Applying energy to the substrate during sputtering

Industry

CPC
C23C14/3435

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3435Applying energy to the substrate during sputtering

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for preparing glow discharge sputtering sample...
- Patent number 12,019,025
- Issue date Jun 25, 2024
- NCS TESTING TECHNOLOGY CO., LTD
- Xing Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Supplemental energy for low temperature processes
- Patent number 11,981,999
- Issue date May 14, 2024
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for printing conformal materials on component edges at high...
- Patent number 11,785,722
- Issue date Oct 10, 2023
- IO Tech Group Ltd.
- Michael Zenou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for depositing aluminum by physical vapor dep...
- Patent number 11,674,216
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Siew Kit Hoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition system and processes
- Patent number 11,639,544
- Issue date May 2, 2023
- Applied Materials, Inc.
- Sanjay Bhat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition system and processes
- Patent number 11,542,595
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Wen Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for printing conformal materials on component edges at high...
- Patent number 11,497,124
- Issue date Nov 8, 2022
- IO Tech Group Ltd.
- Michael Zenou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device
- Patent number 11,410,837
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Hiroyuki Toshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for filling a feature disposed in a substrate
- Patent number 11,289,329
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Rui Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target and process for producing a target
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- Issue date Aug 24, 2021
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- Rudolf Gradinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, vacuum processing apparatus, method of manuf...
- Patent number 11,035,034
- Issue date Jun 15, 2021
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering showerhead
- Patent number 10,577,689
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum nitride piezoelectric thin film, piezoelectric material, p...
- Patent number 10,475,984
- Issue date Nov 12, 2019
- MURATA MANUFACTURING CO., LTD.
- Keiichi Umeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,233,535
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Yoshihide Kihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 9,863,038
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 9,818,587
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing acoustic wave device
- Patent number 9,584,088
- Issue date Feb 28, 2017
- Murata Manufacturing Co., Ltd.
- Taku Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to prepare a substrate for molecular detection
- Patent number 8,836,941
- Issue date Sep 16, 2014
- IMRA America, Inc.
- Makoto Murakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pulsed laser micro-deposition pattern formation
- Patent number 8,663,754
- Issue date Mar 4, 2014
- IMRA America, Inc.
- Bing Liu
- B44 - DECORATIVE ARTS
Information Patent Grant
Method of forming phase change memory devices in a pulsed DC deposi...
- Patent number 7,888,240
- Issue date Feb 15, 2011
- STMicroelectronics S.r.l.
- Roger Hamamjy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film flexible solar cell
- Patent number 6,548,751
- Issue date Apr 15, 2003
- SolarFlex Technologies, Inc.
- Lawrence H. Sverdrup
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing ZnSe thin films by ion-assisted continuous wav...
- Patent number 6,503,578
- Issue date Jan 7, 2003
- National Science Council
- Pey-Shiun Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming thin film having excellent insulating property...
- Patent number 5,523,166
- Issue date Jun 4, 1996
- Nippon Steel Corporation
- Shinji Tokumaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrasonic enhancement of aluminum step coverage and apparatus
- Patent number 5,520,784
- Issue date May 28, 1996
- Sony Corporation
- Michael G. Ward
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing Y-Ba-Cu-O superconducting thin film
- Patent number 5,466,665
- Issue date Nov 14, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Yukihisa Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,316,645
- Issue date May 31, 1994
- Canon Kabushiki Kaisha
- Atsushi Yamagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron deposition of ceramic oxide-superconductor thin films
- Patent number 4,960,753
- Issue date Oct 2, 1990
- George J. Collins
- C30 - CRYSTAL GROWTH
Information Patent Grant
Magnetron deposition of ceramic oxide-superconductor thin films
- Patent number 4,842,704
- Issue date Jun 27, 1989
- George J. Collins
- C30 - CRYSTAL GROWTH
Information Patent Grant
Piezoelectric shear wave resonator and method of making same
- Patent number 4,719,383
- Issue date Jan 12, 1988
- The United States of America as represented by the United States Department o...
- Jin S. Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a piezoelectric shear wave resonator
- Patent number 4,640,756
- Issue date Feb 3, 1987
- The United States of America as represented by the United States Department o...
- Jin S. Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
P-TYPE GALLIUM OXIDE FILM, AND PREPARATION METHOD AND APPLICATION T...
- Publication number 20240410047
- Publication date Dec 12, 2024
- HUBEI UNIVERSITY
- Yunbin HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD FOR CONTROLLING RESISTIVITY AND CRYSTALLINITY OF LOW-RESISTA...
- Publication number 20240355626
- Publication date Oct 24, 2024
- ULVAC, Inc.
- Chang Min SHIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber
- Publication number 20240093355
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS FOR PRINTING CONFORMAL MATERIALS ON COMPONENT EDGES AT HIGH...
- Publication number 20230007786
- Publication date Jan 5, 2023
- IO TECH GROUP LTD.
- Michael Zenou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PREPARING GLOW DISCHARGE SPUTTERING SAMPLE...
- Publication number 20220205922
- Publication date Jun 30, 2022
- NCS Testing Technology CO.,LTD
- Xing YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPLEMENTAL ENERGY FOR LOW TEMPERATURE PROCESSES
- Publication number 20220162756
- Publication date May 26, 2022
- Applied Materials, Inc.
- David K. CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD
- Publication number 20220076932
- Publication date Mar 10, 2022
- JSW AFTY Corporation
- Masaru Shimada
- H01 - BASIC ELECTRIC ELEMENTS
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DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE, METHOD OF CO...
- Publication number 20210222288
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Christof KURTHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHODS AND APPARATUS FOR DEPOSITING ALUMINUM BY PHYSICAL VAPOR DEP...
- Publication number 20210189545
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- Siew Kit HOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SYSTEMS AND TECHNIQUES FOR MODIFYING ELECTRONIC PROPERTIES OF MATTER
- Publication number 20200392003
- Publication date Dec 17, 2020
- CONTINUUM ENERGY TECHNOLOGIES, LLC
- Christopher J. Nagel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE
- Publication number 20200350159
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Rui LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Physical Vapor Deposition System And Processes
- Publication number 20200277697
- Publication date Sep 3, 2020
- Applied Materials, Inc.
- Sanjay Bhat
- H01 - BASIC ELECTRIC ELEMENTS
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Physical Vapor Deposition System And Processes
- Publication number 20200277696
- Publication date Sep 3, 2020
- Applied Materials, Inc.
- Wen Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Physical Vapor Deposition System And Processes
- Publication number 20200277698
- Publication date Sep 3, 2020
- Applied Materials, Inc.
- Vibhu Jindal
- H01 - BASIC ELECTRIC ELEMENTS
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FILM-FORMING DEVICE
- Publication number 20200071815
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD FOR PREPARING HIGH-HARDNESS ANTI-BACTERIAL PVD FILM
- Publication number 20180105927
- Publication date Apr 19, 2018
- Fook Chi MAK
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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SPUTTERING SHOWERHEAD
- Publication number 20180087155
- Publication date Mar 29, 2018
- Applied Materials, Inc.
- Anantha K. SUBRAMANI
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COATED ARTICLE INCLUDING METAL ISLAND LAYER(S) FORMED USING STOICHI...
- Publication number 20170241009
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- Guardian Industries Corp.
- Brent BOYCE
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FILM FORMATION METHOD, VACUUM PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20170145588
- Publication date May 25, 2017
- Canon ANELVA Corporation
- YOSHIAKI DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARTUS AND METHOD FOR PRODUCING SPUTTER-DEPOSITED COATINGS ON FLU...
- Publication number 20170051392
- Publication date Feb 23, 2017
- THE UNITED STATES GOVERNMENT AS REPRESENTED BY THE SECRETARY OF THE ARMY
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ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, P...
- Publication number 20160372653
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- Murata Manufacturing Co., Ltd.
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160032445
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHODS OF MAGNETICALLY ENHANCED PHYSICAL VAPOR DEPOSITION
- Publication number 20150345010
- Publication date Dec 3, 2015
- University of Dayton
- Christopher Muratore
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PLASMA PROCESSING APPARATUS
- Publication number 20150053553
- Publication date Feb 26, 2015
- NISSIN ELECTRIC CO., LTD.
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- Publication date Jun 12, 2014
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METHOD OF FABRICATING LIGHT RECEIVING ELEMENT AND APPARATUS FOR FAB...
- Publication number 20130009193
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- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
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- Bing Liu
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Applying energy to the substrate during sputtering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for preparing glow discharge sputtering sample...

Supplemental energy for low temperature processes

Systems for printing conformal materials on component edges at high...

Methods and apparatus for depositing aluminum by physical vapor dep...

Physical vapor deposition system and processes

Physical vapor deposition system and processes

Methods for printing conformal materials on component edges at high...

Film-forming device

Methods and apparatus for filling a feature disposed in a substrate

Target and process for producing a target

Film formation method, vacuum processing apparatus, method of manuf...

Sputtering showerhead

Aluminum nitride piezoelectric thin film, piezoelectric material, p...

Plasma processing apparatus and plasma processing method

Off-angled heating of the underside of a substrate using a lamp ass...

Off-angled heating of the underside of a substrate using a lamp ass...

Method for manufacturing acoustic wave device

Method and apparatus to prepare a substrate for molecular detection

Pulsed laser micro-deposition pattern formation

Method of forming phase change memory devices in a pulsed DC deposi...

Thin film flexible solar cell

Method for preparing ZnSe thin films by ion-assisted continuous wav...

Process for forming thin film having excellent insulating property...

Ultrasonic enhancement of aluminum step coverage and apparatus

Method of manufacturing Y-Ba-Cu-O superconducting thin film

Plasma processing apparatus

Magnetron deposition of ceramic oxide-superconductor thin films

Magnetron deposition of ceramic oxide-superconductor thin films

Piezoelectric shear wave resonator and method of making same

Method of making a piezoelectric shear wave resonator

Patents Applicationslast 30 patents

P-TYPE GALLIUM OXIDE FILM, AND PREPARATION METHOD AND APPLICATION T...

METHOD FOR CONTROLLING RESISTIVITY AND CRYSTALLINITY OF LOW-RESISTA...

Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber

SYSTEMS FOR PRINTING CONFORMAL MATERIALS ON COMPONENT EDGES AT HIGH...

APPARATUS AND METHOD FOR PREPARING GLOW DISCHARGE SPUTTERING SAMPLE...

SUPPLEMENTAL ENERGY FOR LOW TEMPERATURE PROCESSES

PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD

DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE, METHOD OF CO...

METHODS AND APPARATUS FOR DEPOSITING ALUMINUM BY PHYSICAL VAPOR DEP...

SYSTEMS AND TECHNIQUES FOR MODIFYING ELECTRONIC PROPERTIES OF MATTER

METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE

Physical Vapor Deposition System And Processes

Physical Vapor Deposition System And Processes

Physical Vapor Deposition System And Processes

FILM-FORMING DEVICE

METHOD FOR PREPARING HIGH-HARDNESS ANTI-BACTERIAL PVD FILM

SPUTTERING SHOWERHEAD

COATED ARTICLE INCLUDING METAL ISLAND LAYER(S) FORMED USING STOICHI...

FILM FORMATION METHOD, VACUUM PROCESSING APPARATUS, METHOD OF MANUF...

APPARTUS AND METHOD FOR PRODUCING SPUTTER-DEPOSITED COATINGS ON FLU...

ALUMINUM NITRIDE PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, P...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHODS OF MAGNETICALLY ENHANCED PHYSICAL VAPOR DEPOSITION

PLASMA PROCESSING APPARATUS

PULSED LASER MICRO-DEPOSITION PATTERN FORMATION

METHOD OF FABRICATING LIGHT RECEIVING ELEMENT AND APPARATUS FOR FAB...

THIN FILM DEPOSITING APPARATUS

THIN FILM DEPOSITING APPARATUS

METHOD AND APPARATUS TO PREPARE A SUBSTRATE FOR MOLECULAR DETECTION

PULSED LASER MICRO-DEPOSITION PATTERN FORMATION