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Apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems, or methods for manufacturing the same
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Industry
CPC
B81C99/0005
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C99/00
Subject matter not provided for in other groups of this subclass
Current Industry
B81C99/0005
Apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems, or methods for manufacturing the same
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Patents Grants
last 30 patents
Information
Patent Grant
Mems device having a rugged package and fabrication process thereof
Patent number
11,873,215
Issue date
Jan 16, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Devices with thinned wafer
Patent number
9,428,381
Issue date
Aug 30, 2016
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
Publication number
20220185661
Publication date
Jun 16, 2022
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
Publication number
20200115224
Publication date
Apr 16, 2020
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR ELECTROPLATING A MEMS DEVICE
Publication number
20170175283
Publication date
Jun 22, 2017
TEXAS INSTRUMENTS INCORPORATED
Donald Charles Abbott
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICES WITH THINNED WAFER
Publication number
20150246809
Publication date
Sep 3, 2015
INFINEON TECHNOLOGIES AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY