
Srinivas TADIGADAPA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC SURFACE PROCESSING SYSTEMS WITH SELF-REGULATED DISTANC...
Publication number
20140137962
Publication date
May 22, 2014
International Business Machines Corporation
Emmanuel Delamarche
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANOPOSITIONING SUBSTRATE PREPARATION APPARATUS AND PREPARATION MET...
Publication number
20140134336
Publication date
May 15, 2014
KOREA RESEARCH INSTITUTE OF BIOSCIENCE AND BIOTECH NOLOGY
Tai-Hwan Ha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC SURFACE PROCESSING SYSTEMS WITH SELF-REGULATED DISTANC...
Publication number
20140090715
Publication date
Apr 3, 2014
International Business Machines Corporation
Emmanuel Delamarche
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROPATTERN GENERATION WITH PULSED LASER DIFFRACTION
Publication number
20140033977
Publication date
Feb 6, 2014
JAWAHARLAL NEHRU CENTRE FOR ADVANCED SCIENTIFIC RESEARCH
Ashutosh SHARMA
B81 - MICRO-STRUCTURAL TECHNOLOGY