Arc detection

Industry

CPC
H01J37/32944

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32944Arc detection

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Arc management algorithm of RF generator and match box for CCP plas...
- Patent number 12,176,190
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Tiefeng Shi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of plasma processing a substrate in a plasma chamber and pla...
- Patent number 12,148,601
- Issue date Nov 19, 2024
- TRUMPF Huettinger Sp. z o. o.
- Wojciech Gajewski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for monitoring faults, anomalies, and other cha...
- Patent number 12,142,452
- Issue date Nov 12, 2024
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for recognizing and addressing plasma discharge d...
- Patent number 12,100,604
- Issue date Sep 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Yu Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma generator, plasma treatment device, and method for providing...
- Patent number 12,087,544
- Issue date Sep 10, 2024
- CENTROTHERM INTERNATIONAL AG
- Sebastian Hubertus Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for detecting plasma of ultra fast with multi channel
- Patent number 11,961,720
- Issue date Apr 16, 2024
- T.O.S Co., Ltd.
- Yong Kyu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma state detection method, and pla...
- Patent number 11,935,731
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Daisuke Hayashi
- G08 - SIGNALLING
Information Patent Grant
Method and system for recognizing and addressing plasma discharge d...
- Patent number 11,894,250
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Yu Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma process monitoring device and plasma processing apparatus in...
- Patent number 11,862,442
- Issue date Jan 2, 2024
- Industry-Academic Cooperation Foundation, Yonsei University
- Il Gu Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus
- Patent number 11,821,067
- Issue date Nov 21, 2023
- Canon Anelva Corporation
- Masahiro Atsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF power generator with analogue and digital detectors
- Patent number 11,705,314
- Issue date Jul 18, 2023
- Comet AG
- Anton Labanc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast arc detecting match network
- Patent number 11,670,488
- Issue date Jun 6, 2023
- COMET Technologies USA, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor
- Patent number 11,508,561
- Issue date Nov 22, 2022
- FUJI CORPORATION
- Takahiro Jindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for actively tuning a plasma power source
- Patent number 11,398,369
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Rongping Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator, plasma treatment device, and method for providing...
- Patent number 11,355,316
- Issue date Jun 7, 2022
- CENTROTHERM INTERNATIONAL AG
- Sebastian Hubertus Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc suppression and pulsing in high power impulse magnetron sputter...
- Patent number 11,211,234
- Issue date Dec 28, 2021
- EVATEC AG
- Stanislav Kadlec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for monitoring faults, anomalies, and other cha...
- Patent number 11,189,454
- Issue date Nov 30, 2021
- AES Global Holdings, PTE. LTD
- Daniel Carter
- G01 - MEASURING TESTING
Information Patent Grant
Simple and environment-friendly production equipment for carbon nan...
- Patent number 10,763,080
- Issue date Sep 1, 2020
- WORLD LINKAGE HOLDINGS LIMITED
- Tsz Kin Ho
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Techniques for detecting micro-arcing occurring inside a semiconduc...
- Patent number 10,734,206
- Issue date Aug 4, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave generators and manufacture of synthetic diamond material
- Patent number 10,707,062
- Issue date Jul 7, 2020
- Element Six Technologies Limited
- John Robert Brandon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF substrate bias with high power impulse magnetron sputtering (HIP...
- Patent number 10,692,707
- Issue date Jun 23, 2020
- EVATEC AG
- Jürgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced optical sensor and method for detecting an optical event i...
- Patent number 10,692,705
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Mihail Mihaylov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus
- Patent number 10,676,813
- Issue date Jun 9, 2020
- Canon Anelva Corporation
- Masahiro Atsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering system and method including an arc detection
- Patent number 10,607,821
- Issue date Mar 31, 2020
- MKS Insturments, Inc.
- Jesse N. Klein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arcing detection apparatus for plasma processing
- Patent number 10,580,626
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Lin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for detecting micro-arcing occurring inside a semiconduc...
- Patent number 10,559,453
- Issue date Feb 11, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,504,698
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Masayuki Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for plasma ignition
- Patent number 10,475,622
- Issue date Nov 12, 2019
- Advanced Energy Industries, Inc.
- Josh Pankratz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting an arc occuring during supplying power to a plasma process
- Patent number 10,431,437
- Issue date Oct 1, 2019
- TRUMPF Huettinger Sp. z o. o.
- Cezary Gapinski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extinguishing arcs in a plasma chamber
- Patent number 10,312,064
- Issue date Jun 4, 2019
- TRUMPF Huettinger GmbH + Co. KG
- Andre Grede
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATOR, PLASMA TREATMENT DEVICE, AND METHOD FOR PROVIDING...
- Publication number 20240429026
- Publication date Dec 26, 2024
- CENTROTHERM INTERNATIONAL AG
- Sebastian Hubertus Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR ADJUSTING THE GAP BETWEEN A WAFER AND A TOP P...
- Publication number 20240387299
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Chan LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Machine Learning a Detection of at Least One Irregularit...
- Publication number 20240355598
- Publication date Oct 24, 2024
- COMET AG
- Thomas Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20240355600
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Novel arc management algorithm of RF generator and match box for CC...
- Publication number 20240304429
- Publication date Sep 12, 2024
- Tiefeng SHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE ANALYSIS OF PLASMA CONDITIONS
- Publication number 20240234112
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Michal Danek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLA...
- Publication number 20240186125
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240052477
- Publication date Feb 15, 2024
- Canon ANELVA Corporation
- Masahiro ATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE
- Publication number 20240047247
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Chansoo KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATING APPARATUS
- Publication number 20230386797
- Publication date Nov 30, 2023
- Peter CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Apparatus for Plasma Processing
- Publication number 20230330619
- Publication date Oct 19, 2023
- Haydale Graphene Industries PLC
- John-Mark Seymour
- C01 - INORGANIC CHEMISTRY
Information Patent Application
RF Power Generator with Analogue and Digital Detectors
- Publication number 20230298871
- Publication date Sep 21, 2023
- COMET AG
- Anton Labanc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST ARC DETECTING MATCH NETWORK
- Publication number 20230260755
- Publication date Aug 17, 2023
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR ADJUSTING THE GAP BETWEEN A WAFER AND A TOP P...
- Publication number 20230069081
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Chan LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DETECTING ARCING IN POWER DELIVERY SYSTEMS FOR PROCESS...
- Publication number 20220406581
- Publication date Dec 22, 2022
- Yue GUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR RECOGNIZING AND ADDRESSING PLASMA DISCHARGE D...
- Publication number 20220359244
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Yu WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA GENERATOR, PLASMA TREATMENT DEVICE, AND METHOD FOR PROVIDING...
- Publication number 20220254609
- Publication date Aug 11, 2022
- CENTROTHERM INTERNATIONAL AG
- Sebastian Hubertus Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR DETECTING PLASMA OF ULTRA FAST WITH MULTI CHANNEL
- Publication number 20220223389
- Publication date Jul 14, 2022
- T.O.S CO., Ltd.
- Yong Kyu KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Generator
- Publication number 20220216838
- Publication date Jul 7, 2022
- COMET AG
- Daniel Gruner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA PROCESSING A SUBSTRATE IN A PLASMA CHAMBER AND PLA...
- Publication number 20220208532
- Publication date Jun 30, 2022
- TRUMPF Huettinger Sp. z o. o.
- Wojciech Gajewski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MONITORING FAULTS, ANOMALIES, AND OTHER CHA...
- Publication number 20220157555
- Publication date May 19, 2022
- Advanced Energy Industries, Inc.
- Daniel Carter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20220037135
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVENT MONITORING AND CHARACTERIZATION
- Publication number 20210358785
- Publication date Nov 18, 2021
- Advanced Energy Industries, Inc.
- Andrew Merton
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR RECOGNIZING AND ADDRESSING PLASMA DISCHARGE D...
- Publication number 20210305074
- Publication date Sep 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Yu WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FAST ARC DETECTING MATCH NETWORK
- Publication number 20210217590
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSOR
- Publication number 20210183630
- Publication date Jun 17, 2021
- FUJI CORPORATION
- Takahiro JINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR, PLASMA TREATMENT DEVICE, AND METHOD FOR PROVIDING...
- Publication number 20210111001
- Publication date Apr 15, 2021
- CENTROTHERM INTERNATIONAL AG
- Sebastian Hubertus Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF Power Generator with Analogue and Digital Detectors
- Publication number 20210074529
- Publication date Mar 11, 2021
- COMET AG
- Anton Labanc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20200255933
- Publication date Aug 13, 2020
- Canon ANELVA Corporation
- Masahiro ATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...
- Publication number 20200111652
- Publication date Apr 9, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS

Arc detection

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Arc management algorithm of RF generator and match box for CCP plas...

Method of plasma processing a substrate in a plasma chamber and pla...

Systems and methods for monitoring faults, anomalies, and other cha...

Method and system for recognizing and addressing plasma discharge d...

Plasma generator, plasma treatment device, and method for providing...

Device for detecting plasma of ultra fast with multi channel

Plasma processing apparatus, plasma state detection method, and pla...

Method and system for recognizing and addressing plasma discharge d...

Plasma process monitoring device and plasma processing apparatus in...

Deposition apparatus

RF power generator with analogue and digital detectors

Fast arc detecting match network

Plasma processor

Method and apparatus for actively tuning a plasma power source

Plasma generator, plasma treatment device, and method for providing...

Arc suppression and pulsing in high power impulse magnetron sputter...

Systems and methods for monitoring faults, anomalies, and other cha...

Simple and environment-friendly production equipment for carbon nan...

Techniques for detecting micro-arcing occurring inside a semiconduc...

Microwave generators and manufacture of synthetic diamond material

RF substrate bias with high power impulse magnetron sputtering (HIP...

Advanced optical sensor and method for detecting an optical event i...

Deposition apparatus

Sputtering system and method including an arc detection

Arcing detection apparatus for plasma processing

Techniques for detecting micro-arcing occurring inside a semiconduc...

Plasma processing apparatus

System and method for plasma ignition

Detecting an arc occuring during supplying power to a plasma process

Extinguishing arcs in a plasma chamber

Patents Applicationslast 30 patents

PLASMA GENERATOR, PLASMA TREATMENT DEVICE, AND METHOD FOR PROVIDING...

METHOD AND SYSTEM FOR ADJUSTING THE GAP BETWEEN A WAFER AND A TOP P...

Method for Machine Learning a Detection of at Least One Irregularit...

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

Novel arc management algorithm of RF generator and match box for CC...

IMAGE ANALYSIS OF PLASMA CONDITIONS

PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLA...

DEPOSITION APPARATUS

SEMICONDUCTOR PROCESS DEVICE

PLASMA GENERATING APPARATUS

Methods and Apparatus for Plasma Processing

RF Power Generator with Analogue and Digital Detectors

FAST ARC DETECTING MATCH NETWORK

METHOD AND SYSTEM FOR ADJUSTING THE GAP BETWEEN A WAFER AND A TOP P...

METHODS FOR DETECTING ARCING IN POWER DELIVERY SYSTEMS FOR PROCESS...

METHOD AND SYSTEM FOR RECOGNIZING AND ADDRESSING PLASMA DISCHARGE D...

PLASMA GENERATOR, PLASMA TREATMENT DEVICE, AND METHOD FOR PROVIDING...

DEVICE FOR DETECTING PLASMA OF ULTRA FAST WITH MULTI CHANNEL

Radio Frequency Generator

METHOD OF PLASMA PROCESSING A SUBSTRATE IN A PLASMA CHAMBER AND PLA...

SYSTEMS AND METHODS FOR MONITORING FAULTS, ANOMALIES, AND OTHER CHA...

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

EVENT MONITORING AND CHARACTERIZATION

METHOD AND SYSTEM FOR RECOGNIZING AND ADDRESSING PLASMA DISCHARGE D...

FAST ARC DETECTING MATCH NETWORK

PLASMA PROCESSOR

PLASMA GENERATOR, PLASMA TREATMENT DEVICE, AND METHOD FOR PROVIDING...

RF Power Generator with Analogue and Digital Detectors

DEPOSITION APPARATUS

TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...